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MKS Instruments UK Ltd

V2000-C/E Hardware Manual – SP102005.102 March 2013

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Table of Contents

ADDITIONAL INSTALLATION MAINTENANCE AND OPERATING INSTRUCTIONS .................................................................. 5

............................................................................................................................................................................ 5

............................................................................................................................................................................... 5

........................................................................................................................................................................... 5

................................................................................................................................................................... 7

HEALTH & SAFETY .............................................................................................................................................................. 8

.................................................................................................................................................................... 9

..................................................................................................................................................................................... 10

.......................................................................................................................................................... 10

INSTALLATION ................................................................................................................................................................. 11

................................................................................................................................................................... 11

...................................................................................................................................................................... 12

............................................................................................................................................................................. 13

YSTEM INSTALLATION

.................................................................................................................................................. 14

RGA vacuum chamber overview ...................................................................................................................................... 14

............................................................................................................................................. 15

HAMBER INSTALLATION

................................................................................................................................................... 19

Pneumatic actuation and Purge Gases ............................................................................................................................ 19

Connecting the foreline and SurgeProtector valve........................................................................................................... 19

Heater jackets .................................................................................................................................................................. 20

MicroVision2 installation ................................................................................................................................................. 20

.......................................................................................................................................................... 21

Equipment rack ................................................................................................................................................................ 22

Interconnecting cables ..................................................................................................................................................... 22

ONNECTING TO THE

............................................................................................................................................ 23

Mains power .................................................................................................................................................................... 23

Computer connection ....................................................................................................................................................... 23

............................................................................................................................................................................. 25

Overview .......................................................................................................................................................................... 25

Start up ............................................................................................................................................................................ 26

Leak checking ................................................................................................................................................................... 27

Heating and Baking .......................................................................................................................................................... 28

Inlet operation.................................................................................................................................................................. 29

System shut down procedure ........................................................................................................................................... 29

MAINTENANCE ................................................................................................................................................................ 31

Inlet gauge zero ............................................................................................................................................................... 31

Operating pressure .......................................................................................................................................................... 31

Removing the inlet valve assembly .................................................................................................................................. 32

Refitting the inlet valve assembly .................................................................................................................................... 32

Vision 2000C/E electronics ............................................................................................................................................... 32

Turbo pump maintenance ................................................................................................................................................ 32

Mass spec maintenance ................................................................................................................................................... 32

Removing the analyser ..................................................................................................................................................... 34

Re-fitting the analyser ...................................................................................................................................................... 34

.................................................................................................................................................... 35

Support Contact Numbers ................................................................................................................................................ 35

Health and safety clearance form .................................................................................................................................... 35

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Summary of Contents for Vision 2000-C

Page 1: ...Vision 2000 C E Manual SP102005 102 March 2013...

Page 2: ...ticularly relating to any omissions or inaccuracies you may discover You can send your comments to MKS Instruments Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG United Kingdom 44 0 12...

Page 3: ...MKS Instruments UK Ltd V2000 C E Hardware Manual SP102005 102 March 2013 3...

Page 4: ...MKS Instruments UK Ltd V2000 C E Hardware Manual SP102005 102 March 2013 4...

Page 5: ...MC and safety issues The vacuum system on which the analyser RF head is mounted must be earthed to a protective earth preferably to the same protective earth as the control unit Operation The equipmen...

Page 6: ......

Page 7: ...ecting the foreline and SurgeProtector valve 19 Heater jackets 20 MicroVision2 installation 20 ELECTRICAL INSTALLATION 21 Equipment rack 22 Interconnecting cables 22 CONNECTING TO THE PROCESS TOOL 23...

Page 8: ...these boxes is described below WARNING WARNING boxes are used where failure to observe the instructions could result in personal injury or death CAUTION CAUTION boxes are used where failure to observ...

Page 9: ...ar panel of the Microvision2 refers to Read all instructions carefully before use The control and signal ports are designed for connection to MKS Instruments accessories via MKS Instruments cables The...

Page 10: ...mm H R C ceramic 250V AC characteristic T and compliant with IEC 127 Details of fuse types and ratings can be found in the RVC2 manual and printed on the rear panel Electrical Connections The Vision 2...

Page 11: ...om the tool foreline when the RGA system pump is off and when the tool foreline pressure is above 3 torr WARNING The RGA system must never be operated without exhausting to a hazardous gas scrubbing s...

