Oerlikon 10926 Operating Instructions Manual Download Page 44

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w w w . o e r l i k o n . c o m

Œrlikon

Leybold Vacuum GmbH

Bonner Strasse 498

D-50968 Cologne

Phone: +49-(0)221-347 0

Fax: +49-(0)221-347 1250

[email protected]

P.R. China

Œrlikon

Leybold Vacuum (Tianjin)

International Trade Co., Ltd.

Beichen Economic

Development Area (BEDA),

Shanghai Road

Tianjin 300400

China

Sales and Service:

Phone: +86-22-2697 0808

Fax: +86-22-2697 4061

Fax: +86-22-2697 2017

[email protected]

Œrlikon

Leybold Vacuum

(Tianjin) Co., Ltd.

Beichen Economic

Development Area (BEDA),

Shanghai Road

Tianjin 300400

China

Sales and Service:

Phone: +86-22-2697 0808

Fax: +86-22-2697 4061

Fax: +86-22-2697 2017

[email protected]

Œrlikon

Leybold Vacuum (Tianjin)

International Trade Co., Ltd.

Shanghai Branch:

Add: No. 33

76 Futedong San Rd.

Waigaoqiao FTZ

Shanghai 200131

China

Sales and Service:

Phone: +86-21-5064-4666

Fax: +86-21-5064-4668

[email protected]

Œrlikon

Leybold Vacuum (Tianjin)

International Trade Co., Ltd.

Guangzhou Office and

Service Center

1st F, Main Building,

Science City Plaza,

No.111 Science Revenue,

Guangzhou Science City

(GZSC) 510663, Guangzhou,

China

Sales:

Phone: +86-20-22323980

Fax: +86-20-22323990

[email protected]

Œrlikon

Leybold Vacuum (Tianjin)

International Trade Co., Ltd.

Beijing Branch:

1-908, Beijing Landmark Towers

8 North Dongsanhuan Road

Chaoyang District

Beijing 100004

China

Sales:

Phone: +86-10-6590-7622

Fax: +86-10-6590-7607

India

Œrlikon

Leybold Vacuum India Pvt Ltd.

EL-22, J Block

MIDC Bhosari

Pune 411026

India

Sales:

Phone: +91-20-3061 60000

Fax: +91-20-2712 1571

[email protected]

Netherlands

Œrlikon

Leybold Vacuum Nederland B.V.

Computerweg 7

NL-3542 DP Utrecht

Sales and Service:

Phone: +31-346-58 39 99

Fax: +31-346-58 39 90

[email protected]

Spain

Œrlikon

Leybold Vacuum Spain, S.A.

C/ Huelva, 7

E-08940 Cornellà de Llobregat

(Barcelona)

Sales:

Phone: +34-93-666 46 16

Fax: +34-93-666 43 70

[email protected]

Service:

Phone: +34-93-666 49 51

Fax: +34-93-685 40 10

Sweden

Œrlikon

Leybold Vacuum Scandinavia AB

Box 9084

SE-40092 Göteborg

Sales and Service:

Phone: +46-31-68 84 70

Fax: +46-31-68 39 39

[email protected]

Visiting/delivery address:

Datavägen 57B

SE-43632 Askim

Switzerland

Œrlikon

Leybold Vacuum Schweiz AG

Leutschenbachstrasse 55

CH-8050 Zürich

Sales:

Phone: +41-044-308 40 50

Fax: +41-044-302 43 73

[email protected]

Service:

Phone: +41-044-308 40 62

Fax: +41-044-308 40 60

USA

Œrlikon

Leybold Vacuum USA Inc.

5700 Mellon Road

Export, PA 15632

Phone: +1-724-327-5700

Fax: +1-724-325-3577

[email protected]

Sales:

Eastern & Central time zones

Phone: +1-724-327-5700

Fax: +1-724-733-1217

Pacific, Mountain, Alaskan &

Hawaiian time zones

Phone: +1-480-752-9191

Fax: +1-480-752-9494

Service:

Phone: +1-724-327-5700

Fax: +1-724-733-3799

Belgium

Œrlikon

Leybold Vacuum Nederland B.V.

