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8.2. Cleaning The Lubricant Pump
If, after a malfunction on account of insufficient lubricant, the
pump no longer accelerates to the operating rotation speed,
the lubricant pump has to be cleaned or replaced (see
Section 8.3.).
For cleaning the lubricant pump please contact your local
Pfeiffer Vacuum Service Center.
8.3. Replacing The Lubricant Pump
If after a malfunction due to an insufficient quantity of
lubricant the turbopump cannot be accelerated again up to its
operating speed, the lubricant pump needs to be replaced as
detailed in the following.
Order number for the lubricant pump, see Section 10. Spare
Parts.
➡
Switch off the turbopump, vent to atmospheric pressure
(please see Section 4.6.) and allow to cool as necessary.
➡
Unscrew the socket cap screws 83 (4 pieces) from the
lubricant pump 77 and remove the lubricant pump from the
turbopump.
➡
Fill in lubricant F3 (approx. 40 ml) into the new lubricant
pump as detailed in Section 8.1 (ordering number for “F3”
see Section 11.1.).
➡
Install the lubricant pump back onto the turbomolecular
pump again.
8.4. Replacing The Electronic Drive Unit
TC 750
Turbopump and Electronic Drive Unit TC 750
must only be disconnected from each other
when the turbopump is completely at rest and
the turbopump has been disconnected from the
power supply.
Order number for the Electronic Drive Unit TC 750, see
Section 10. Spare Parts.
Remove the Electronic Drive Unit TC 750 from the turbopump
as follows:
➡
If necessary, remove the turbopump from the system.
➡
Unscrew screws 8c (2 pieces) from the Electronic Drive
Unit 8 and remove the TC 750 from the turbopump.
CAUTION
➡
Assemble the new Electronic Drive Unit TC 750 on the
turbopump and connect again.
Please take into account that after replacement
the Electronic Drive Unit TC 750 the standard
operating parameters are always pre-set.
If your application requires different parameters,
please modify accordingly.
CAUTION
77
83
Plug connector turbopump/
lubricant pump
Removing the lubricant pump from the turbopump
77 Lubricant pump
83 Socket cap screw ( 4 Stück)
8
8c
Replace the Electronic Drive Unit TC 750
8
Electronic Drive Unit TC 750
8c Screw (2 Stück)
