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20

4.5. Circulatory Lubrication

The ball bearing on the fore-vacuum side is supplied with
lubricant via the lubricating pump.
The circulation of the lubricant is monitored via a switching
contact. If there is insufficient lubricant, the electronic drive
unit switches off the  turbopump. Monitoring is active only
from 60% of the final rotation speed.
If, at a rotation speed of > 60% of the final rotation speed (for
example through the degassification of the lubricant), the
contact opens for 

2 minutes, the electronic drive unit 

assumes a lubricant deficiency and switches off the
turbopump.

In rotation speed setting mode with set speed

below 60% of the rated rotation speed the
pump is first accelerated to 60% and then adju-
sted to the selected rotation speed.

Check the filling level of the lubricant.

Re-start the turbopump with switch S1 on the power 
supply.

4.6. Switching OFF And Venting

To avoid contamination occurring when switching off, the
pump should be vented before shut-down.

Switch off both turbopump and backing pump on the
power supply at the same time with switch S1.
Where corrosive gas processes are involved, the sealing
gas supply should be shut off at the earliest after
approximately 10 minutes and both turbo pump and
backing pump switched off with switch S1.

Venting
There are three possibilities to vent turbopump:
– M

Ma

an

nu

ua

all  vve

en

nttiin

ng

g with the use of the venting screw 

(status on delivery).

– V

Ve

en

nttiin

ng

g  w

wiitth

h  tth

he

e  V

Ve

en

nttiin

ng

g  V

Va

allvve

e  T

TV

VFF  000055  ((sse

ee

e  S

Se

ec

cttiio

on

n  1111..))

which is selectable via the remote control (please 
see Section 4.9.), or via the DCU or HPU (please refer to 
the respective operating instructions.

– V

Ve

en

nttiin

ng

g  iin

n  ttw

wo

o  sstta

ag

ge

ess when the vacuum chamber 

should be vented as quickly as possible. 
First stage: venting with a pressure increase rate of 
15 mbar/s for 20 seconds.
Second stage: venting with an optionally large venting 
valve.

The valve cross-section for a venting rate of 15 mbar/s 
must be compatible with the size of the vacuum chamber.
Where small vacuum chambers are involved, the Pfeiffer
Vacuum Venting Valve TVF 005 can be used  for first stage
venting.

Shut off water supply.

PLEASE NOTE

4.7. Shutting Down For Longer Periods

Vacuum pumps are sometimes used to pump

aggressive or hazardous gases. There is a
danger of personal injury resulting from coming
into contact with process gases. Before
removing a turbopump from the system, first:

– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system

nor in the feeder lines.

If the turbopump is to be shut down for more than a year:

Remove turbopump from the system.

Change the lubricant (see Section 8.1.).

Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.

Vent turbopump via the venting connection with nitrogen
or dry air.

Close fore-vacuum and venting connection by blank 
flanging.

Place the pump vertically on its rubber feet.

The pump must be stored in buildings within a temperature
range of -25 °C to +55 °C.

In rooms with moist or aggressive atmospheres, the turbo-
pump must be air-sealed in a plastic bag together with a
bag of desiccant.

If the pump has been shut down for 44  yye

ea

arrss a

bearing change must be carried out (please
get in touch with Pfeiffer Vacuum Service).
Usability of the F3 lubricant is 4 years without
operation.

4.8. Operations With The DCU 001/DCU

600 or HPU 001

Operations with the DCU 001, DCU 600 or HPU 001 should be
carried out in accordance with the relevant Operating
Instructions:

– PM 0477 BN (DCU description),
– PM 0547 BN (Operating the pump with the DCU), 
– PT 0101 BN (Display and Operating Unit HPU 001).

Operations with the DCU 001, DCU 600 and

HPU 001, the remote plug 8d (see Section 10.)
on the TC 750 should be disconnected.

PLEASE NOTE

PLEASE NOTE

WARNING

Summary of Contents for TPH 1201 P

Page 1: ...Turbomolecular Pump With Electronic Drive Unit TC 750 PT 0147 BE G 0703 TPH 1201 P PC TPU 1201 P PC Betriebsanleitung Operating Instructions...

Page 2: ...erations 18 Operation with cooling water temperature 25 C 19 4 5 Circulatory Lubrication 20 4 6 Switching OFF And Venting 20 4 7 Shutting Down For Longer Periods 20 4 8 Operations With The DCU 001 DCU...

Page 3: ...the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 750 only in conjunction with the relevant power supply accessory Without th...

Page 4: ...y II Connection voltage 140 VDC 5 Proper Use The Turbomolecular Pumps may only be used for the purpose of generating vacuum The Turbomolecular Pumps TPH TPU 1201 P C please see the type plate are desi...

Page 5: ...been agreed by the manufacturer The connection to power supplies with earthing of a direct voltage pole The turbomolecular pumps and flange connections must not be used to tread on when climbing onto...