Belgisch bijkantoor

Leuvensesteenweg 542-9A

B-1930 Zaventem

Sales:

Phone: +32-2-711 00 83

Fax: +32-2-720 83 38

[email protected]

Service:

Phone: +32-2-711 00 82

Fax: +32-2-720 83 38

[email protected]

France

Œrlikon

Leybold Vacuum France S.A.

7, Avenue du Québec

Z.A. Courtaboeuf 1 - B.P. 42

F-91942 Courtaboeuf Cedex

Sales and Service:

Phone: +33-1-69 82 48 00

Fax: +33-1-69 07 57 38

[email protected]

Œrlikon

Leybold Vacuum France S.A.

Valence Factory

640, Rue A. Bergès - B.P. 107

F-26501 Bourg-lès-Valence Cedex

Phone: +33-4-75 82 33 00

Fax: +33-4-75 82 92 69

[email protected]

Great Britain

Œrlikon

Leybold Vacuum UK LTD.

Unit 2

Silverglade Business Park

Leatherhead Road

UK-Chessington, Surrey KT9 2QL

Sales:

Phone: +44-13-7273 7300

Fax: +44-13-7273 7301

[email protected]

Service:

Phone: +44-20-8971 7030

Fax: +44-20-8971 7003

[email protected]

Italy

Œrlikon

Leybold Vacuum Italia S.p.A.

8, Via Trasimeno

I-20128 Milano

Sales:

Phone: +39-02-27 22 31

Fax: +39-02-27 20 96 41

[email protected]

Service:

Phone: +39-02-27 22 31

Fax: +39-02-27 22 32 17

[email protected]

Œrlikon

Leybold Vacuum Italia S.p.A.

Field Service Base

Z.I. Le Capanne

I-05021 Acquasparta (TR)

Phone: +39-0744-93 03 93

Fax: +39-0744-94 42 87

[email protected]

Œrlikon

Leybold Vacuum GmbH

Bonner Strasse 498

D-50968 Cologne

Phone: +49-(0)221-347 1234

Fax: +49-(0)221-347 1245

[email protected]

Œrlikon

Leybold Vacuum GmbH

Sales Area North/East

Branch Office Berlin

Buschkrugallee 33

1. Obergeschoss

D-12359 Berlin

Phone: +49-(0)30-435 609 0

Fax: +49-(0)30-435 609 10

[email protected]

Œrlikon

Leybold Vacuum GmbH

Sales Area South/Southwest

Branch Office Munic

Sendlinger Strasse 7

D-80331 Munic

Phone: +49-(0)89-357 33 9-10

Fax: +49-(0)89-357 33 9-33

[email protected]

service.vacuum.mn

@oerlikon.com

Œrlikon

Leybold Vacuum GmbH

Sales Area West & Benelux

Bonner Strasse 498

D-50968 Cologne

Phone: +49-(0)221-347 1270

Fax: +49-(0)221-347 1291

[email protected]

Œrlikon

Leybold Vacuum GmbH

Service Competence Center

Emil-Hoffmann-Strasse 43

D-50996 Cologne-Suerth

Phone: +49-(0)221-347 1439

Fax: +49-(0)221-347 1945

[email protected]

Œrlikon

Leybold Vacuum GmbH

Mobil Customer Service

Emil-Hoffmann-Strasse 43

D-50996 Cologne-Suerth

Phone: +49-(0)221-347 1765

Fax: +49-(0)221-347 1944

[email protected]

Œrlikon

Leybold Vacuum GmbH,

Dresden

Zur Wetterwarte 50, Haus 304

D-01109 Dresden

Service:

Phone: +49-(0)351-88 55 00

Fax: +49-(0)351-88 55 041

[email protected]

Japan

Œrlikon

Leybold Vacuum

Japan Co., Ltd.

