LEYBOLD MAG 1500 CT Operating Instructions Manual Download

Page: 106 / 112

GA05141_0702 - 09/2004

106

The system

MAG

digital

LINE

■

turbomolecular pump

■

connecting cables

■

frequency converter

has been tested by the TÜV Rheinland of North America according to the
requirements of

■

NRTL

(used standards UL 61010A-1 and IEC 61010-1/A2) and

■

SEMI S2

The components are in compliance to the tested standards.

Certificate No. US 2271305 01, 02 and 03

vacuum

Summary of Contents for MAG 1500 CT

Page 1: ...vacuum OPERATING INSTRUCTIONS GA05141_0702 Turbomolecular Pumps with Magnetic Bearing MAG DRIVEdigital Electronic Frequency Converter LINE...

Page 2: ...2 3 Connecting the MAG to the vacuum chamber 45 2 4 Connecting the backing pump 48 2 5 Connecting the cooling water 50 2 6 Connecting the purge gas 53 2 7 Installing the MAG DRIVEdigital 58 2 7 1 Pow...

Page 3: ...8 Frequency settings 85 3 10 9 Total view of the menu 88 4 Maintenance 90 4 1 Cleaning 90 4 2 Changing the rotor 90 4 3 Changing the touch down bearings 90 4 4 Cleaning the frequency converter intern...

Page 4: ...r mainte nance que stions to your nearest Leybold Vacuum office Never expose any parts of the body to the vacuum The standard version of the equipment is not suited for operation in explosion hazard a...

Page 5: ...ohibited for safety reasons Only suitably qualified personnel are permitted to work on the pump or converter Personnel must be completely knowledgeable of all warning information and measures which ar...

Page 6: ...rating Instructions for further use The Operating Instructions are included with the pump and the converter If they have different editions the version delivered with the pump describes the pump corre...

Page 7: ...pump temperature They are prepared for use in medium to harsh corrosive applications The pumps are available with 2 different rotors MAG version Turbo pump MAG W version Turbo pump stages and an activ...

Page 8: ...05141_0702 09 2004 8 Description MAG 1500 CT MAG W 1500 CT MAG W 2200 C MAG W 2800 CT MAG W 3200 CT Fig 1 MAG turbopumps MAG W 830 C MAG W 1300 C Each Fuse 4 A digital Fig 2 MAG DRIVEdigital Front pan...

Page 9: ...mp to seize These deposits can also react with moisture and generate corrosive gases e g HCl This can become very critical when the pump is exposed to air Deposits can be avoided in many processes by...

Page 10: ...r low vibration operations and insures opera tion of the pump in any mounting position Magnetic bearings also guaran tee ultra clean vacuum because no grease is used for lubrication of bea rings Two t...

Page 11: ...GA05141_0702 09 2004 11 Description Motor Fig 3 Section of a MAG Wide range rotor Standard rotor...

Page 12: ...the electronic converter are no load and short circuit proof For remote control via control connector X14 we recommend that either a relay or optocoupler is used to provide electrical decoupling Hous...

Page 13: ...Each Fuse 4 A digital Fig 4 Front panel X14 Connection control plug X19 Mains connection X20 Connection magnetic bearing pump motor memory chip X21 Connection TMS purge gas valve X22 Network connecti...

Page 14: ...attaching the pump to your tool To avoid any safety risk we highly recommend using only the bolts provided with the pump Refer also to Section 2 3 Connecting the MAG The electronic frequency converter...

Page 15: ...6 1 6 Cooling water Cooling connection threads G 1 4 with Swagelok for tube OD mm 6 4 1 4 6 4 1 4 6 4 1 4 or with John Guest fitting for tube mm 6 6 Cooling water temperature C 10 30 F 50 86 Weight ap...

Page 16: ...t venting min 1 6 Cooling water Cooling connection threads G 1 8 with Swagelok elbow for tube OD mm 6 4 1 4 Cooling water temperature C 10 30 F 50 86 Base flange temperature C 20 90 F 68 194 Weight ap...

Page 17: ...oling water Cooling connection threads G 1 8 with Swagelok elbow for tube OD mm 6 4 1 4 6 4 1 4 with stainless steel hose nipples for tube ID 1 2 1 2 Cooling water temperature C 10 30 F 50 86 Base fla...

