GA05141_0702 - 09/2004
47
Installation
Mount the MAG as close as possible to the vacuum chamber. If the MAG
is permanently flanged to a vacuum chamber with a weight exceeding 500
kg, it will not be necessary to secure it in any other way.
The vacuum chamber must be securely attached to the floor or a solid wall.
In case of lighter vacuum vessels secure the pump additionally. The pum-
p’s bottom is equipped with tappered holes for fastening a support; see
dimensional drawings.
For earthquake protection fix the pump as shown in Fig. 20 to 29.
Depending on the chamber’s weight and fixing use the boreholes in the
pump’s bottom in addition. The standard fixing for the converter is shown
in Fig. 10.
If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference bet-
ween the pumps). If such a risk exists please contact Leybold Vacuum
Application Support.
We recommend installing an isolation valve between the pump and the
chamber. The valve should be closed during wet cleans of the chamber and
in case of pump failures which will lead to a pump shut down. The valve
should normally be closed with power off.
The basic flange heater can become so hot during operation (> 85
°
C, > 185
°
F) that it represents a burn hazard:
Provide protection against contact with the hot components.
Correct
Wrong
Fig. 33 Vacuum chamber fixed to the floor
Warning
Earthquake protection
Isolation valve
Vibration influence
Summary of Contents for MAG 1500 CT
Page 107: ...GA05141_0702 09 2004 107 Notes...