Head Office

Tobu A.K. Bldg. 4th Floor

23-3, Shin-Yokohama

3-chome

Kohoku-ku, Yokohama-shi

Kanagawa-ken 222-0033

Sales:

Phone: +81-45-471-3330

Fax: +81-45-471-3323

Œrlikon

Leybold Vacuum

Japan Co., Ltd.

Osaka Sales Office

5-13, Kawagishi-cho

Suita-chi

Osaka-fu

Phone: +81-6-4860-2212

Fax: +81-45-471-3323

Œrlikon

Leybold Vacuum

Japan Co., Ltd.

Tsukuba Technical S.C.

Tsukuba Minami Daiichi

Kogyo Danchi

21, Kasumi-no-Sato,

Ami-machi, Inashiki-gun

Ibaraki-ken, 300-0315

Service:

Phone: +81-29-889-2841

Fax: +81-29-889-2838

Korea

Œrlikon

Leybold Vacuum Korea Ltd.

#761-4, Yulkeum-ri

SungHwan-eup, Cheonan-City

Choongchung-Namdo

330-807 Korea

Sales:

Phone: +82-41-580-4420

Fax: +82-41-588-3737

Service:

Phone: +82-41-580-4415

Fax: +82-41-588-3737

Singapore

Œrlikon

Leybold Vacuum

Singapore Pte Ltd.

1 Science Park Road

Singapore Science Park 2

#02-12 Capricorn Building

Singapore 117528

Sales and Service:

Phone: +65-6303 7000

Fax: +65-67730 039

[email protected]

Taiwan

Œrlikon

Leybold Vacuum Taiwan Ltd.

No 416-1, Sec. 3

Chung-Hsin Rd., Chu-Tung

Hsin-Chu, Taiwan, R.O.C.

Sales and Service:

Phone: +886-3-500 1688

Fax: +886-3-583 3999

[email protected]

Germany

Europe

Asia

Sales and Service

America

Œrlikon

Leybold Vacuum USA Inc.

5700 Mellon Road

Export, PA 15632

Phone: +1-724-327-5700

Fax: +1-724-325-3577

[email protected]

Summary of Contents for 10926

Page 1: ...Sogevac SV200 SV300 BR2 Single stage oil sealed rotary vane pump Operating instructions GAET02307_002_10 Ref 10926 10927 10930 10931 95526 95527 95536 95537 95027 95031 ...

Page 2: ...port and packaging 17 2 2 Mounting orientation 17 2 3 Storing 17 3 Installation 18 3 1 Setting up 18 3 2 Electrical Connections 20 3 3 Start up 22 4 Operation 23 4 1 Operation 23 4 2 Switching off Shutdown 24 4 3 Ultimate Pump Pressure 25 4 4 Installing the Optional Gas Ballast Valve 25 5 Maintenance 26 5 1 Safety Information 26 5 2 Maintenance Intervals 26 5 3 Œrlikon Leybold Vacuum Service 27 5 ...

Page 3: ...any further safety operation and or maintenance questions to our nearest office Failure to observe the following precautions could result in serious personal injury Sogevac pumps are not designed for pumping of dusty aggressive corrosive flammable or explosive gases or gases mixtures for pumping of oxygen or other highly reactive gases with a greater concentration than atmospheric concentration 20...

Page 4: ...c pressure Design the exhaust line so that no pressure higher than 1 15 bar abs 0 15 bar rel can occur Operating of the pump without oil or operating with incorrect direction of rotation can destroy the pump Never use discarded seals Always assemble using new seals Respect the instructions concerning environment protection when discarding used oil or exhaust filters The pump must be packaged in su...

Page 5: ...d and the gas is compressed At slightly above atmospheric pressure the gas is expelled from the chamber via the exhaust valve 6 28 Oil injected into the pump chamber serves to seal lubricate and cool the pump The oil entrained with the compressed gas is coarsely trapped in the oil case 6 27 by deflection Then fine filtering occurs in the exhaust filter elements 6 29 The proportion of oil in the ex...

