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8. Maintenance / Replacement 

No liability for personal injury nor material

damage will be accepted for damages and
operational interruptions which have been
caused by improper maintenance; in addition,
all guarantees become invalid.

The bearing of the turbomolecular pump must be exchanged,
as a minimum requirement, every four years (request Pfeiffer
Vacuum Service to change). 
Where extreme operating conditions or unclean processes
are involved, the replacement interval should be checked
with your Pfeiffer Vacuum Service Center.

You can replace the lubricant, the lubricant pump and the
Electronic Drive Unit TC 750 yourself.
Please contact your local Pfeiffer Vacuum Service for all
other maintenance and service work.

Ensure no mechanical forces act on the 
Electronic Drive Unit TC 750.

8.1. Replacing The Lubricant

The lubricant should be replaced at least every 4 year. 
Where extreme operating conditions or unclean processes
are involved, the replacement interval should be checked
with your Pfeiffer Vacuum Service Center.

Lubricant drain screw 72 may only be opened if
the turbopump has been vented to atmospheric
pressure.

Drain of and fill in the lubricant in the fitting

position if possible. If it is absolutely necessary
to dismantle the turbopump to change the 
lubricant, this may only be carried out in the
position shown in Section 3.2. otherwise the
lubricant could contaminate the turbopump.

It is possible to detach the lubricating pump in

order to carry out a lubricant change.

Switch off the turbopump, vent to atmospheric pressure
(see Section 4.6.) and allow to cool as necessary.

Unscrew lubricant drain screw 72 and drain lubricant into
a suitable container.

PLEASE NOTE

CAUTION

WARNING

CAUTION

PLEASE NOTE

It is essential to ensure that the lubricant pump

is not over-filled with lubricant.
Overfilling will cause the excess lubricant to be
secreted from the hole for the lubricant filler
screw 71.

Screw in lubricant filler screw 71 with the O-ring 75.

CAUTION

75

A

73

72

71

Filling in the lubricant

A

Syringe

71 Lubricant filler screw
72 Lubricant drain screw
73 Sight glass
75 O-ring

Lubricants can contain toxic substances from
the medium pumped. Lubricant must be 
disposed of in accordance with the respective
regulations.
Safety instructions data sheet for the lubricant
on request.

Screw back in the lubricant drain screw with the O-ring 75.

Unscrew lubricant filler screw 71. Using the syringe provi-
ded inject approximately 40 ml (included in the delivery) of
lubricant as per the type plate.

Where the set-up position is vertical or 

horizontal the maximum lubricant level in the
sight glass is the lower edge of lubricant filler
screw 71.

PLEASE NOTE

WARNING

Summary of Contents for TPH 1201 P

Page 1: ...Turbomolecular Pump With Electronic Drive Unit TC 750 PT 0147 BE G 0703 TPH 1201 P PC TPU 1201 P PC Betriebsanleitung Operating Instructions...

Page 2: ...erations 18 Operation with cooling water temperature 25 C 19 4 5 Circulatory Lubrication 20 4 6 Switching OFF And Venting 20 4 7 Shutting Down For Longer Periods 20 4 8 Operations With The DCU 001 DCU...

Page 3: ...the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 750 only in conjunction with the relevant power supply accessory Without th...

Page 4: ...y II Connection voltage 140 VDC 5 Proper Use The Turbomolecular Pumps may only be used for the purpose of generating vacuum The Turbomolecular Pumps TPH TPU 1201 P C please see the type plate are desi...

Page 5: ...been agreed by the manufacturer The connection to power supplies with earthing of a direct voltage pole The turbomolecular pumps and flange connections must not be used to tread on when climbing onto...

Page 6: ...ccidental contact Floor mounting of the turbomolecular pump is admissible after consulting the manufacturer The person responsible for commissioning must ensure that the installation is carried out in...

Page 7: ...he component parts in your set of mounting material Use 1 18 8 bracket screws Tighten the clamps crosswise in three steps Tightening torque 5 Nm 15 Nm 25 2 Nm See that the sealing surface is not damag...

Page 8: ...your set of mounting material Use 1 12 2 screws and 2 24 4 nuts For a flange material having a strength of 170 N mm2 and a stud screw with clearance hole the nuts must be tightened crosswise in three...

