6
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
In case the rotor blocks suddenly, torque levels
up to 99880000 N
Nm
m can occur which need to be
absorbed by the system and the high vacuum
flange.
The turbopumps must not be transported when
filled with lubricant.
– Pumps must be filled with lubricant befor being operated
(see Section 4.1.).
– If the turbopump is to be operated with the DCU 001 or
HPU 001, the remote plug 8d (please see Section 2.1.) on
the TC 750 should be disconnected and then proceed in
accordance with the corresponding operating instructions.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exceeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– The temperature of the high vacuum flange must not
exceed 120 °C.
– Only remove the blank flange from the high and fore-vacu-
um side immediately before connection.
– Where magnetic fields of > 6 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burns from
accidental contact.
– Floor mounting of the turbomolecular pump is admissible
after consulting the manufacturer.
The person responsible for commissioning
must ensure that the installation is carried out
in accordance with the legal regulations and
the pertinent industrial standards.
☞
PLEASE NOTE
CAUTION
WARNING
WARNING
3.2. Connecting The High Vacuum Side
The utmost cleanliness must be observed
when fitting all high vacuum parts. Unclean
components prolong the pumping time.
All installations units for the flange must be
with installation grease-free, dust free and
drying.
U
Usse
e a
a P
Pffe
eiiffffe
err V
Va
ac
cu
uu
um
m ssp
plliin
ntte
err ssh
hiie
elld
d o
orr p
prro
otte
ec
cttiivve
e ssc
crre
ee
en
n
The use of a Pfeiffer Vacuum splinter shield or protective
screen in the high vacuum flange protects the turbopump
against foreign bodies coming from the vacuum chamber but
does reduce the volume flow rate as followed:
☞
PLEASE NOTE
Connecting via a Pfeiffer Vacuum vibration compensator
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a Pfeiffer Vacuum vibration compen-
sator (see Section 11. Accessories).
When using a Pfeiffer vacuum vibration compensator,
suitable securing needs to be introduced capable of
absorbing the energy of the rotor should it suddenly block,
since the vibration compensator itself alone cannot absorb
the occurring forces. Please consult the manufacturer.
The maximum permissible temperature at the
vibration compensator is 100 °C.
CAUTION
Reduced volume flow rate
[[%
%]]
N2
He
H2
Splinter shield
23
10
6
Protective screen
6
3
2
