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Parker LX80L, Product Manual

The Parker LX80L Product Manual is a comprehensive guide that provides essential instructions and information for the optimal use of the LX80L model. Available for free download from manualshive.com, this manual ensures users have easy access to vital information to enhance their experience with the product.

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LX80L Series Product Manual 

 

3 

 

Parker Hannifin Corporation 

EMN Automation - Parker 
Irwin, Pennsylvania 

LX80L Series Product Manual 

Table of Contents

 

IMPORTANT USER INFORMATION...............................................................................................................................2 
REVISION NOTES...........................................................................................................................................................4 
CHAPTER 1 - INTRODUCTION ......................................................................................................................................5 

     P

RODUCT

 D

ESCRIPTION

................................................................................................................................................6 

     U

NPACKING

..................................................................................................................................................................6 

     R

ETURN

 I

NFORMATION

..................................................................................................................................................7 

     R

EPAIR

 I

NFORMATION

....................................................................................................................................................7 

     W

ARNINGS

 

AND

 P

RECAUTIONS

......................................................................................................................................7 

     S

PECIFICATION

 C

ONDITIONS

..........................................................................................................................................8 

     A

SSEMBLY

 D

IAGRAM

.....................................................................................................................................................9 

     LX80L P

RODUCT

 H

IGHLIGHTS

.......................................................................................................................................10 

CHAPTER 2 - TABLE SPECIFICATIONS.......................................................................................................................11 

     

O

RDER

 N

UMBER

 N

OMENCLATURE

..................................................................................................................................12 

     D

IMENSIONAL

 D

RAWINGS

 - LX80L .................................................................................................................................13 

     D

IMENSIONAL

 D

RAWINGS

 - MX80L C

OMPATABILITY

 & Z-B

RACKETS

................................................................................14 

     G

ENERAL

 T

ABLE

 S

PECIFICATIONS

..................................................................................................................................15 

     T

EST

 M

ETHODOLOGY

…………………………………………………….……………………………………………………….16 

     LX80L S

ERIES

 T

ECHNICAL

 D

ATA

...................................................................................................................................17 

     L

INEAR

 B

EARING

 L

IFE

/L

OAD

..........................................................................................................................................17 

     M

OMENT

 L

OAD

 - L

IFE

 C

URVES

.......................................................................................................................................17 

     F

ORCE

 - S

PEED

 C

HARTS

...............................................................................................................................................20 

     E

LECTRICAL

 S

PECIFICATIONS

.........................................................................................................................................21 

     C

LEANROOM

 P

REPARATION

...........................................................................................................................................22 

     E

NCODER

 S

PECIFICATIONS

............................................................................................................................................23 

     H

ALL

 E

FFECT

 S

PECIFICATIONS

......................................................................................................................................23 

     L

IMIT

 

AND

 H

OME

 S

ENSOE

 S

PECIFICATIONS

.....................................................................................................................23 

     V

I

X D

RIVE

 S

PECIFICATIONS

...........................................................................................................................................23 

     C

ABLE

 

AND

 W

IRING

 D

IAGRAMS

......................................................................................................................................24 

CHAPTER 3 - S

ETUP

 

AND

 U

SAGE

.....................................................................................................................................25 

     M

OUNTING

 O

RIENTATIONS

.............................................................................................................................................26 

     M

OUNTING

 S

URFACE

 R

EQUIREMENTS

............................................................................................................................27 

     L

OAD

 M

OUNTING

 R

EQUREMENTS

...................................................................................................................................28 

     I

DLER

 R

AIL

 A

SSEMBLY

…………………………………………………………………………………………………………….29 

     L

IMIT

 

AND

 H

OME

 S

ENSOR

 O

PERATION

...........................................................................................................................31 

     A

DJUSTING

 

THE

 L

IMIT

 T

RIGGERS

....................................................................................................................................32 

     S

ETTING

 H

OME

 S

ENSOR

................................................................................................................................................34 

     Z-C

HANNEL

 P

OSITION

 R

EFERENCE

................................................................................................................................34 

     G

ROUNDING

 / S

HIELDING

...............................................................................................................................................34 