Page 18: ...re as to DIN 28 400 mbar 1 10 10 Max forevacuum pressure with N2 water cooled mbar 2 2 1 3 air cooled mbar 0 2 0 2 0 1 0 3 Rotor speed min 1 36 000 36 000 29 400 28 800 Run up time min 8 8 10 10 Weigh...

Page 19: ...s 1100 W Max voltage motor 60 V Maximum pump current 15 A rms Internal main fuse 16 A Rated braking capacity 200 kA System fuse L or G characteristic Maximum frequency 600 Hz Load capability relay out...

Page 20: ...T DN 250 MAG W 2200 C DN 250 MAG W 2800 C CT DN 250 MAG W 1300 1500 C CT DN 200 MAG W 2200 C DN 200 Fig 6 Pumping speed curves for Nitrogen With purge gas with splinter guard Forepump 100 m3 h Pipe 1...

Page 21: ...36 Connecting cables converter pump see Fig 8 19 installation frame 161 00 Blind plate 1 4 19 3 HE 161 02 Connector for hardware interface from 25 pins to 50 pins on request Purge vent valve 121 33 P...

Page 22: ...1 4 yes yes Swagelock 1 4 tube yes yes 400026V0002 MAG W 1500 CT 250 ISO F 40 KF VCR Nut 1 4 yes yes Swagelock 1 4 tube yes yes 400027V0002 MAG W 1500 CT 200 CF 40 KF VCR Nut 1 4 yes yes Swagelock 1 4...

Page 23: ...ded 225 straight straight 400036V0012 30 m bended 225 straight straight 400036V0011 Cable TMS for CT versions only Cable Converter cable outlet Pump cable outlet length TMS X21 TMS X30 Heater X31 Part...

Page 24: ...2 4 198 3 3 Each Fuse 4 A Fig 10 Standard fixing of the MAG DRIVEdigital START STOP Com Status Main X7 Fuses TMS MAG D RIVE Each Fuse 4 A 19 installation frame 4 x M3 screws straight plugs bended plug...

Page 25: ...6 0 B C E 1 1 F Fig 11 MAG W 830 C and MAG W 1300 C dimensions in mm Inlet flange A B C D E F G Forevacuum connection MAG W 830 C 160 ISO F 225 200 151 353 15 45 8 DN 40 KF MAG W 1300 C 200 ISO F 285...

Page 26: ...W 1500 CT A B 16 C 175 164 5 107 11 29 76 H 84 118 262 1 5 0 159 182 60 9 32 3 7 0 3 0 105 6 0 243 116 5 26 M8 15 mm deep Heatband 285 1 1 B G E 3 6 0 E Dx DN 40 KF C Inlet flange A B C D E G H 200 IS...

Page 27: ...4 6 317 A 4 5 199 DN 40 8 39 36 5 R155 R 1 1 7 R 1 2 0 3 6 C 1 2 x 3 0 3 6 0 1 5 3 0 1 1 3 D 25 Fig 13 MAG W 2200 C dimensions in mm MAG W 2200 C Part No 400081V0011 400081V0021 Inlet flange A B C D 2...

Page 28: ...GA05141_0702 09 2004 28 Description Fig 14 MAG W 2200 C dimensions in mm MAG W 2200 C Part No 400081V0020 335 199 4 5 293 286 371 165 D N 4 0 283 16 317 29 36 301 68 4 0 36 5 39 45 8 57 5 49 2 5 G1 8...

Page 29: ...deep 1 2 x 3 0 3 6 0 B 1 5 3 0 E D DN 40 F G H 199 C B A 369 176 353 84 196 5 Fig 15 MAG 2800 CT and MAG 3200 CT dimensions in mm MAG W 2800 CT MAG W 3200 CT Inlet flange A B C D E F G H 250 ISO F 335...

Page 30: ...1_0702 09 2004 30 Description Fig 16 MAG W 830 dimensions in mm 359 308 163 175 260 DN 160 CF 249 296 202 5 22 DN 40 KF 40 20 R 1 1 4 7 8 31 30 85 5 1 0 3 9 7 Bearing Connector 181 1 5 0 8 4 9 1 8 MAG...

Page 31: ...41_0702 09 2004 31 Description Fig 17 MAG W 1300 dimensions in mm 175 218 162 328 328 277 260 DN 200 CF DN 40 KF 253 8 31 9 7 20 40 1 0 3 86 30 R 1 1 4 7 Bearing Connector 8 7 5 1 5 231 8 1 9 6 MAG W...