Page 9: ...Pfeiffer Vacuum range Connecting the backing pump All connections of the fore vacuum line With the usual small flange components or screwed hoses Be sure to conduct away the exhaust gases from the bac...

Page 10: ...nnection to a torque of 10 Nm Tighten all hose clips and check for firm seating of the hoses Cooling with the Recycled Water Cooling Unit TZK Accessory Connection Dirt traps are not permissible in the...

Page 11: ...TC 750 should be disconnected and then proceed in accordance with the relevant Operating Instructions 1 only with cable PM 051 843 T please see Section 11 CAUTION PLEASENOTE 3 7 Installing The Power S...

Page 12: ...serts with screwed cable glands and the cover 107d and insert the cables at the TC 750 In case the pump is operated using the remote control the remote control unit must be connected in accordance wit...

Page 13: ...agonal SW 14 Electrical connection Plug control lead 42a into the connection VENT of the TC 750 8 on the turbopump Release for venting is executed via remote plug pin 2 pre set on delivery please see...

Page 14: ...be processed 6 standby off standby on pump is accelerated to 66 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin o...

Page 15: ...the TC 750 is 960 Only safety low voltages SELV may be connected to Serial Interface RS 485 All switched on remote functions have priority over the serial interface functions Please refer to the separ...

Page 16: ...Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas Standby PWM on touch relation 25 7...

Page 17: ...lay And Operating Unit DCU HPU Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump T...

Page 18: ...a the DCU or HPU please refer to the respective operating Instructions Pumping gases with molecular mass 40 with the incorrect gas mode can cause damage to the pump When pumping noble gases heavier th...

Page 19: ...to high for the current power the rotor can overheat and being damaged that way A cooling water temperature 25 C has no influen ce the pump acts as with a cooling water temperature of 25 C To reduce p...

Page 20: ...ble First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s mu...

Page 21: ...ed setting operations for the turbopump Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs S S...

Page 22: ...ts in the turbomolecular pump being switched off LED on the TC 750 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d glows Power supply OK Function pumping station O...

Page 23: ...CU HPU or PC Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Page 24: ...FR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have t...

Page 25: ...tle the turbopump to change the lubricant this may only be carried out in the position shown in Section 3 2 otherwise the lubricant could contaminate the turbopump It is possible to detach the lubrica...

Page 26: ...Section 11 1 Install the lubricant pump back onto the turbomolecular pump again 8 4 Replacing The Electronic Drive Unit TC 750 Turbopump and Electronic Drive Unit TC 750 must only be disconnected fro...

Page 27: ...ow rate for Nitrogen N2 l s 1250 1250 1170 1170 Helium He l s 1300 1300 1230 1230 Hydrogen H2 l s 1100 1100 1050 1050 Argon Ar l s 1200 1200 1100 1100 CF4 l s 950 950 890 890 Compression ratio N2 1 10...

Page 28: ...sions Diagram 240 200 142 9 40 70 314 242 5 191 123 122 334 5 25 M16x32 tief 4 0 3 0 1 2 0 96 4 5 73 264 69 95 140 4 161 128 17 30 30 30 99 170 0 1 M6 DN 200 ISO K DN 40 ISO KF M6 G1 8 TPH 1201 P P C...

Page 29: ...29 200 142 9 40 70 122 25 M16x32 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 128 17 30 30 30 99 264 341 5 130 197 91 249 5 321 170 0 1 285 M6 DN 40 ISO KF DN 200 ISO F M6 G1 8 TPH 1201 P P C DN 200 ISO F...

Page 30: ...30 200 142 9 40 70 122 25 M16x32tief 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 99 253 264 142 210 262 333 354 128 30 30 30 17 170 0 1 M6 DN 200 CF F DN 40 ISO KF M6 G1 8 TPU 1201 P P C DN 200 CF F...

Page 31: ...rive Unit TC 750 1 PM C01 713 8d Remote plug 1 P 0920 668 E 17 Seal ring for water connections 2 P 3529 133 A 71 Lubricant filler screw 1 N 3191 382 X see Section 4 72 Lubricant drain screw 1 N 3191 3...

Page 32: ...321 Other accessories Connecting cable TC 750 TPS DCU PM 051 103 T 3 m other lengths on request Connecting cable TC 750 TPS DCU shielded PM 051 143 GT 3 m other lengths on request Power Supply TPS 60...

Page 33: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 34: ...specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provisio...

Page 35: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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