Pfeiffer Vacuum TMH 071 Operating Instructions Manual Download

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Index

Page

1. Safety Instructions .......................... 3

1.1. For Your Orientation ......................................... 3

1.2. Pictogram Definitions ....................................... 3

2. Understanding The Pumps............. 4

TMH 071 / TMU 071

2.1. Main Features ................................................... 4

Proper Use ....................................................... 5

Improper Use ................................................... 5

2.2. Differences Between The Pump Types............ 5

2.3. Scope Of Delivery ............................................. 5

3. Installation ....................................... 6

3.1. Preparations For Installation ............................. 6

3.2. Connecting The High Vacuum Side ................. 6

Installing The High Vacuum Flange................... 7

Directly Flanging The Pump .............................. 8

3.3. Connecting The Fore-Vacuum Side ................. 9

3.4. Connecting The Cooling Unit ............................ 9

3.5. Connecting The Venting Valve ........................ 10

3.6. Connecting The Casing Heating Unit .............. 10

3.7. Connecting The Sealing Gas Valve ................. 10

3.8. Connecting The Electronic Drive Unit TC 600 11

3.9. Installing The Power Supply .......................... 11

3.10. Installation Of Pfeiffer Vacuum ...................... 12

Display And Control Units

Connection ..................................................... 12

3.11. Connecting The RS 485 ................................ 12

3.12. Connecting The Remote Control Unit ............ 13

3.13. Connections Diagram ..................................... 14

4. Operations...................................... 15

4.1. Before Switching On ...................................... 15

4.2. Switching On .................................................. 15

4.3. Operations With The Remote Control Unit..... 15

Venting Release (Optional) ............................. 15

Motor, Turbopump ......................................... 15

Pumping Station ............................................ 15

Heating/Reset ................................................ 16

Standby ........................................................... 16

Rotation Speed Setting Mode ........................ 16
Via Input PWM

Switching Outputs .......................................... 16

Analog Output................................................. 16

4.4. Gas Type Dependent Operations .................. 16

4.5. Operations With The DCU 001/DCU 100 ...... 17

or HPU 001

4.6. Switching Off And Venting ............................. 17

4.7. Shutting Down For Longer Periods ............... 17

5. Monitoring Operations.................. 18

5.1. Operations Display Via LED ............................ 18

5.2. Turbopump Temperature Management ......... 18

6. What To Do In Case Of .................. 19

Breakdowns ?

Maintenance / Exchange .............. 20

7.1. Replacing The Electronic Drive Unit ............... 20

7.2. Replacing The Lubricant Reservoir ................. 21

Standard Version............................................. 21

“Y”-Version (Mounting In Any Orientation) .... 22

8. Service ............................................ 23

9. Technical Data ................................ 24

9.1. Dimensions Diagram ..................................... 25

10. Spare Parts ..................................... 26

11. Accessories..................................... 27

Declaration of Contamination ............ 28

Manufacturer’s Declaration .. (last page)

Plle

asse

e n

otte

e:: Current operating instructions are available via

www.pfeiffer-vacuum.net

For information about certifications, if applicable, please see
the signet on the pump or:

☞

www.tuvdotcom.com

☞

TUVdotCOM-ID 0000021320

Summary of Contents for TMH 071

Page 1: ...TurboDrag Pump with Electronic Drive Unit TC 600 PM 0504 BE M 0702 TMH 071 TMU 071 Betriebsanleitung Operating Instructions Translation of the Original Operating Instructions ...

Page 2: ...2 Switching On 15 4 3 Operations With The Remote Control Unit 15 Venting Release Optional 15 Motor Turbopump 15 Pumping Station 15 Heating Reset 16 Standby 16 Rotation Speed Setting Mode 16 Via Input PWM Switching Outputs 16 Analog Output 16 4 4 Gas Type Dependent Operations 16 4 5 Operations With The DCU 001 DCU 100 17 or HPU 001 4 6 Switching Off And Venting 17 4 7 Shutting Down For Longer Perio...

Page 3: ...p observe the shipping instructions The turbopump must be anchored in accordance with the installation instructions Do not disconnect the plug between the TC 600 and accessory components during operations Disconnect the voltage supply to the TC 600 before opening the turbopump When working on the turbopump the high vacuum flange should only be opened once the rotor is at rest When using sealing ga...

Page 4: ...rculatory lubricated ball bearing with ceramic balls 2 Understanding The Pumps TMH 071 TMU 071 Turbomolecular Drag Pump TMH 071 TMU 071 1 High vacuum flange 2 Fore vacuum flange 4 Venting valve 6 Rubber feet 8 Electronic drive unit TC 600 8d Remote plug 1 8d 8 6 4 2 Ambient conditions The turbomolecular pump needs to be installed in compliance with the following ambient conditions I In ns st ta al...

Page 5: ...se of other power units requires the prior agreement of the manufacturer and equalization with the valid specification The pumps may only be operated providing the ambient conditions in compliance with Protection Type IP 30 are observed Sealing gas must be used to ensure rotor cooling when operate the pump with 50 of the maximum gas load Improper Use The following is regarded inter alia as imprope...