Page 32: ...GA05141_0702 09 2004 32 Description Fig 18 MAG W 2200 dimensions in mm 401 316 322 4 5 199 164 305 DN 250 CF DN 40 KF 5 3 5 4 0 9 45 31 1 4 9 6 1 1 5 Bearing Connector 1 1 2 5 2 5 0 284 MAG W 2200...

Page 33: ...2004 33 Description Fig 19 MAG W 2800 dimensions in mm 307 369 DN 250 CF 199 422 337 305 391 196 46 8 1 1 31 39 5 11 48 Bearing Connector DN 40 KF 8 4 1 1 2 5 0 5 6 2 5 2 8 4 3 2 x 1 1 2 5 0 3 6 0 58...

Page 34: ...ection PK connection Cooling water connection Correct Wrong 35 mm 17 mm 8 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strengt...

Page 35: ...261 mm 14 mm 35 mm Vacuum sealing disk consisting of centering ring and O ring with outer support ring Retaining ring ISO K flange ISO F collar flange Bolt 14 mm 35 mm Correct Wrong Caution Install th...

Page 36: ...er bolt 25 5 Nm Bolt quality 10 9 according to EN ISO 898 1 with coating 0 2 yield strength 900 N mm2 MAG W 1500 CT Correct Wrong Caution Install the splinter guard as shown Installing the splinter gu...

Page 37: ...IVE BEARING connection PK connection Cooling water connection 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bolt quality 12 9 according to EN ISO 898 1 with coating 0 2 yield strength 1080 N...

Page 38: ...ge Purge gas valve Purge gas in High vacuum flange DRIVE BEARING connection PK connection TMS connection Heater band Cooling water connection 12 bolts M10 x 35 Installation torque per bolt 35 5 Nm Bol...

Page 39: ...orevacuum flange Purge gas valve Purge gas in High vacuum flange DRIVE BEARING connection PK connection TMS connection Heater band Cooling water connection 10 bolts M12 x 40 Installation torque per bo...

Page 40: ...IVE BEARING connection PK connection Cooling water connection Correct Wrong 48 mm 40 mm 2 mm 10 mm Caution Install the splinter guard as shown Installing the splinter guard upside down may lead to con...

Page 41: ...RIVE BEARING connection PK connection Cooling water connection Correct Wrong 48 mm 40 mm 2 mm 10 mm Caution Install the splinter guard as shown Installing the splinter guard upside down may lead to co...

Page 42: ...RIVE BEARING connection PK connection Cooling water connection Correct Wrong 48 mm 40 mm 2 mm 10 mm Caution Install the splinter guard as shown Installing the splinter guard upside down may lead to co...

Page 43: ...RIVE BEARING connection PK connection Cooling water connection Correct Wrong 48 mm 40 mm 2 mm 10 mm Caution Install the splinter guard as shown Installing the splinter guard upside down may lead to co...

Page 44: ...package until immediately before installing Do not remove the covers and blanking flanges until you are ready to make the connections to ensure that the MAG is installed under the cleanest possible co...

Page 45: ...nge can cause serious damage to the rotor That s why the splinter guard must always be installed Damages caused during operation without the splinter guard are excluded from warranty The pump must be...

Page 46: ...ng ring and O ring with outer support ring Retaining ring ISO K flange ISO F collar flange Bolt Fig 31 ISO F connection with bolts and nuts DN 160 ISO F 8 bolts M 10 x 50 Installation torque per bolt...

Page 47: ...n The standard fixing for the converter is shown in Fig 10 If several turbomolecular pumps are installed to the vacuum chamber of the same system there is the risk of interference vibration interferen...

Page 48: ...ntrolled shut down of the backing pump This valve must be able to close fast enough to avoid pressure increase in the MAG In case of an oil sealed backing pump the foreline isolation valve protects th...

Page 49: ...ning M 150 Nm Mq 150 Nm Fig 35 Maximum torques for the forevacuum connection M Mq The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with the air...

Page 50: ...est Connect the cooling water to the connectors see Fig 37 The CT versions have a cooling water bypass Make sure that you do not mix up the inlet and the outlet con nection Turn off the cooling water...

Page 51: ...er Cooling water Cooling water out in 1 4 6 4 mm Do not mix up the inlet and the outlet Stainless steel hose nipples 1 2 John Guest fitting for hose 6 mm OD Swagelock tube fitting for tube 1 4 Swagelo...

