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Page 25
193C-E-MMA00-A04-00
CLEANING SOLVENT FOR WET CLEANING
∗
However, the cleaning result gets worse.
Besides, it takes more time for the mask to
dry, so set the cleaning speed to 10mm/s
for Back of the second cleaning.
Optimum discharge amount of cleaning solvent for cleaning
It is optimum to discharge the 35
mm
±
5
mm
width of cleaning solvent onto the cleaning paper for the
wet cleaning.
Adjustment method : Adjust the discharge amount with the regulator on the back of the machine
(next to the cleaning solvent container).
The increase of pressure makes the dis-
charge amount larger.
The decrease of pressure makes the dis-
charge amount smaller.
(0.147
MPa
to 0.196
MPa
)
35
mm
±
5
mm
d
e
e
p
S
s
/
m
m
n
r
e
t
t
a
P
m
u
u
c
a
V
1
o
G
0
4
y
r
D
N
O
k
c
a
B
0
4
y
r
D
N
O
2
o
G
0
2
t
e
W
F
F
O
k
c
a
B
0
1
y
r
D
N
O
153C-E-TE008
Summary of Contents for SP22P
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