Page 12: ...uments UK Ltd V2000 C E Hardware Manual SP102005 102 March 2013 12 System Options Fig 1 3 Valve Etch Configuration Fig 2 4 Valve Fast Response LPCVD Configuration Fig 3 4 Valve High Pressure CVD Confi...

Page 13: ...r local MKS Instruments facility or sales service representative Carefully unpack the various parts of your Vision 2000 C E system Again check for any signs of damage Find the shipment report and chec...

Page 14: ...n 2000C E has makes little difference to its installation On the face of the UniBloc inlet valve that connects to the RGA chamber is a ceramic CIS closed ion source coupling Exchanging an inlet valve...

Page 15: ...MKS Instruments UK Ltd V2000 C E Hardware Manual SP102005 102 March 2013 15 Dimensions 490mm 225mm 265mm 340mm 166mm...

Page 16: ...depending on working pressure 722 Baratron Gauge 2 LoVacOK 890B Gauge 3 UniBloc inlet assembly 4 Purge regulator assembly 3 5 to 8Bar Argon or dry Nitrogen supply required 5 System Interface Module 6...

Page 17: ...e Manual SP102005 102 March 2013 17 Item Ref Description 8 Pneumatic Manifold assembly 60 80 psig dry air 9 Fore line connecting flange 10 Cable loom supporting bracket 8 9 10 Pneumatics supply Use ad...

Page 18: ...MKS Instruments UK Ltd V2000 C E Hardware Manual SP102005 102 March 2013 18 Item Ref Description 15 V1 16 V2 17 V3 18 V4 19 UniBloc mounting face 20 16 15 17 18 19...

Page 19: ...g response time can be improved by using a length of 1 8 OD PTFE tubing from the point to be sampled to the face of the UniBloc Be sure that the tubing material is compatible with the process gases to...

Page 20: ...must be strictly followed Heater jackets The Vision 2000C E is supplied with two heater jackets fitted one on the main RGA chamber and another around the inlet valve assembly There is no need to remov...

Page 21: ...s and regulations The electrical installation should be carried out after the vacuum system installation Please follow the next sections in sequence Electrical specification See the RVC2 and Microvisi...

Page 22: ...n protective conduit e g plastic trunking that provides a good degree of protection according to the location of installation All cables are labelled at both ends All the connectors have been chosen t...

Page 23: ...100 120 Volts AC 50 60 Hz 15 Amps 220 240 Volts AC 50 60 Hz 13 Amps LINE BROWN NEUTRAL BLUE EARTH GREEN YELLOW Computer connection Vision 2000C E systems are used in conjunction with MKS Instruments...

Page 24: ......

Page 25: ...mputer software The operation of the vacuum system controller is fully described in the Remote Vacuum Controller manual The pumps are switched on from the Remote Vacuum Controller window or from the R...

Page 26: ...r will indicate when the pump is up to speed and the Turbopump indicator in the RVC window will change from yellow to green Note that the turbopump controller will be programmed to a set point of 95 o...

Page 27: ...unt recipe in Process Eye and check that the probe gas is set to mass 4 for helium or the appropriate mass if you are using another gas As the Vision 2000C E uses a Microvision2 there can be an audio...

Page 28: ...CAUTION The Electron Multiplier SEM MUST NOT be operated at temperatures above 90 o C Do NOT bake with the SEM selected After baking ends wait at least 2 hours before using the SEM The electron multip...

Page 29: ...ween the two sequential orifice stages O2 1 and O2 2 The inlet pressures that can be sampled properly are determined by this configuration and the size of the orifices Again differential pumping is ob...

Page 30: ......

Page 31: ...the two flying leads coming from the gauge connector and measure the voltage Ensure that the process chamber pressure is below 1milli torr then check the meter reading If the indicated voltage is gre...

Page 32: ...oval For system with compression springs note the following tightening procedure tighten these screws until the top of the screw head is flush with the top surface of the ceramic coupling springs will...

Page 33: ...tron multiplier SEM detector will also require replacement In extreme cases this can be as soon as 3 months but 1 2 years is more typical For non corrosive gas sampling SEM performance is often accept...

Page 34: ...f 6 o clock the standard analyser alignment pip orientation is at 9 o clock Remove the six x 28 bolts Carefully withdraw the analyser from the vacuum chamber Leave the old copper gasket in place until...

Page 35: ...rned delays in providing this completed form will lead to delays in the servicing of the instrument Securely package all items to be returned using the original packaging where possible and send to th...

Page 36: ...ease ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN S...

Page 37: ...ese substances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are...

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