Page 52: ...00 250 200 150 120 100 50 0 l h Operation window 0 1 2 3 4 5 bar 400 350 300 250 200 150 100 50 0 l h MAG W 1500 2800 3200 CT Bypass operation All pumps Cooling Flow Temperature Flow Differential pres...

Page 53: ...d inert gases like nitrogen or argon The temperature of these gases should be between 5 C and 80 C max relative humidity should not exceed 10 ppm In individual cases and after consultation also dry fi...

Page 54: ...ent valve assembly Attach the purge gas hose to the nipple and secure with a hose clamp Set purge gas pressure for a value of 1 5 to 6 0 bar absolute Use in the purge gas supply system only valves whi...

Page 55: ...p Pump purge gas inlet Vent valve shown closed opens a bypass around the choke when the pump is to be vented Choke capillary Purge gas valve shown open Sintered metal filter Pressure regulator Purge g...

Page 56: ...abs will provide the required flow of 36 sccm 5 sccm The Tee and the the purge vent valve can be mounted to the MAG W 830 C W 1300 C W 830 W 1300 W 2200 and W 2800 The pumps without C in the name are...

Page 57: ...lter to the pump F i l t e r O r i n g f i x i n g O r i n g s e a l i n g A d a p t e r S e a l i n g r i n g P u r g e g a s v a l v e V e n t i n g v a l v e Purge gas or air G 1 4 Filter mounted O...

Page 58: ...cting the frequency converter to a polyphase network between two phases provide additional external fuse protection for both phases fuse amperage 16 A The external fuse must have a minimum rated bra k...

Page 59: ...y to be connected to line supply voltages between 200 240 V 50 60 Hz The connection is established using the power cable supplied which is inserted at connector X19 at the rear of the converter The co...

Page 60: ...system control a floating dry contact must be available on the system side load carrying capacity 42 VDC 100 mA The contact used and the connecting cable must be protected against line supply voltage...

Page 61: ...AL OPERATION 36 Relay 3 n c WARNING 37 Relay 4 n c ACCELERATION 38 Relay 5 n c DECELERATION 39 Relay 6 n c OPTION 40 Relay 7 n c OPTION 41 Relay 8 n c OPTION 42 Relay 9 n c OPTION 43 GND 44 Dig input...

Page 62: ...inputs The converter has 5 digital inputs with the following functions TMS OFF Purge gas OFF Vent ON Option 1 2 The functions are active if a High signal 15 V e g Pins 28 or 29 is con nected at the d...

Page 63: ...DRIVE BEARING X24 X23 X30 X19 X14 X20 X21 MAINS Control plug DRIVE BEARING X24 X23 Pumps with TMS Pumps without TMS X19 X14 X20 X21 MAINS Control plug X19 X14 X20 X21 MAINS Control plug DRIVE BEARING...

Page 64: ...X14 38 Function analog input 2 Analog input 2 Frequency setpoint X14 16 Analog input 1 Analog input 1 X14 32 33 Analog ground X14 35 X14 19 X14 2 Actual frequency Normal operation Start command applie...

Page 65: ...ont side 0 X14 23 24 25 26 X14 6 7 8 9 X14 39 40 41 42 X X14 50 X14 32 33 X14 28 29 15 V 8 Venting Threshold 0 1 2 4 5 6 Rotor displacement PVW13peak PVW24peak PZ12peak Current limiting 80 mA 1 2 3 4...

Page 66: ...with the touch down bearings This will cause increased wear Do not disconnect the MAG and MAG DRIVE while they are operating If MAG and MAG DRIVE have been disconnected accidently re connect them Do n...

Page 67: ...ses from being forced into the not yet vented motor chamber of the pump Speed of the pressure rise All turbomolecular pumps may be vented at full speed However the pres sure must not increase faster t...

Page 68: ...OFF ON TTMS Tset 1 K Heater ON OFF TTMS Tset 1 K Cooling OFF ON TA Tset 2 K Cooling ON OFF TA Tset 1 K TMS ok Tset 5 K TTMS Tset 5 K Warning TMS TTMS Tset 5 K Settings The temperature TMS setpoint ca...

Page 69: ...N 5 W Temp TMS TMSSet 5K O F F TMS cancelled via control plug X14 6 H C O K Temp TMS ok cooling ON heater ON 7 N O K Temp TMS not ok cooling OFF heater OFF 8 H C Temp TMS not ok cooling ON heater ON 9...