Page 6: ...4 By opening the gas ballast valve a controlled amount of air so called gas ballast is admitted into the pump chamber This gas ballast prevents condensation up to the limit of water vapor tolerance specified in the Technical Data when pumping condensable gases or vapours There are different types of gas ballast standard gas ballast 7 Nm3 h large gas ballast 18 Nm3 h gas ballast with electromagneti...

Page 7: ...last standard 1 or EM mbar 40 50 with big gas ballast mbar 50 60 Water vapour tolerable load with gas ballast standard 1 or EM kg h 1 3 4 5 4 with big gas ballast kg h 1 N A N A Noise level 2 dB A 69 73 Leak rate mbar I s 1 1 10 3 1 10 3 Mains voltage Standard V 230 400 460 4 For other voltages 3 Motor power kW 4 4 6 Type of protection IP 55 IP 55 3 Rated rotational speed min 1 1450 1750 Oil capac...

Page 8: ... kg h 1 5 4 7 4 with big gas ballast 1 kg h 1 10 12 5 Noise level 2 dB A 70 74 Leak rate mbar I s 1 1 10 3 1 10 3 Mains voltage Standard V 230 400 460 4 For other voltages please contact Œrlikon Leybold Vacuum Motor power kW 5 5 6 3 Type of protection IP 55 IP 55 3 Rated rotational speed min 1 1450 1750 Oil capacity min max l 8 5 11 5 8 5 11 5 Intake connection G2 G2 NPT 2 3 Exhaust connection G2 ...

Page 9: ...IN OIL FILLING PLUG THERMAL SWITCH OPTION GAS BALLAST VALVE Dimension in mm Type Øa Øb Amax a0 a1 a2 a3 a4 a5 B b1 b2 b3 b4 ØD P H h1 h2 h3 h4 X Y Z Weight kg 109 26 G2 G2 890 548 390 252 62 214 40 535 394 50 140 269 M10 10 425 352 392 318 399 350 150 300 170 109 27 955 27 945 557 109 30 G2 G2 1080 657 378 313 0 264 40 535 394 50 140 269 M10 10 425 352 392 318 399 350 150 300 210 109 31 955 37 108...

Page 10: ...mate total pressure Torr 0 5 0 5 with gas ballast standard 1 Water vapour tolerance with standard gas ballast 1 or EM Torr 30 30 Motor power hp 7 5 10 5 Rated rotational speed rpm 1750 1750 Oil filling min max qt 5 3 9 5 9 12 2 Weight lb 342 430 Inlet flange NPT F inches NPT 2 NPT 2 Exhaust flange NPT F inches NPT 2 NPT 2 1 to DIN 28400 and following numbers with standard gas ballast US versions D...

Page 11: ... Description fig 2a Europe Version PRESSURE AT 50 Hz PUMPING SPEED PUMPING SPEED VOLUME FLOW RATE WITHOUT GAS BALLAST WITH GAS BALLAST fig 2b US Version PRESSURE AT 60 Hz PUMPING SPEED PUMPING SPEED VOLUME FLOW RATE WITHOUT GAS BALLAST WITH GAS BALLAST ...

Page 12: ...18 326 711 18 326 10 Right angle bend 90 63 ISO K 887 25 887 25 11 Dust filter paper 63 ISO K 951 68 951 68 Dust filter charcoal 711 27 125 711 27 125 Dust filter metal 711 27 126 711 27 126 Inflet filter polyester 711 27 127 711 27 127 12 Ball valve G2 F F 711 30 107 711 30 107 13 Tee reducer bush G2 G2 G1 2 F F F 711 18 265 711 18 265 14 Elbow 90 G2 F F 711 18 215 711 18 215 15 Dust filter paper...