     C

ABLING

.......................................................................................................................................................................35 

     I

NTERNAL

 C

ABLE

 R

EPLACEMENT

....................................................................................................................................37 

     Y-A

XIS

 C

ABLE

 S

YSTEM

…………………………………………………………………………………………………………...39 

CHAPTER 4 - PERFORMANCE......................................................................................................................................41 

     A

CCELERATION

 L

IMITS

...................................................................................................................................................42 

     S

PEED

 L

IMITS

...............................................................................................................................................................43 

     T

HERMAL

 E

FFECTS

 

ON

 A

CCURACCY

...............................................................................................................................44 

     T

HERMAL

 E

FFECTS

 

ON

 R

EPEATABILITY

...........................................................................................................................44 

     C

AUSES

 

FOR

 T

EMPERATURE

 I

NCREASES

........................................................................................................................45 

     C

OMPENSATING

 

FOR

 T

HERMAL

 E

FFECTS

........................................................................................................................45 

CHAPTER 5 - CONNECTING THE VIX AMPLIFIER ......................................................................................................46 
CHAPTER 6 - MAINTENANCE AND LUBRICATION.....................................................................................................48 

     S

QUARE

 R

AIL

 B

EARING

 L

UBRICATION

.............................................................................................................................49 

APPENDIX A - INTERNAL PROTECTION .....................................................................................................................50 
INDEX

..............................................................................................................................................................................51 

Summary of Contents for LX80L

Page 1: ...Parker Manual No 101 1182 01 Rev 2 LX80L Precision Grade Product Manual Effective September 15 2004 Supersedes Electromechanical Positioning Systems Automation ...

Page 2: ... and warning requirements of the application are met The products described herein including without limitation product features specifications designs availability and pric ing are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice Important User Information The information in the product manual including any apparatus methods techniques and concepts ...

Page 3: ...AL SPECIFICATIONS 21 CLEANROOM PREPARATION 22 ENCODER SPECIFICATIONS 23 HALL EFFECT SPECIFICATIONS 23 LIMIT AND HOME SENSOE SPECIFICATIONS 23 VIX DRIVE SPECIFICATIONS 23 CABLE AND WIRING DIAGRAMS 24 CHAPTER 3 SETUP AND USAGE 25 MOUNTING ORIENTATIONS 26 MOUNTING SURFACE REQUIREMENTS 27 LOAD MOUNTING REQUREMENTS 28 IDLER RAIL ASSEMBLY 29 LIMIT AND HOME SENSOR OPERATION 31 ADJUSTING THE LIMIT TRIGGER...

Page 4: ...mation Parker Irwin Pennsylvania Revision Notes Revision 1 Original Document Revision 2 Clarified motor lead connection on page 48 Reduced Rated Load on page 15 from 5 10 5 10 to 3 3 6 6 respectively Added Maximum Moment Load to Specification Table on page 15 and note ...

Page 5: ...rporation EMN Automation Parker Irwin Pennsylvania C H A P T E R O N E Introduction IN THIS CHAPTER Product Description 6 Unpacking 6 Return Information 7 Warnings and Precautions 7 Specification Conditions 8 Assembly Diagrams 9 Product Highlights 10 ...

Page 6: ...packing Carefully remove the positioner from the shipping container and inspect the unit for any evidence of shipping damage Report any damage immediately to your local authorized distributor Please save the shipping container for damage inspection or future transportation Incorrect handling of the positioner may adversely affect the performance of the unit in its application Please observe the fo...

Page 7: ...ecome warm or hot to the touch Electrical Shock DO NOT take apart or touch any internal components of the positioner while unit is plugged into an electrical outlet SHUT OFF power before replacing components to avoid electrical shock High Magnetic Field Unit may be HAZARDOUS to people with Pace Makers or any other magnetically sensitive medical devices Unit may have an effect on magnetically sensi...

Page 8: ...work surface that has a maximum flatness error of 0 001mm 300mm 0 00004 ft Table will operate with work surface of 0 100mm 300mm flatness or worse but performance speci fications will be significantly effected Specifications Are Point of Measurement Dependent Catalog specifications and specifications in this manual are measured from the center of the car riage 38 mm above the carriage surface All ...