Page 6: ...ccidental contact Floor mounting of the turbomolecular pump is admissible after consulting the manufacturer The person responsible for commissioning must ensure that the installation is carried out in...

Page 7: ...he component parts in your set of mounting material Use 1 18 8 bracket screws Tighten the clamps crosswise in three steps Tightening torque 5 Nm 15 Nm 25 2 Nm See that the sealing surface is not damag...

Page 8: ...your set of mounting material Use 1 12 2 screws and 2 24 4 nuts For a flange material having a strength of 170 N mm2 and a stud screw with clearance hole the nuts must be tightened crosswise in three...

Page 9: ...Pfeiffer Vacuum range Connecting the backing pump All connections of the fore vacuum line With the usual small flange components or screwed hoses Be sure to conduct away the exhaust gases from the bac...

Page 10: ...nnection to a torque of 10 Nm Tighten all hose clips and check for firm seating of the hoses Cooling with the Recycled Water Cooling Unit TZK Accessory Connection Dirt traps are not permissible in the...

Page 11: ...TC 750 should be disconnected and then proceed in accordance with the relevant Operating Instructions 1 only with cable PM 051 843 T please see Section 11 CAUTION PLEASENOTE 3 7 Installing The Power S...

Page 12: ...serts with screwed cable glands and the cover 107d and insert the cables at the TC 750 In case the pump is operated using the remote control the remote control unit must be connected in accordance wit...

Page 13: ...agonal SW 14 Electrical connection Plug control lead 42a into the connection VENT of the TC 750 8 on the turbopump Release for venting is executed via remote plug pin 2 pre set on delivery please see...

Page 14: ...be processed 6 standby off standby on pump is accelerated to 66 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin o...

Page 15: ...the TC 750 is 960 Only safety low voltages SELV may be connected to Serial Interface RS 485 All switched on remote functions have priority over the serial interface functions Please refer to the separ...

Page 16: ...Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas Standby PWM on touch relation 25 7...

Page 17: ...lay And Operating Unit DCU HPU Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump T...

Page 18: ...a the DCU or HPU please refer to the respective operating Instructions Pumping gases with molecular mass 40 with the incorrect gas mode can cause damage to the pump When pumping noble gases heavier th...

Page 19: ...to high for the current power the rotor can overheat and being damaged that way A cooling water temperature 25 C has no influen ce the pump acts as with a cooling water temperature of 25 C To reduce p...

Page 20: ...ble First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s mu...

Page 21: ...ed setting operations for the turbopump Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs S S...

Page 22: ...ts in the turbomolecular pump being switched off LED on the TC 750 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d glows Power supply OK Function pumping station O...

Page 23: ...CU HPU or PC Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Page 24: ...FR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have t...

Page 25: ...tle the turbopump to change the lubricant this may only be carried out in the position shown in Section 3 2 otherwise the lubricant could contaminate the turbopump It is possible to detach the lubrica...

Page 26: ...Section 11 1 Install the lubricant pump back onto the turbomolecular pump again 8 4 Replacing The Electronic Drive Unit TC 750 Turbopump and Electronic Drive Unit TC 750 must only be disconnected fro...

Page 27: ...ow rate for Nitrogen N2 l s 1250 1250 1170 1170 Helium He l s 1300 1300 1230 1230 Hydrogen H2 l s 1100 1100 1050 1050 Argon Ar l s 1200 1200 1100 1100 CF4 l s 950 950 890 890 Compression ratio N2 1 10...

Page 28: ...sions Diagram 240 200 142 9 40 70 314 242 5 191 123 122 334 5 25 M16x32 tief 4 0 3 0 1 2 0 96 4 5 73 264 69 95 140 4 161 128 17 30 30 30 99 170 0 1 M6 DN 200 ISO K DN 40 ISO KF M6 G1 8 TPH 1201 P P C...

Page 29: ...29 200 142 9 40 70 122 25 M16x32 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 128 17 30 30 30 99 264 341 5 130 197 91 249 5 321 170 0 1 285 M6 DN 40 ISO KF DN 200 ISO F M6 G1 8 TPH 1201 P P C DN 200 ISO F...

Page 30: ...30 200 142 9 40 70 122 25 M16x32tief 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 99 253 264 142 210 262 333 354 128 30 30 30 17 170 0 1 M6 DN 200 CF F DN 40 ISO KF M6 G1 8 TPU 1201 P P C DN 200 CF F...

Page 31: ...rive Unit TC 750 1 PM C01 713 8d Remote plug 1 P 0920 668 E 17 Seal ring for water connections 2 P 3529 133 A 71 Lubricant filler screw 1 N 3191 382 X see Section 4 72 Lubricant drain screw 1 N 3191 3...

Page 32: ...321 Other accessories Connecting cable TC 750 TPS DCU PM 051 103 T 3 m other lengths on request Connecting cable TC 750 TPS DCU shielded PM 051 143 GT 3 m other lengths on request Power Supply TPS 60...

Page 33: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 34: ...specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provisio...

Page 35: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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