Page 6: ...sure that the installation is carried out in accordance with the legal regulations and the pertinent industrial standards Notes to the accessories named below are located in the section 11 Accessories There are also located the information on the appropriate operating instructions PLEASENOTE PLEASENOTE WARNING WARNING 3 2 Connecting The High Vacuum Side The utmost cleanliness must be observed when...

Page 7: ...g coated with PM 016 361 T splinter shield incl 4 bracket screws Centering ring coated with PM 016 362 T protective screen incl 4 bracket screws C Co on nn ne ec ct tiio on n n no om miin na all D De es siig gn na at tiio on n O Or rd de er r n nu um mb be er r d di ia am me et te er r DN 63 ISO K Centering ring coated PM 016 206 U Centering ring coated mit PM 016 207 U splinter shield Centering r...

Page 8: ...with washer and nut C Copper seal If used Insert the splinter shield and protective screen in the high vacuum flange with the clamping lugs downward towards the pump Bring the seal centric into the correct position Connect the flanges via 8 8 pieces of hexagon screws M8 with washers and nuts The hexagon screws need to be tightened revolving with a tightening torque of 22 2 Nm Control the torque af...

Page 9: ... small flange components or hose screw connections Be sure to conduct away the exhaust gases from the backing pump Do not reduce the free cross section of the fore vacuum flange with following components The exhausted process gases and vapours can represent a health hazard and can also be envi ronmentally damaging Comply with all the gas manufacture s safety instructions With rigid pipe connection...

Page 10: ...T of the TC 600 on the turbopump The venting mode of the venting valve can be selected via DCU HPU or PC via serial interface RS 485 The temperature of the high vacuum flange must not exceed 120 C High temperatures are generated when turbopumps are heated There is a danger of injury from coming into contact with hot parts even after the casing heating has been switched off Heating sleeve and the p...

Page 11: ... Only with cable PM 051 843 T see section Accessories PLEASENOTE PLEASENOTE X4 8 8b X4 8c 8a 8c X2 X1 S1 X2 105 8d Connecting the TC 600 with power supply TPS 100 or DCU 100 mounting diagram for shielded connection cable X1 Mains connection X2 Connection power supply X4 Connection TC 600 S1 ON OFF switch 8 Electronic Drive Unit TC 600 8a Connecting cable TC 600 TPS DCU 8b Screw 8c Screw with tooth...

Page 12: ...connections in the TC 600 are optically decoupled Pin O Oc cc cu up pa an nc cy y 1 not connected 2 24 V output loadable with 210 mA 3 not connected 4 not connected 5 RS 485 D DO RI 6 Gnd 7 RS 485 D DO RI 8 not connected RS 485 1 8 It is possible to connect an RS 232 e g PC via a level converter please see Accessories 3 11 Connecting The RS 485 Please refer to the operating instructions PM 0488 BN...

Page 13: ...put can be loaded with 24 V 50 mA 10 Mass ground ____________ 11 Contact contact 1 between pin 11 and pin 12 closed Output 1 Switchpoint attained if the turbopump is above the switchpoint 12 Contact Output 1 Switchpoint attained 13 Contact Output 2 Collective malfunction message contact 1 between pin 13 and pin 14 is closed on failure free operation 14 Contact Output 2 Collective malfunction messa...

Page 14: ... Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas Standby PWM on touch relation 25 75 Switching output 1 24 VDC max 50 mA Switching output 2 24 VDC max 50 mA GND Contact current max 6 mA contact 7 8 9 10 12 13 14 15 11 Contact output 1 Switch point attaind Contact output 2 Collectiv...

Page 15: ...the designation REMOTE on the TC 600 refer to section 3 12 and 3 13 Inputs 2 6 are activated if they are connected with the 24 V on pin 1 active high please see section 3 13 Connections Diagram O On n d de el li iv ve er ry y t th he er re e i is s a a b br ri id dg ge e b be et tw we ee en n P Pi in n 1 1 P Pi in n 2 2 P Pi in n 3 3 a an nd d P Pi in n 4 4 o on n t th he e T TC C 6 60 00 0 m ma a...

Page 16: ...nal rotation speed It can be used for example for a message pump ready to operate S Sw wi it tc ch hi in ng g o ou ut tp pu ut t 2 2 Active low with a malfunction collective malfunction message T 0 U 20 f 100 fend max 33V min 13V max 7V min 33V T T PWM 25 75 T 10ms 1 20 f 100Hz 1 20 end PWM PWM PWM The connection of a relay is made between pin 10 mass and the respective switching output pin 8 or p...

Page 17: ... attained The power limitation serves to protect the pump against thermal overloading In order to avoid rotation speed fluctuations it is recommended to set in rotation speed setting mode the equilibrium frequency or a somewhat lower frequency 4 5 Operations With DCU 001 DCU 100 or HPU 001 Where the turbopump is operated via Pfeiffer Vacuum display and operating units the remo te plug on the TC 60...