Page 9: ...n Corporation EMN Automation Parker Irwin Pennsylvania Assembly Diagram Extension Cables Exit Either Side Base Carriage Cover Square rail bearing Endblock Non cable Endblock Cable Side Linear Motor Encoder Home Limits Embedded in Carriage Travel ...

Page 10: ...LX80L Series Product Manual 10 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania LX80L Product Highlights ...

Page 11: ...utomation Parker Irwin Pennsylvania C H A P T E R T W O Table Specifications IN THIS CHAPTER Order Number Nomenclature 12 Dimensional Drawings LX80L 13 Dimensional Drawings MX80L Compatibility 14 General Table Specifications 15 Test Methodology 16 Technical Data 17 ...

Page 12: ...LX80L Series Product Manual 12 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania Order Number Nomenclature ...

Page 13: ...LX80L Series Product Manual 13 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania Dimensional Drawings LX80L ...

Page 14: ...r an LX80 or MX80 serve as the Y axis Alternatively cartesian arrangements are pos sible where a Y axis LX80 is not centered but candelivered to one side enabling the system to work over a small work area Beyond XY configurations XZ and XYZ arrangements are possible when using MX80s as Z axes MX80 Z axis brackets are mount compatible with the LX80 carriage Below are MX80L refer ence drawings for u...

Page 15: ... Maximum Velocity m sec Encoder Resolution 0 1µm 0 3 0 5µm 1 5 1 0µm 3 0 5 0µm 3 0 Positional Repeatability µm Encoder Resolution 0 1µm 2 5 1 5 2 5 1 5 0 5µm 2 5 1 5 2 5 1 5 1 0µm 3 5 2 5 3 5 2 5 5 0µm 10 0 10 0 10 0 10 0 Maximum Peak 19 19 36 36 Force N lb 4 3 4 3 8 1 8 1 Maximum Continuous 4 7 4 7 10 10 Force N lb 1 0 1 0 2 2 2 2 Carriage Weight g 287 388 476 648 For any direction for moment loa...

Page 16: ...o peak error measured by a la ser interferometer and prism located at 38mm above the center of the table This type of measure ment sums the X Y Z roll pitch and yaw errors Temperature deviations from test condition may cause deviations in straightness flatness accuracy and repeatability from catalog specifications Tests are performed with the table mounted to a granite table unloaded at 20o C In t...

Page 17: ...pplied loads Linear Bearing Life Load All Travels Moment Load Life Curves The effect of moment loading on the bearing life is dependent upon load and lever arm The lever arm in this case is measured from the center of the surface of the table to the point where the load is applied For dynamic loading use the distance from the center of the table to the center of mass of the load The Life Load char...

Page 18: ...Rail Tables LX80L MOMENT DEFLECTION 16 Pole Motor Double Rail 0 000 5 000 10 000 15 000 20 000 25 000 30 000 35 000 0 20 40 60 80 100 120 140 160 180 200 M OM ENT N M PITCH ROLL YAW LX80L MOMENT DEFLECTION 8 Pole Motor Double Rail 0 000 5 000 10 000 15 000 20 000 25 000 30 000 0 20 40 60 80 100 120 140 160 180 200 M OM ENT N M PITCH ROLL YAW ...

Page 19: ...ail Tables LX80L MOMENT DEFLECTION 8 Pole Motor Single Rail 0 0 100 0 200 0 300 0 400 0 500 0 600 0 700 0 0 50 100 150 200 MOMENT N M DEFLECTION ARC SECOND PITCH ROLL YAW LX80L MOMENT DEFLECTION 16 Pole Motor Single Rail 0 000 100 000 200 000 300 000 400 000 500 000 600 000 700 000 800 000 0 50 100 150 200 M OM ENT N M SECONDS PITCH ROLL YAW ...

