LEYBOLD 840071V1000, Operating Instructions Manual

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Contents
2
300855170_002_C4 - 06/2020 - © Leybold
Page
0 Important Safety Information 5
Safety symbols 5
0.1 Mechanical hazards 6
0.2 Electrical hazards 7
0.3 Thermal hazards 7
0.4 Danger through materials and substances 7
0.5 Dangers in connection with safety-related
measures and precautions 7
1 Description 8
1.1 Design 9
1.2 Standard equipment 9
1.3 Technical data 10
1.3.1 Technical data for the integrated drive electronics 11
1.3.2 Pumping speed curves 12
1.3.3 Operation diagrams 13
1.4 Ordering data 16
1.5 Accessories 16
2 Transport and storing 19
3 Installation 20
3.1 Conforming utilization 20
3.1.1 Non-conforming utilization 20
3.2 Operating environment 21
3.3 Fitting accessories 21
3.4 Attach the pump to the vacuum chamber 22
3.5 Forevacuum connection 27
3.6 Connect the cooling 28
3.6.1 Air cooling 28
3.6.2 Water cooling 29
3.6.3 Water Quality 30
3.7 Connect a power failure venting valve or a venting valve 32
3.8 Connect purge gas 33
3.9 Connect a flange heater 34
3.10 Electrical connection 34