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Program settings
112
Setting the hold-
ing time
The holding time is the duration in which the wash block temperature
is kept constant.
...
Holding time
Holding time
)
Min
(0 - 15
1
Min
The duration can be set in 1 minute increments. The possible range is
shown in the bottom line.
If process chemicals are to be dispensed in this wash block, the hold-
ing time will equal at least the DOS exposure time. It is not possible
to set a lower value.
Use the arrow buttons
(higher) and
(lower) to set the holding
time.
Press
OK
to save the setting.