BX-RLAA
14
2
Using the Y-Axis Movement Lock Lever
(Fig. 10)
}This mechanism is provided only with the U-SIC4R2/SIC4L2 stage.
1. When the Y-axis movement lock lever @ is locked by setting the lever in
the direction of the arrow, the Y-axis movement is locked, making it pos-
sible to scan only in the X-axis direction.
2. To release the lock, return the lever to the original position.
# If the lock lever is released incompletely, the lever will be worn out,
making locking impossible or causing dust.
Fig. 10
@