Page 13: ... V 60 Hz Pump with three phase motor and integrated gas ballast valve 230 V 400 V 50 Hz 109 27 109 31 460 V 60 Hz Pump with three phase motor without gas ballast 200 V 50 60 Hz 955 26 955 36 Pump with three phase motor and integrated gas ballast valve 200 V 50 60 Hz 955 27 955 37 Version US Description SV200 SV300 Pump with three phase motor and integrated gas ballast valve 950 27 950 31 200 230 4...

Page 14: ...haust filter gauge 951 94 951 94 Exhaust filter over pressure switch 712 22 360 712 22 360 Oil level monitor 953 96 953 96 Thermal switch 951 36 951 36 Adapter Roots 500 953 90 953 90 Adapter Roots 1000 953 91 953 91 Base frame 711 19 208 711 19 208 Base frame for possibility for adaptation Roots 711 19 209 711 19 209 Simple water cooling without thermostatic valve upon request 9 714 51 270 Separa...

Page 15: ...18 Q 6 8 M16 65 30J 24 Q 6 8 4 washer MN12 MN16 4 nut H M12 H M16 fig 4 1 7 Spare parts Description Size for Cat Nr Cat Nr SV200 SV300 SV200 SV300 Oil filter standard 710 18 850 710 18 850 Metal oil filter 711 19 121 711 19 121 Exhaust filter 710 64 763 710 64 773 Set of seals standard NBR FKM 971 97 552 971 97 652 Set of seals FKM 714 36 730 714 36 740 Repair set 714 36 190 714 36 200 Module kit ...

Page 16: ...ents low vapor pressure even at high temperatures flat viscosity curve minimum water content and absorption good lubricating properties resistant to aging under mechanical strain Pump oil GS77 Conditionning Ref No 5 liters 711 17 774 25 liters 711 17 776 200 liters 711 17 779 Use of other special grade lubricants for specific applications is possible Please consult us Only use lubricants which hav...

Page 17: ...in the upright position horizontally Otherwise oil may escape The angle of slope may not be over 10 max Avoid any other orientations while moving the pump Only use the lifting lugs which are provided on the pump to lift the pump with the specified lifting devices Make sure that these have been installed safety Use suitable lifting equipment Make sure that all safety regulations are observed Check ...

Page 18: ...ng Take note of warning labels on the pump Observe the safety regulations Inlet connection See safety instructions page 3 The pump has an internally threaded intake flange Using suitable connecting elements see 1 3 the pump can be connected to the vacuum system The cross section of the intake line should be at least the same as the intake port If the intake line is too narrow it reduces the pumpin...

Page 19: ...es are dangerous Observe the safety precautions that apply to your application and process gases The pump s exhaust port also has an internal thread A hose can be connected via a suitable screwing nipple see 1 3 The cross section of the exhaust line should be at least the same as the pump s exhaust port If the exhaust line is too narrow overpressure may occur in the pump Install the exhaust line w...

Page 20: ...g oil may be ejected out the intake port The vacuum system may be pressurised Don t use the motor fan for checking the rotation direction The motor fan rotates too fast to clearly check during operation when it slows during shutdown it reserves its direction Briefly switch ON the pump check if you can feel suction at the inlet port and immediately turn off the pump When the pump is rotating correc...

Page 21: ...ut the pump re start up of the pump must only be possible by handaction Motorization European versions A 50 60 Hz motor is mounted in standard on the SV200 and SV300 BR2 Voltages 230 400 V 10 at 50 Hz 460 V 10 at 60 Hz US versions A 50 60Hz motor NEMA is mounted in standard on the SV200 and SV300 BR2 Voltage 400 V 10 at 50 Hz 200 230 V 460 V 60 Hz 3 phase 400 V 50 Hz Warning Installation ...

Page 22: ...he pump ensure that the attached accessories meet the requirements of your application and that safe operation is ensured Never expose part of the body to the vacuum There is a danger of injury Never operate the pump with an open and thus accessible inlet Vacuum connections as well as oil filling and oil draining openings must not be open during operation of the pump The safety regulations which a...