Page 70: ...r current will reduce the ser vice life of the rotor In such cases additional safety measures need to be introduced which must be co ordinated with Leybold Also warming up of the rotor due to other in...

Page 71: ...therein will have to be baked out Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the components attached di...

Page 72: ...n the cooling water supply Press the START key The pump runs up The STATUS LED is slowly flashing green When the STATUS LED is lit permanently green the pump is in normal operation Switching off Press...

Page 73: ...is switched on and all of the supply voltages for operation are available Flashes when the power fails as long as the power supply voltages in the converter are maintained by the kinetic buffering 3 7...

Page 74: ...X14 48 X14 47 Shutdown Start delay time START pump STOP pump braking the pump with the pulsed resistor START key pad STOP key pad STOP interface START interface No Failure Operating mode Programming o...

Page 75: ...e g the red heater band the heater will be activated The setpoint temperature will be reached within 30 60 minutes depending on cooling water temperature and flow In case of corresponding connection t...

Page 76: ...there is no warning or failu re it changes over into the Ready condition After a failure has been acknowledged the converter goes into the Switch On Guard operating status The failure must be acknowl...

Page 77: ...ue or proceeds to the next option Lowers a parameter value or returns to the previous option Selects the programming menu from the operating display Switches back to the last main menu Selects the pro...

Page 78: ...inimum frequency of 110 Hz When the power returns the pump is again accelerated up to the frequency setpoint The acceleration time is now restarted If the converter hasn t gone into the normal operati...

Page 79: ...ure quit a second time START command Mains ok Frequency P 25 x P24 Mains failure Mains failure 5 s Frequency P25 x P24 Frequency P25 x P24 Mains failure STOP command If a failure occurs the pump is de...

Page 80: ...etic bearing plane VW24 Actual PZ 12 Rotor displacement in the actual value r magnetic bearing axis Z12 Power Power consumption of the drive actual value W r Analog Input 1 Analog Input Channel 1 0 10...

Page 81: ...Rev SW Revision of the actual value r 6 55 35 pump memory chip PK PK HW Rev HW Revision actual value r 6 55 35 of the pump memory chip PK PK Data Rev Revision of the pump memory chip actual value r 6...

Page 82: ...will be saved in the memory chip using a ring arrangement capable of saving 20 failure events 0 19 in chrono logical order Index 0 represents the most recent and index 19 the oldest failure event Oper...

Page 83: ...w off optionally frequency setpoint Function frequency setpoint via analog input 2 10 V max frequency setpoint Start Delay Waiting time between start command and acceleration 0 3600 0 s r w off Displ...

Page 84: ...value value fault TMS Setpoint Setpoint of the Temperature 20 80 90 70 C r w on Management System MAG W 1500 CT 90 C MAG W 2800 3200 CT 80 C 3 10 7 Menu Set Purge Vent Menu item Description Adjustabl...

Page 85: ...50 Hz Standby Setpoint with 20 Hz Hysteresis Normal Operation Threshold 95 of Freq Setpoint Default Values Acceleration within Max Accel Time 600 to 3600 secs Acceleration within 1000 secs 465 5 Hz Fi...

Page 86: ...125 Treshold bearing temperature 1 Motor Current Motor Current P5 Treshold motor current 2 Frequency Frequency P3 Treshold frequency 3 No Cooling Water Cooling Temp P127 Shut down temperature 4 No Pur...

Page 87: ...pump 0 140 C 220 rotor displacement in the mag bearing plane VW13 0 00 199 99 221 rotor displacement in the mag bearing plane VW24 0 00 199 99 222 rotor displacement in the mag bearing axis Z12 0 00 1...

Page 88: ...ev 6 55 35 Enter Conv Op Hours 167772 16 Enter Pump Cat No 99999999999 Enter Pump Ser No 99999999999 Enter Conv SR SW Rev 6 55 35 Conv AMB Data R 1 01 Enter Pump Name MAG W 1500 CT Enter Conv AMB SW R...

Page 89: ...read value can only be read r w read write value can be read and written on online value can be changed always off offline value can only be changed when the pump stands still All menus can be invoke...

Page 90: ...p may be torn off When using clamped flange connections at the housing or with compo nents above the housing sudden twisting of the entire pump can be experienced The pump s operating hours are displa...