Page 20: ... Speed Charts for the LX80L are shown for each motor size 8 pole and 16 pole The mo tor force is the same for 80 and 48 VDC bus voltage See Electrical Specifications for motor pa rameters Performance based on table mounted to 145mm wide x 50mmthick aluminum plate Curves shown include friction and viscous damping values of table ...

Page 21: ... Thermal Time Const Tau_wnd minutes 0 5 0 5 Intermittent Force Duration 10 T_2x seconds 8 0 8 0 Peak Force Duration 11 T_3x seconds 2 0 2 0 Electrical Pitch 12 Pe mm 13 13 Rated Winding Temperature RT C 90 90 Rated Ambient Temperature AT C 25 25 Winding Class H H Electrical Specifications Specifications for both the 8 pole D13 and 16 pole D17 linear servo motors 1 25o C ambient 125C Winding Temper...

Page 22: ...variety of orienta tions with sampling both below the table and at the carriage mounting surface with a particle counter capa ble of measuring 0 3 µm diameter and larger particles Based on results from testing following the 209E Federal Standard the following chart shows the expected cleanroom compatibility of the LX80L with Class 10 cleanroom prep Consult factory for details on test methodology a...

Page 23: ... 0 meters sec limited by table 1 0 micron resolution 2 0 meters sec limited by table 0 5 micron resolution 1 5 meters sec 0 1 micron resolution 0 3 meters sec Hall Effect Specification Description Specifications Input Power 5 VDC 30 mA Output Open collector Current Sinking 20 mA Max Limit and Home Sensor Specifications Description Specification Input Power 5 VDC 60 mA power from encoder no additio...

Page 24: ...ITS CONNECTOR PIN FUNCTION WIRE COLOR 1 GND BLACK 6 End of travel ORANGE 7 End of travel BLUE 8 Home GREEN FEEDBACK HALL CONNECTOR PIN FUNCTION WIRE COLOR 1 Encoder Z ORANGE 2 Encoder Z BROWN 3 GND BLACK 5 5V RED 6 Temperature YELLOW BLACK 7 Encoder A WHITE 8 Encoder A YELLOW 9 Hall 1 WHITE BROWN 10 Temperature YELLOW RED 11 Encoder B BLUE 12 Encoder B GREEN 13 Hall 2 WHITE ORANGE 14 Hall 3 WHITE ...

Page 25: ...rker Irwin Pennsylvania C H A P T E R T H R E E Setup and Usage IN THIS CHAPTER Mounting Orientations 26 Mounting Surface 27 Load Mounting 28 Idler Rail Assembly 29 Setting Limit Home sensors 31 Z Channel Marker 34 Cabling 35 Internal Cable Replacement 37 Y Axis Cable System 39 ...

Page 26: ... Mounting Orientations The LX80L can be mounted horizontal inverted or side For all mounting orientations the ca bles should be secured as to not interfere with the movement of the carriage and bearings For inverted side and vertical mounting the main table cover must be used HORIZONTAL SIDE INVERTED ...

Page 27: ...e use M4 socket head cap screws to secure the positioner with quanities E as listed in the chart To secure the positioner for the Side Mounting Surface use M4 socket head cap screws with 8mm of engagement as to not damage the positioner Use quantities F as listed in the chart Side Mounting Surface Side View of Positioner for Single Rail Positioners Only MODEL TRAVEL mm 8 Pole TRAVEL mm 16 Pole A B...

Page 28: ...ines on specifications of overhang applications Dowel holes are included in the base of the LX80L for repeatable mounting of the positioner When mounting the positioner in the Standard Mounting position it is necessary to remove the top cover to gain access to the inner row of counterbored holes Care must be taken when removing the cover because there are spacers between the endblocks and the top ...

Page 29: ...arker This system would include a system mounting plate with the positioners and Idler Rail Assembly mounted and aligned The size of this mounting plate would depend on the positioners travels X Axis Y Axis Idler Rail Assembly Base Linear Rail Assembly Y Axis Mounting Plate Y Axis Mounting Hardware 2 Socket Head Cap Screws The Idler Rail Assembly consists of the following Components Base The base ...