Page 23: ... temperature is not exceeded during compression If you do not know the composition of the gases to be pumped and if you can t rule out the possibility of condensation run the pump with gas ballast valve open in accordance bellow Pumping of condensable gases and vapours Using gas ballast The pumps with gas ballast valves are delivered with the gas ballast valve open The Sogevac SV200 and SV300 can ...

Page 24: ...ess Instead allow the pump to continue operating with the gas ballast valve open and the intake line closed until the oil is free of condensed vapours We strongly recommend operating the pump in this mode for about 30 minutes after completion of the process In cyclic process operation the pump should not be switched off during the intervals between the individual working phases but should continue...

Page 25: ... pressure of air can only be measured with a compression vacuum gauge or a partial pressure gauge Precise measurements can only be obtained with calibrated instruments Upon initial start up after prolonged idle periods or after an oil change it takes a while until the pump reaches the specified ultimate pressure The pump has to attain its operating temperature and the pump oil has to be degassed W...

Page 26: ...tenance job Frequency Section Check the oil level daily A Check the oil condition Depends on process B 1st oil change After 150 h of operation C Subsequent oil changes Every 2000 h of operation C or 6 months depending on application Replace the oil filter At each oil change C Replace the exhaust filter If oil mist at exhaust D or annually Clean the ballast monthly E Clean the dirt trap monthly F C...

Page 27: ...not be damaged during shipping and so that no harmful substances can escape from the package When disposing of used oil please observe the relevant environmental regulations 5 4 Maintenance Work Checking the oil A Oil level The pump oil level during operation must always be between the middle and top edge of the oil level glass 6 4 When necessary switch off the pump and add the correct quantity of...

Page 28: ...d fill the pump should be flushed by filling it with fresh oil up to the bottom edge of the oil level glass run it for a short time and then change the oil again Use suitable oil only see point 1 8 Depending on the process involved dangerous substances may escape from the pump and oil Take the appropriate precautions Observe the safety regulations Never mount used seals always mount new seals When...

Page 29: ...t trap consists of two wire mesh screens The outer one is accessible by removing the intake line If it is only slightly dirty just wipe off the screen from the outside If it is very dirty disassemble the intake flange To do so remove the fastening screws at the top of the pump cylinder cover 7 51a 52a loosen the pump foot 7 94a at the bottom of the cover and take off the cover Remove four screws a...

Page 30: ... Remove the fastening screws at the top the of the pump cylinder cover 7 51a 52a loosen the pump foot 7 94a at the bottom of the cover and take off the cover Take off the oil return line 6 11 Remove the four screws 6 12 and pull the float valve assembly 6 10a out of the float chamber Take off the gasket 6 9 Clean the nozzle Check the tightness of the float valve Check all gaskets and replace them ...

Page 31: ...at there is a gap between the motor side of the radial bladed fan and the inside wall of the coupling housing Then adjust the pump coupling so that there is a gap between the coupling halves The correct gaps are listed below Gap between Fan coupling housing 3 mm Gap between coupling halves 3 mm Secure the coupling setscrews with Loctite Observe the safety regulations K Disassembling and Reassembli...

Page 32: ...he screw positioning and securing the fan turbine on motor shaft end With the help of an extractor puller take off the fan turbine from motor shaft end On the SV200 Non USA take off in motor shaft end fitted M10 screw so as the LN12 washer and circlips To disassemble motor from coupling housing unscrew the 4 hexagonal head screws 7 68a The reassembly is carried out in the reverse sequence by takin...

Page 33: ...l filter Replace the oil filter 5 4 C clogged oil lines Clean the oil casing Vacuum lines are dirty Clean vacuum lines Pump is too small Check the process date replace the pump if necessary Pumping speed is Dirt trap in the intake port is clogged Clean the dirt trap 5 4 F 1 4 too low Precaution install a dust filter in intake line Exhaust filter is clogged Install new filter elements 5 4 D Connect...

