EN – 54
Declaration of contamination
Procedure for returning adixen products
You wish to return an adixen product for maintenance. The equipment will be dismantled and
possibly cleaned by a technician from our service centre. Pfeiffer Vacuum requires this form to
be completed to preclude the potential health risk to its service personnel that can occur when
receiving, disassembling, or repairing potentially contaminated products..
Please fill in the present DECLARATION OF CONTAMINATION, print it and attach it to the product
before shipping to your closest service center.
Equipment returned without this form fully completed, and secured to outside of package, will be
returned to customer unprocessed, at his cost.
If following inspection and quotation, customer elects to not proceed with repair, he will be
subject to service fee to cover product decontamination, disassembly, cleaning and evaluation
costs.
Please contact service center for any further recommendations.
We wish to draw your attention to the following points:
Equipment must be drained of fluids and residue, securely packaged and shipped prepaid.
Concerning the closing of the ports (inlet & outlets of the product), metallic airtight blank
flanges should be used if toxic or copper gases have been pumped.
The risk may be of the following nature:
Chemical:
Danger to health, risks of explosion, fire, risks for the environment. Please indicate
the chemical formula and name of the gases or substances that have been in contact with the
equipment (pump, detector, gauge or accessory).
Biological:
In case of contamination (such as pathogenic germs, micro-organisms (bacteria,
viruses, etc.) classes 1 to 4 and group E), we are currently unable to decontaminate and recycle
such material without risk to the safety of our staff. Please contact us before sending the product
to the service center.
Radioactive:
In case of contamination, our Service Center is currently unable to decontaminate
and recycle such material without risk to the safety of our staff. A written evidence of
decontamination will be requested prior to any service action. Please contact us before sending
the product to the service center.
Copper contamination:
Copper based by-products formed in sputtering or etching processes are
considered as a poison in some semi-conductor processes. A specific treatment is required, which
generates extra cost.
·
Gases (or substances) introduced into the reactor and which may be found at the exhaust
(A)
.
·
Gases (or substances) resulting from the reaction or process
(B).
·
Gases (or substances) that may possibly be formed inside the pump (due to a thermodynamic or chemical reaction,
condensation, deposition, precipitation, etc.)
(C).
•
•
•
•
In the event of chemical contamination, please indicate the following
gases or substances:
Pump
Substances
produced by
reaction (B)
Gas introduced (A)
Exhaust
(A)+(B)+(C)
Reactor
Gases
reaction (C)