Page 30: ...les are drilled and tapped mount and secure the X Axis positioner Next the Idler Rail Assembly can be mounted do not tighten bolts some adjustment will be necessary The Y Axis positioner can now be mounted to the X Axis and to the Idler Rail Assembly Traverse by hand the X Axis carriage adjust the position of the Idler Rail Assembly until no binding is pre sent It may be necessary to loosen and ad...

Page 31: ...tion of the limits and home limit home triggers decals can be adhered on the white decal background in the base These adjustable trigger decals as shown below are in cluded on the decal sheets that ships with the unit To change the activation position of the sensors Determine desired position Adjust the Limit Trigger Position Follow Adjusting Limit Flag Procedure to add to the adjustment Determini...

Page 32: ...d find the Deceleration Distance Distance Max Velocity Ta 2 Distance 500 mm sec 0 018 2 4 5 mm This means that both the positive and negative limit switch targets must be moved inward by 4 5 mm The limit deceleration rate should be set to 27 2 meters sec2 Using the supplied limit trigger decal sheet change the location of the limit stickers see Adjusting the Limit Trigger Position below Adjusting ...

Page 33: ...er background with a small amount of iso propyl alcohol and a clean cloth to remove any adhesive left by trigger Step 5 Apply new Limit trigger at desired hori zontal location as defined in the Determine Desired Position on page 23 Step 6 The top of the trigger should align with the top of the white background Smooth and press the trigger decal to insure it is adhered properly Repeat this procedur...

Page 34: ...Encoder Resolution Z Channel Repeatability 5 micron 10 micron 1 micron 2 micron 0 5 micron 1 micron 0 1 micron 0 4 micron NOTE Home repeatability is also very dependent on controller input speed and homing algorithms The above repeatability does not include possible controller tolerance Additionally to achieve the highest repeatability the final homing speed must be slow Slower final speed usually...

Page 35: ...ingle rail options S option ex LX80LT02MPS the ca bles can only exit to the left when side mounting the positioner unless the endblock is overhung off of the mounting surface If the positioner is mounted in a multi axis configuration X Y it is recommended that the Y Axis Cable System is used See the LX80L Y Axis Cable System in the following Y Axis Cable System for more information The Y Axis Cabl...

Page 36: ...o match the endblock cover strain relief re cesses Replace the endblock cover strain relief with four 4 socket head cap screws The endblock strain relief must secure the cables by clamping the shield of the cables Do not clamp on the heat shrink on the cables this may result in improper ground ing of the table Step 4 Replace the endblock cover by replacing four 4 socket head cap screws Care must b...

Page 37: ... power from the table and allow time for the base and carriage to reach room tem perature Step 2 Remove the top cover by removing four 4 flat hex head screws Step 3 Note After removing the top cover take notice of the two 2 cover spacers If these spacers are omitted on reassembly the top cover will interfere with the carriage Step 4 Remove the carriage PCB cover by removing two 2 flat head screws ...

Page 38: ... removing two 2 flat head screws Step 10 Move the disconnected cable assembly and the carriage to the non cable side endblock Step 11 Disconnect the cable assembly from the base by folding the portion of the cable assembly that does not have cable carrier links covering the cable over the portion that does have cable car rier links This will expose one 1 flat head screw in the last cable carrier l...

Page 39: ... the positioner endblock Take spe cial care not to pinch wires when assembling parts Step 6 Attach the Y Axis Cable System cover using four 4 socket head cap screws to the Y Axis Cable System mounting block Take special care not to pinch wires when assembling parts When using two LX80L positions in an X Y configuration care must be taken with the cable management of the Y axis extension cables The...

Page 40: ...he Y Axis Cable System is tracking properly If it is not tracking properly loosen the two 2 socket head cap screws securing the stationary end and adjust until tracking is running parallel to the x axis Top View of X Y Configuration Placement of Y Axis Cable System Use this drawing to layout the loca tion of the Y Axis Cable System in relation to the LX80L X Y sys tem Note that dimension A is for ...

Page 41: ...ct Manual 41 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania C H A P T E R F O U R Performance IN THIS CHAPTER Acceleration Limits 42 Speed Limits 43 Thermal Effects on Accuracy and Repeatability 29 ...

