LX80L Series Product Manual
22
Parker Hannifin Corporation
EMN Automation - Parker
Irwin, Pennsylvania
Cleanroom Preparation
There is no cleanroom ‘rating’ for motion control products, just individual compatibility with class of clean-
rooms. The compatibility is also dependant on measurement location. A point directly below a component
may have a different particle count than at a side location. In an effort to clarify the class of cleanroom that
our products can be used in with out affecting the overall rating of the cleanroom, Parker provides a Clean-
room Class Compatibility chart for product intended for use in such environments. Due to the linear motor
design of the LX80L, minimal particle generation occurs during operation. LX80L tables with cleanroom
preparation were tested in Parker’s vertical laminar flow work station which utilizes ULPA filters to produce
an environment having a cleanliness of class 10 prior to testing. Tables were tested in a variety of orienta-
tions with sampling both below the table and at the carriage mounting surface with a particle counter capa-
ble of measuring 0.3
µ
m diameter and larger particles. Based on results from testing following the 209E
Federal Standard, the following chart shows the expected cleanroom compatibility of the LX80L with Class
10 cleanroom prep. Consult factory for details on test methodology and results
.
LX80L Cleanroom Class Compatibility*
Velocity
Standard Mount
Side Mount
[mm/sec]
4.5" below
At stage top
4.5" below
At stage top
250
25 1 25 1
500
25 1 25 1
750
25 5 50 5
1000
50 5 100 5
* Compatibility is defined as not affecting the cleanroom class rating with the addition of this product for classes shown.
The Class 1 rating in the table refers to class 1 levels of 0.3
µ
and larger particles detected in Parker’s Class 10 chamber.
For complete class 1 compatibility, the particle count for the 0.1 and 0.2
µ
m particles would also need to be taken into con-
sideration.
Standard Cleanroom Preparation
Stringent cleaning and handling measures
Cleanroom rated lubricant
Reduce force specification by 25% due to additional viscosity of cleanroom lubrication
Summary of Contents for LX80L
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