MKS Instruments UK Ltd
V2000-C/E Hardware Manual – SP102005.102 March 2013
19
Main Chamber installation
This is a job that requires two people - one to support the Vision 2000C/E system, while the other fits the bolts to
the flange. The Vision 2000C/E will operate in any orientation, but it is preferable to mount it with the quadrupole
analyser horizontal, and the turbo pump hanging down, vertically.
The turbopump must not be inverted, to any degree
– that is, it must not be oriented with the exhaust end of its
shaft higher than its inlet end.
CAUTION
The V2000C/E vacuum system is heavy (~18kg, 40lb) and must
be adequately supported to avoid serious damage to the process
chamber! Independent support for the RGA vacuum system is
strongly recommended.
Installation should be performed by competent personnel using
appropriate installation components.
Note that care must be taken to support the weight of the V2000C/E assembly (approx. 18kg, =40lb) at the tool.
Most process tools have aluminium chamber walls with fittings that will not support this weight and torque,
directly.
MKS Spectra Products offers an adjustable stand to support the weight of the RGA at the tool without stressing
the point of vacuum connection (e.g., model 02184-4175). Please contact your MKS Spectra representative for
details on available sizes and configurations. Other support means that bear the weight of the system from the
turbopump flange or from under the turbopump are also permissible, provided that they do not generate a stress
between the mounting point and the inlet connection. Make the vacuum connection to the process chamber
using a clean CF35 copper gasket or O-ring, as required.
NOTE
: With 4-valve UniBloc
™
inlets, if the path from the inlet flange face to the point of gas flow being sampled
is long, response time can be improved by using a length of 1/8” OD PTFE tubing from the point to be sampled
to the face of the UniBloc™.
Be sure that the tubing material is compatible with the process gases to which it will be exposed
– PTFE is just a
suggestion. In this case, insert the end of the tubing approximately ½” into the V2 port on the face of the UniBloc
(angled hole pointing to V2 actuator). It must fit, snugly, so that it will not fall out. If this is done, ensure that the
other end will not interfere with the operation of the process tool. If this tube is later removed and replaced,
ensure that no debris is pushed up into the V2 actuator when inserting the new tube.
Pneumatic actuation and Purge Gases
Compressed air at 0.52 - 0.65 MPa (60-
80 psig) must be supplied to “push-in” inlet fitting of the valve manifold
mounted on in the Interface Module. The size of this fitting is customer dependent. This gas opens the inlet
valves.
There is T- pneumatic fitting here for extending the gas supply to the SurgeProtector valve assembly.
Purge gas at 3.5 to 8Bar
must be supplied to the 1/8” Swagelok™ fitting on the Purge Assembly. The absence
of adequate purge gas pressure is sensed by a pressure switch at the regulator. The RVC2 will interpret this
condition as “turbo-not-ready” and react to it the same as if the turbopump was not running at full speed. If this
condition persists more than a few minutes, the RVC2 will shutdown the RGA to protect the turbopump.
Either N2 or Ar of suitable purity (at least five 9’s is suggested) may be used. Purge gas consumption rate is
about 6 sccm.
Connecting the foreline and SurgeProtector valve
A length of metal bellows with KF-16 terminations is supplied for connecting the turbopump exhaust fitting to the
SurgeProtector valve assembly.
Connect the stainless steel foreline directly to the turbopump using a KF16 centering O-ring and clamp. The
valve assembly must be installed at the remote end of the foreline bellows, away from the RGA turbopump.