Page 34: ...nge the oil and clean 4 1 5 4 B the pump Precaution open the gas ballast valve or insert a condensate trap Clean the gas ballast intake filter 5 4 G Pump is Oil level is very low Add oil 5 4 B excessively noisy oil is no longer visible Oil filter is clogged Change the oil and filter 5 4 B Coupling elements worn Install new coupling element 5 4 J Large vacuum leak in system Repair vacuum leak 5 4 J...

Page 35: ...usually available on stock at Œrlikon Leybold Vacuum s service centers The list of these parts is given here after and in the spare parts table where the contents of each kits is detailed Oil filter on some models Exhaust demisters Oil GS 77 Special oils please refer to the specific notice of the pump or contact Œrlikon Leybold Vacuum Service kit Set of seals Repair kit Vacuum generator without GB...

Page 36: ...36 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum fig 6 SV200 SV300 similar Spare parts ...

Page 37: ...01 ID 15 1 Oil tube 714 00 601 ID 16a 4 4 Screw M20 x 150 9 714 66 220ID 16b 4 4 Flat gasket 16c 4 4 Flat gasket 17 1 1 Connection element 714 01 438 ID 18 1 Oil tube 714 01 211 ID 18 1 Oil tube 714 00 591 ID 19 4 6 Nut M10 20 1 Valve 712 35 521 ID 6 fingers 20 1 Valve plate set 712 18 554 ID 2x4 fingers 21 1 Valve stop 712 31 364 ID 21 1 Valve stop 712 18 544 ID 22 1 Flat gasket 182 x 186 x 0 4 2...

Page 38: ...38 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum Spare parts fig 7 SV200 SV300 similar ...

Page 39: ...2 038 67 460V 6 5HP 60 HZ 710 02 038 67 1 Motor 230 400V 5 5KW 50 HZ 710 60 638 67 460V 9 HP 60 HZ 710 60 638 67 1 Motor 208 230 440 460V 712 16 228 NEMA 7 5HP 60 HZ 67 1 Motor 208 230 440 460V 712 16 238 NEMA 10HP 60 HZ 67 1 Motor 200V 5 5KW 50 60 HZ 712 49 028 JIS 67 1 Motor 200V 7 5KW 50 60 HZ 712 49 038 JIS 68a 4 4 Screw HM 12 x 30 Q6 8 68b 4 4 Washer MN 12 Z 68a 4 4 Screw CHc1 2 x1 1 4 69 1 1...

Page 40: ...40 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum fig 7 SV200 SV300 similar Spare parts ...

Page 41: ... 3 3 Washer W 12 92 1 1 Rubber mounted Ø 50 H 30 710 24 228 ID 93 1 1 Theaded pin HC 10 x 50 Q88 94a 1 1 Nut HM 10 Q6 Z 94b 1 1 Washer MN 10 Z 95 1 1 Washer Ø 40 x 6 x 2 NBR 96 1 Vacuum generator 714 36 770 ID incl 20 21 79 à 90 96 1 Vacuum generator 714 36 780 ID incl 20 21 79 à 90 97 1 Pump housing 714 36 621 ID 97 1 Pump housing 714 36 631 ID 98 1 Intake flange housing 714 36 641 ID 99 1 Tube D...

Page 42: ...42 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum ...

Page 43: ..._________ B Condition of the equipment No1 Yes No Contamination No1 Yes 1 Has the equipment been used1 q q oxic q q 2 Drained Product service fluid q q corrosive q q 3 All openings sealed airtight q flammable q q 4 Purged q q explosive2 q q If yes which cleaning agent ________________________________________ radioactive2 q q and which method of cleaning ________________________________________ mic...

Page 44: ...France S A Valence Factory 640 Rue A Bergès B P 107 F 26501 Bourg lès Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vc oerlikon com Great Britain Œrlikon Leybold Vacuum UK LTD Unit 2 Silverglade Business Park Leatherhead Road UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 13 7273 7301 sales vacuum ln oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 897...

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Oerlikon 10926, Operating Instructions Manual

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