MKS Newport IMS-LM-S Series User Manual Download Page 12

EDH0398En1011 — 09/18                                                                                                    

2

IMS-LM-S Series                                             High-Performance Long-Travel Linear Motor Stages

2.0  —

Description

The IMS-LM-S series of linear motor stages are designed for self-supporting

applications with travel ranges from 300 mm to 1200 mm. The stages

feature a robust design with high performance at low cost, making them

cost-effective solutions for precision industrial applications such as

semiconductor wafer inspection, microelectronics test and assembly, pick

and place, DNA sequencing, or laser machining. The IMS-LM-S-SA version

with, 4-point mounting, is ideal for delay lines and other applications with

non-flat mounting surfaces.

The IMS-LM-S series utilizes an FEM optimized extruded aluminum body

that is extremely stiff and minimizes bending caused by different thermal

expansion coefficients of the aluminum body and steel rails.

Unlike-screw driven stages, the IMS-LM-S employs a center-driven linear

motor. This linear motor is absolutely noise-free and has the advantage of

higher speed, acceleration and system responsiveness without wear on

motor brushes or drive screws. Due to the fully integrated linear motor,

the IMS-LM-S is more than 100 mm shorter in length than a comparable

screw driven stage. Thus, the IMS-LM-S is the optimum solution for space

constrained applications that require high-throughput, high reliability, and

ultra-quiet operation.

The IMS-LM-S uses a high efficiency 3-phase synchronous ironcore linear

motor. While ironcore linear motors are often criticized for their cogging

and high attractive forces, their efficiency is almost twice the efficiency of

ironless linear motors. This results in higher acceleration capability and

significantly less heat generation, which often limits performance of rapid

point-to-point positioning.

Recirculating ball bearing slides with caged balls provide excellent

payload capacity and long life. The ball separators in the recirculating

elements ensure superior smooth movement, lower noise, and longer

service life compared to uncaged ball bearing slides.

Precision position feedback is supplied by a highly repeatable linear scale

mounted inside the stage. The encoder signals are interpolated by

Newport’s motion controllers with outstanding 20 nm Minimum

Incremental Motion, repeatability, and stability. Absolute home position

and limit signals are incorporated to improve repeatability and reliability,

while simplifying the design with less electronics and mechanical parts.

2.1

Design Details

Base Material                                                                                      Extruded Aluminum

Bearings                                                                               Recirculating bearings with caged balls

Drive System                                                  3-phase synchronous ironcore linear motor (no Hall effect sensors)

Motor Initialization                                        Has to be done by the controller (without using Hall effect sensors)

Feedback                                                                         Linear steel scale, 20 µm signal period, 1 Vpp

Limit Switches                                                                                                Optical

Home Switch                                                     Optical, on encoder’s fiducial track, located at center of travel

ESP Compatibility                                                                                              Yes

MTBF                                                                                                         20,000 hours

Summary of Contents for Newport IMS-LM-S Series

Page 1: ...High Performance Long Travel Linear Motor Stages IMS LM S Series USER S MANUAL G U ARANTE E D S P E CIFICATIO N S...

Page 2: ...of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or cons...

Page 3: ...ed Limitation Versus Load 5 3 4 Load Characteristics and Stiffness 5 3 5 Stage Weights 5 4 0 Drive and Motor 6 4 1 Motor characteristics 6 4 2 Command Signals 6 4 3 Sensor Positions 7 4 4 Position Fee...

Page 4: ...Non Newport Controllers 13 7 1 Connections 13 8 0 Dimensions 14 8 1 M IMS LM S Stages 14 8 2 Top Plate Interfaces 15 IMS LM S Stages Top Plate Interface 15 M IMS LM S Stages Top Plate Interface 15 8...

Page 5: ...42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility complies with all the relevant provisions of the Directive 2011 65 E...

Page 6: ...onal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a...

Page 7: ...is device has the potential to disrupt pacemakers Consequently it is recommended that individuals maintain a distance of 1 meter or more from the stage as a precautionary measure WARNING Do not use th...

Page 8: ...t service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been...

