13
[U-SIC4R2/SIC4L2 Stage Only]
Observation with the U-WHP2 Wafer Holder Plate (Fig. 8)
1. Place the BH2-WHR43 rotary wafer holder (for 3- or 4-inch) ² on the U-
WHP2 wafer holder plate @.
2. Place a 3-inch or 4-inch wafer on the BH2-WHR43 and observe the wafer.
The wafer holder plate can be rotated with the knob ³.
[U-SIC4R2/SIC4L2 Stage Only]
Observation with the U-MSSPG Glass Holder Plate (Fig. 9)
}If the microscope is equipped with transmitted light illumination, transpar-
ent specimens can also be observed.
1. Place the glass plate ² gently on the glass holder plate @.
2. Place a specimen or transparent specimen and observe it.
Fig. 8
Fig. 9
@
²
³
@
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