Page 4
OUT
193C-E-MMA0B-A00-00
Vacuum Pump Consumable Parts Replacement (Option)
Exchanging procedures
1. Air suction filter
Exchange it based on the pressure down 0.02 MPa.
Turn off the power.
∗
Be sure to turn off the power for exchanging.
Loosen the element fixing bolt for
filter.
Remove the element.
Set the element, not to be mistaken
the IN/OUT position.
Element
1
2
3
4
193C-085E
193C-086E
193C-087E
IN
OUT
IN
EJ101H-030N
Summary of Contents for SP22P
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