MKS Newport IMS-LM-S Series, User Manual

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iii
EDH0398En1011 — 09/18
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity ...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution ...................................................................................................................ix
1.0 — Introduction
.................................................................................1
2.0 — Description
...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics
............................................................................3
3.1 Definitions ..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Hard Stop: Speed Limitation Versus Load .............................................5
3.4 Load Characteristics and Stiffness .........................................................5
3.5 Stage Weights ............................................................................................5
4.0 — Drive and Motor
.........................................................................6
4.1 Motor characteristics ...............................................................................6
4.2 Command Signals ......................................................................................6
4.3 Sensor Positions........................................................................................7
4.4 Position Feedback Signals........................................................................7
4.5 Pinouts........................................................................................................8
Motor Connector (P1) ..............................................................................8
Encoder Connector (P2) ..........................................................................8
End-of-Runs & Thermistor Connector (P3)............................................9
4.6 Cables .........................................................................................................9
5.0 — Stage Installation
.....................................................................10
5.1 Unpacking ................................................................................................10
5.2 Mounting Conditions ..............................................................................10
6.0 — Connection to Newport Controllers
..............................11
6.1 Operating with Newport Controllers/Drives .......................................11
6.2 Warnings on Controllers ........................................................................11
6.3 Connection ...............................................................................................12
6.4 Wiring .......................................................................................................12