EDH0398En1011 — 09/18
4
IMS-LM-S Series High-Performance Long-Travel Linear Motor Stages
3.2
Mechanical Specifications
NOTE
The following specifications are controller/driver dependent:
• Minimum Incremental Motion (MIM)
• Maximum Speed
• Maximum Acceleration
Refer to the IMS-LM-S Series page on www.newport.com for
specifications achievable with specific Newport controller/driver
combination.
CAUTION
To reach stated specifications, the stages must be fixed on a plane
surface with a flatness of 5 µm.
G
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CIFICATIO
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Travel Range (mm)
IMS-LM-S IMS-LM-SA-S
Travel Range (mm) 300, 400, 500, 600, 800, 1000 and 1200
800, 1000 and 1200
Minimum Incremental Motion (nm) 20
Bidirectional Repeatability, 300 & 400-: ±0.08 (±0.25) –
Typical (Guaranteed)
(1)
(µm) 500 & 600: ±0.09 (±0.25) –
800: ±0.10 (± 0.50) ±0.10 (± 0.50)
1000: ±0.12 (± 0.50) ±0.12 (± 0.50)
1200: ±0.13 (± 0.50) ±0.13 (± 0.50)
Accuracy, Typical (Guaranteed)
(1)
(µm) 300: ±1.7 (±4.5) –
400: ±2.0 (±4.5) –
500: ±2.5 (±5.5) –
600: ±3.0 (±7.5) –
800 & 1000: ±4.0 (±9.0) ±4.0 (±9.0)
1200: ±5.0 (±9.0) ±5.0 (±15)
Maximum Speed (No Load)
(2)
(mm/s) 1000 (refer to chart below)
Maximum Acceleration (No Load)
(2)
(m/s
2
) 40
Moving mass (kg) Carriage: 3.5 + Interface:1 = 4.5
Drag force (torque) Approx. 15 N
Pitch, Typical (Guaranteed)
(1) (3)
(µrad) 300 to 500: ±37 (±75) –
600: ±50 (±125) –
800: ±100 (±200) ±100 (±200)
1000: ±112 (±225) ±112 (±225)
1200: ±125 (±250) ±125 (±250)
Yaw, Typical (Guaranteed)
(1) (3)
(µrad) 300: ±25 (±50) –
400 & 500: ±25 (±75) –
600: ±30 (±75) –
800 to 1200: ±40 (±150) ±40 (±150)
1)
For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial
at www.newport.com
2)
Speed depends on the driver.
3)
To obtain arcsec units, divide µrad value by 4.8.
