6.3.2 Gas ballast valve with flushing gas connection (option)
6.3.3 Gas ballast valve with solenoid valve (option)
6.4
6.5
6.6
6.6.1 Venting the vacuum chamber
6.6.2 Maintaining the vacuum in the chamber
7
7.1
7.2
Maintenance instructions for M or MC version magnetic coupling
7.3
Checklist for inspection and maintenance!
7.4
7.4.1 Degree of aging of P3 operating fluid
7.4.2 Draining the operating fluid
7.4.3 Rinsing and cleaning
7.5
Cleaning the gas ballast valve
7.5.1 Gas ballast valve – standard version
7.5.2 Gas ballast valve – corrosive gas version
7.5.3 Adjusting the gas ballast valve silencer
7.6
7.7
Checking the oil level in the oiler (C version pumps only)
8
8.1
Shutting down for longer periods
8.2
8.3
9
10
Service solutions from Pfeiffer Vacuum
11
11.1 Spare parts packs
11.1.1Set of seals
11.1.2Maintenance kit 1 – maintenance level 1
11.1.3Overhaul kit and set of seals
11.1.4Set of vanes
11.1.5Coupling set
12
12.1 General
12.2 Technical data
12.3 Dimensions
13
Table of contents
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