Page 91: ...umps Proceed as follows to seal the turbomolecular pump immediately after removing it from your process Purge the pump for two hours with the backing pump running This helps to remove a large quantity...

Page 92: ...nents Another suitable form is available from the Leybold homepage http www leybold com under the headline customer service Either fasten this form at the pump or simply enclose it to the pump Don t p...

Page 93: ...g the MAG tightly with the metal seal kit nuts desiccant centering ring with O ring bolts collar flange retaining ring blank flange Centering ring with O ring desiccant clamping ring blank flange scre...

Page 94: ...sages can be cancelled once the pump has come to a stop and after the malfunction has been rectified do so with the STOP function button or remote control The MAG shall be stopped completely and the m...

Page 95: ...play see Section 3 10 1 Reduce gas load If the warning persists con tact Leybold service Contact Leybold service Apply cooling water according to specifica tions Check cooling water tubes for deposits...

Page 96: ...on Contact Leybold service Reduce backing pressure Additionally check process gas flow Set parameter Normal Operation to default 95 Refer also to Section 3 10 5 Reconnect converter to the mains Switch...

Page 97: ...t is damaged or in case the measurement of the resistance shows abnormal values 3 4 k now Contact Leybold service Apply cooling water according to specifications Check cooling water tubes for deposits...

Page 98: ...ybold Application Support Acknowledge failure message and restart the pump If failure message persists contact Leybold service Check the chamber pressure during the ope ration Refer to Section 3 1 for...

Page 99: ...shut down and can thereafter no longer be started Firmware Update This failure message is displayed directly after swit ching on the mains The system cannot be started Measures Measure the resistance...

Page 100: ...f failure Motor Temp Contact Leybold service if the resistance of the sensor is less than 1 62 k Contact Leybold service Acknowledge failure message If failure per sists contact Leybold service Contac...

Page 101: ...ted to the pump The resistance is typically between 70 and 75 Replace the cable if it is damaged or in case the mea surement of the resistance shows abnormal values now Contact Leybold service Check t...

Page 102: ...mp open Sensor loop is interrupted Cooling Temp open Sensor loop is interrupted AMB Not Initial Converter can not identify the pump SPI Com Fail Communication problem bet ween main controller and magn...

Page 103: ...drops while the valve is closed Set purge flow according to specification Open and close purge gas and venting valve via control plug X14 LED on the valve must light up and a clicking noise can be hea...

Page 104: ...lied harmonized standards EN 1012 2 1996 GA05141_0702 09 2004 104 Leybold Vacuum GmbH Bonner Stra e 498 Bayenthal D 50968 K ln Tel 49 0 221 347 0 Fax 49 0 221 347 1250 documentation leybold com vacuum...

Page 105: ...EMC adapted installation of component within the plant or machine Test were run using a typical construction in a test assembly that conforms with the standards Time of the CE label year 2004 Designa...

Page 106: ...g cables frequency converter has been tested by the T V Rheinland of North America according to the requirements of NRTL used standards UL 61010A 1 and IEC 61010 1 A2 and SEMI S2 The components are in...

Page 107: ...GA05141_0702 09 2004 107 Notes...

Page 108: ...__________________________ __________________________________________________ B Condition of the equipment No Yes No Contamination No Yes 1 Has the equipment been used toxic 2 Drained Product service...

Page 109: ...rial Number Complaint Process OEM Equipment Name and Model Process Gas Was the turbopump replaced Yes No If yes replacement pump P N replacement pump S N Date Installed Date Removed Date Received Date...

Page 110: ...003 MAG W 830 MAG W 1300 MAG W 2200 MAG W 2800 with CF flange MAG DRIVEdigital from software version 302 18 KA 05154_0302 Engl April 04 Suppl for GA 05 141 6 02 KA 05154_0301 German April 04 Suppl for...

Page 111: ...5 78 82 89 96 L LED 12 54 72 73 103 M magnetic bearing 7 10 12 59 66 80 96 100 102 magnetic field 44 mains 5 12 13 58 59 63 66 68 78 79 82 83 86 88 89 91 94 96 99 103 media 9 53 54 motor current 60 61...

Page 112: ...1 Fax 34 93 685 40 10 Sweden Leybold Vacuum Scandinavia AB Box 9084 40092 G teborg info leybold se Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 Switzerland Leybold Vacuum Schweiz AG Leuts...

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LEYBOLD MAG 1500 CT, Operating Instructions Manual

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