2
GAET02307_002_10 - 06/2008 - © Œrlikon Leybold Vacuum
Contents
Page
Important Safety Information
3
1
Description
5
1.1
Principle of operation
5
1.2
Technical characteristics
7
1.3
Connection Fittings
12
1.4
Ordering informations
13
1.5
Accessories
14
1.6
SV + WAU Combination Direct connected
15
1.7
Spare parts
15
1.8
Lubricants
16
2
Transport and Storing
17
2.1
Transport and packaging
17
2.2 Mounting orientation
17
2.3
Storing
17
3
Installation
18
3.1 Setting up
18
3.2 Electrical Connections
20
3.3
Start-up
22
4
Operation
23
4.1
Operation
23
4.2
Switching off / Shutdown
24
4.3
Ultimate Pump Pressure
25
4.4
Installing the Optional Gas Ballast Valve
25
5
Maintenance
26
5.1
Safety Information
26
5.2
Maintenance Intervals
26
5.3 Œrlikon Leybold Vacuum Service
27
5.4 Maintenance Work
27
6
Troubleshooting
33
7
Spare parts
35
EC Conformance Declaration
42
Declaration of contamination of Compressors,
43
Vacuum Pumps and Components
Summary of Contents for 10926
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Page 38: ...38 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum Spare parts fig 7 SV200 SV300 similar ...
Page 40: ...40 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum fig 7 SV200 SV300 similar Spare parts ...
Page 42: ...42 GAET02307_002_10 06 2008 Œrlikon Leybold Vacuum ...