Page 18: ...witch point and results in the turbomolecular pump being switched off LED on the TC 600 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d Glows power supply OK Function pumping stati on ON carried out Flashes short power supply OK 1 12s active Pumping station OFF Blinks Mains power supply failure 1 2s active Glows Collective malfunction for example run up time er...

Page 19: ...C Thermaloverloadingcausedby Waterflowinsufficient Ensurefreeflow Insufficientairsupply Ensureadequateairsupply Fore vacuumpressuretoohigh Reducefore vacuumpressure Ambienttemperaturetoohigh Reduceambienttemperature Pumpdoesn tattainfinalpressure Pumpdirty Bakeoutpump Ifseriouslycontaminated Request PfeifferVacuumServicetoclean Leakinvacuumchamber Seekleakstartingwithvacuumchamber linesorpump Repa...

Page 20: ...erval should be checked with your Pfeiffer Vacuum Service Center You can change the electronic drive unit TC 600 and the lubri cant reservoir yourself Please contact your Pfeiffer Vacuum Service for all other maintenance and service work Apply no mechanical stress to the electronic drive unit TC 600 7 1 Replacing The Electronic Drive Unit The turbopump and the TC 600 must only be disconnected from...

Page 21: ...r www pfeiffer vacuum net Switch off the turbopump vent to atmospheric pressure see section 4 6 and allow to cool as necessary If necessary remove the turbopump from the system Unscrew rubber feet 6 from the underside of the pump Unscrew locking cover 90 on the underside of the pump with installation tool E order number N 5709 103 WARNING CAUTION Lever out the lubricant reservoir 92 with the help ...

Page 22: ...ntation The following instructions are only valid for turbopump types with the properties abbre veation Y on the rating plate Both the lubricant reservoir 92 and the Porex rods 89 can contain toxic substances from the media being pumped Lubricant reservoirs and Porex rods must be disposed of in accordance with local regulations Safety instructions data sheet on request or via internet under www pf...

Page 23: ...e unit on the pump Send the pump in its original packaging if at all possible 1 Return Material Authorization downloadable at www pfeiffer vacuum net Contaminated vacuum pumps Units which are microbiologically explosively or radioactively contaminated will not be accepted by Pfeiffer Vacuum as a matter of principle Hazardous substances are substances and compounds in accordance with the hazardous ...

Page 24: ... s 2 2 2 Helium He mbar l s 3 3 3 Hydrogen H2 mbar l s 2 2 2 Vertex power characteristics line 5 A W Hz 80 1500 80 1500 80 1500 B W Hz 80 1500 80 1500 80 1500 C W Hz 60 1500 60 1500 60 1500 D W Hz 80 1300 80 1300 80 1300 Final pressure 6 With rotary vane pumps mbar 1 10 7 1 10 7 5 10 10 With diaphragm pumps mbar 1 10 7 1 10 7 1 10 8 Lubricant TL 011 TL 011 TL 011 Maximum cooling water consumption ...

Page 25: ... 58 29 5 48 90 5 104 5 155 2 65 5 32 Ø86 82 5 64 5 M5 2 5 9 7 83 4 3 3 0 100 7 95 DN 63 CF F DN 63 ISO K DN 40 ISO KF DN 16 ISO KF G 1 4 9 1 Dimensions Diagram TMH 071 P TMU 071 P Cooling unit Cooling unit rotatable in steps of 90 ...

Page 26: ... P 3695 700 ZD 8 Electronic drive unit TC 600 1 PM C01 720 90 Locking cover 1 PM 083 021 X 91 O ring 1 68 x 3 P 4070 972 PV 92 Lubricant reservoir standard version 1 PM 073 073 T incl O ring 93 92 Lubricant reservoir Y Version 1 PM 103 794 T incl O ring 93 and 8 x Porex rods 89 10 Spare Parts Spare parts 93 8 ...

Page 27: ...00 19 insert unit PM 041 828 T PM 0521 BN DCU 100 19 insert unit with Operating and Display Control Unit PM C01 694 PM 0477 BN Display and control unit DCU 001 PM 041 816 T PM 0477 BN Handheld programming unit HPU 001 PM 051 510 T PT 0101 BN M Ma ai in ns s c ca ab bl le es s Schuko plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115 V P 4564 309 ZE Relay box backing pump 90 265 V 5 A...

Page 28: ...The repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to accept any equipment without a declaration This declaration can only be completed and signed by authorised and qualified staff 1 Description of component Equipment type model _________________________ Co...

Page 29: ...patibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr Jörg Stanzel Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Aßlar TMH 071 TMU 071 Guidelines harmonised standards and national standards and specifications which have been applied DIN EN ISO 12100 1 2004 DIN EN ISO 12100 2 2004 DIN EN ISO 14121 1 2007 DIN EN 1012 2 1996 DIN EN 61010 1 2002 Signatures Pfeiff...

Page 30: ...9 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service ...

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