Page 9: ...e Operating humidity 85 Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected bef...

Page 10: ...EDH0398En1011 09 18 x IMS LM S Series High Performance Long Travel Linear Motor Stages...

Page 11: ...the IMS LM S stage that you have purchased Inside this manual you will find useful information and technical references It is recommended the user download all support documentation from the IMS LM S...

Page 12: ...eration The IMS LM S uses a high efficiency 3 phase synchronous ironcore linear motor While ironcore linear motors are often criticized for their cogging and high attractive forces their efficiency is...

Page 13: ...Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position whe...

Page 14: ...tional Repeatability 300 400 0 08 0 25 Typical Guaranteed 1 m 500 600 0 09 0 25 800 0 10 0 50 0 10 0 50 1000 0 12 0 50 0 12 0 50 1200 0 13 0 50 0 13 0 50 Accuracy Typical Guaranteed 1 m 300 1 7 4 5 40...

Page 15: ...rating conditions to stop within the 8 mm over travel allowed by the hard stops To stop within this distance the user must maintain speed and load within this tolerance This graph assumes correct wiri...

Page 16: ...igher voltage on L relative to M Magnet Pitch Commutation period 24 mm Motor constant 180 N2 W Force sensitivity 38 9 N Arms Back emf constant 31 7 V m s Motor resistance 5 6 Motor inductance 36 mH Th...

Page 17: ...S 144 5 0 8 160 0 5 664 5 0 25 665 0 25 1170 0 5 1180 5 8 0 IMS1200LM SA S 144 5 0 8 160 0 5 764 5 0 25 765 0 25 1370 0 5 1380 5 8 0 End of Run Limit End of Run Limit Index Pulse Index Pulse Mechanica...

Page 18: ...f the motor power connector If you are using grounds other than those provided by Newport you must connect pin 8 to a ground connection 4 5 2 Encoder Connector P2 5 9 6 1 SUB D9M 1 Phase L Motor 2 Pha...

Page 19: ...refer to our website for ordering information WARNING The IMS LM S Series stages operate only with 5 meter max cables WARNING Cables of the kits are shielded correctly For a correct operation make sur...

Page 20: ...e will come delivered with a control report that indicates performance of your stage within guaranteed specification These measurements were taken in a controlled environment under flat mounting condi...

Page 21: ...avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions Specifications listed in this guide are based...

Page 22: ...supplied without cables see chapter 4 6 Cables WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to c...

Page 23: ...IMS LM S stages when used with non Newport controllers WARNING Newport guarantees compliance of IMS LM S stages only if used with the appropriate Newport cable kit and a XPS series controller It is t...

Page 24: ...VIEW IMS300LM S TO IMS600LM S MODEL SHOWN IMS300LM S DIMENSIONS IN INCHES AND MILLIMETERS MODEL METRIC n1 n2 TRAVEL L M IMS300LM S 4 4 11 81 300 21 85 555 M IMS400LM S 4 4 15 75 400 25 79 655 M IMS50...

Page 25: ...M5 THD ON 6 85 174 EQUIDISTANT AT 60 DEPTH 35 9 5 HOLES M5 THD 5 39 137 EQUIDISTANT AT 60 DEPTH 35 9 8 HOLES M4 THD DEPTH 47 12 BOTH SIDES 4 HOLES M4 THD DEPTH 24 6 51 13 SQR 7 05 179 15 22 5 25 A VI...

Page 26: ...travel of 800 to 1200 mm IMSLMC cable chain for routing cables to the stationary base For cable management of XY assemblies please call Newport STAGE FASTENING 2 CHC M4X 39 10 SCREWS CARRIAGE FASTENI...

Page 27: ...rn the stage to Newport for re lubrication after 2000 hours of use If the IMS LM S stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for furth...

Page 28: ...EDH0398En1011 09 18 18 IMS LM S Series High Performance Long Travel Linear Motor Stages...

Page 29: ...Fax Name Company Address Country P O Number Item s Being Returned Model Description Reasons of return of goods please list any specific problems Return authorization Please obtain prior to return of i...

Page 30: ...sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois...

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