LX80L Series Product Manual
16
Parker Hannifin Corporation
EMN Automation - Parker
Irwin, Pennsylvania
Test Methodology
2.64
-3.68
6.32
Published accuracy and repeatability specifications are subject to the testing methodology. Parker’s
methodology provides specifications over the entire table travel regardless of start or finish position.
The accuracy and repeatability specifications are based on the peak to peak error measured by a la-
ser interferometer and prism located at 38mm above the center of the table. This type of measure-
ment sums the X, Y, Z, roll, pitch, and yaw errors. Temperature deviations from test condition may
cause deviations in straightness, flatness, accuracy, and repeatability from catalog specifications.
Tests are performed with the table mounted to a granite table, unloaded at 20
o
C.
In this example, the accuracy ranges from -3.68 microns to 2.64 microns. This table would have its
accuracy specified as 6.32 micron since the worst case would be starting at one extreme and traveling
to the other.
Summary of Contents for LX80L
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