Page 42: ...his is not usually a limiting factor unless loading is significantly cantilevered causing high moment loads during accelerations Chapter 2 LX80L Series Technical Data to determine bear ing load life for your application Available Motor Force This is the primary factor that reduces acceleration This is simply the amount of motor force avail able to produce acceleration The larger the inertial and o...

Page 43: ...e Input Bandwidth 5 micron 5 meters second 1 2 MHz 1 micron 3 meters second 1 6 7 MHz 0 5 micron 1 5 meters second 6 7 MHz 0 1 micron 0 3 meters second 10 MHz When using an encoder with 5 micron resolution velocity limited by speed dependant force This is the bandwidth frequency that the amplifier or servo control input should have to operate properly with the encoder output at maximum speeds This...

Page 44: ...erstand this better following is an example Example A precision grade LX80L with 250mm travel is being used The accuracy over the entire travel is 12 microns 20 C If the base temperature increases by 5 C an additional error of 28 microns will be added over the total travel 0 000022mm mm C 250mm 5 C However this additional error can be com pensated for since the error is linear Thermal Effect on Ac...

Page 45: ...effects must either be removed by regulating base temperature or compensated for with a correction factor added to the commanded position Controlling the base temperature is the best method However this means controlling the ambient temperature by remov ing all heat cold generators from the area and operating at very low duty cycles Compensation is the other way of achieving accuracy without sacri...

Page 46: ...LX80L Series Product Manual 46 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania ...

Page 47: ...LX80L Series Product Manual 47 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania C H A P T E R F I V E Connecting the Vix Amplifier IN THIS CHAPTER Drive Connections 48 ...

Page 48: ... 1 X FEEDBACK HALL CONNECTOR PIN FUNCTION WIRE COLOR 1 Encoder Z ORANGE 2 Encoder Z BROWN 3 GND BLACK 5 5V RED 6 Temperature YELLOW BLACK 7 Encoder A WHITE 8 Encoder A YELLOW 9 Hall 1 WHITE BROWN 10 Temperature YELLOW RED 11 Encoder B BLUE 12 Encoder B GREEN 13 Hall 2 WHITE ORANGE 14 Hall 3 WHITE VIOLET X5 LIMITS CONNECTOR PIN FUNCTION WIRE COLOR 1 GND BLACK 6 End of travel ORANGE 7 End of travel ...

Page 49: ...LX80L Series Product Manual 49 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania C H A P T E R S I X Maintenance and Lubrication IN THIS CHAPTER Square Rail Bearing Lubrication 51 ...

Page 50: ...ring blocks are lubricated at our facility prior to shipment For lubrication inspection and supply intervals following shipment apply grease every 1000 hours of usage The time period may change depending on frequency of use and environ ment Inspect for contamination chips etc and replenish according to inspection results Lubricant Application For both R1 and R2 Preparations Wipe the rails down the...

Page 51: ...establishment of a two digit numeric rating verify the extent of protection provided against access to hazardous parts against ingress of solid foreign objects and against the ingress of water First Number The first number indicates protection of persons against access to dangerous parts and protection of internal equipment against the ingress of solid foreign objects 1 Protection against access t...

Page 52: ...nt 37 Internal Protection 51 Life 17 Limit Sensor Adjusting 32 Operation 31 Specifications 23 Lubrication 51 Maintenance 51 Mass 15 Moment 18 19 Motor Force 42 Mounting 26 Surface Requirements 8 27 28 MX80L 14 Order Number Nomenclature 12 Pinning 113 27 28 Repair Information 7 Repeatability Specifications 15 Thermal Effects 44 Return Information 7 Revision Notes 4 Settling Time 42 Shielding 34 Spe...

Page 53: ...LX80L Series Product Manual 53 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania Notes ...

Page 54: ...LX80L Series Product Manual 54 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania Notes ...

Page 55: ...LX80L Series Product Manual 55 Parker Hannifin Corporation EMN Automation Parker Irwin Pennsylvania Notes ...

Page 56: ......

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