Description
14
300855170_002_C4 - 06/2020 - © Leybold
Gasdurchsatz in mbarl/s
Druck in mbar
Operationsdiagramm
TURBOVAC 850i für Argon
Saugleistung TURBOVAC 850i
Kühlwasser 15 °C, 100 l/h
Kühlwasser 35 °C, 50 l/h
Lüfterkühlung 24 °C
Lüfterkühlung 40 °C
Konvektion 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
10
-6
10
-4
10
2
10
-2
1
10
-10
10
-8
10
-6
10
-4
10
10
-2
1
10
-8
Fig. 1.5 Operation diagram for TURBOVAC 850 i
Operation diagram for
argon for the TURBOVAC 850i
Throughput TURBOVAC 850i
Cooling water 15 °C, 100 l/h
Cooling water 35 °C, 50 l/h
Air cooling 24 °C
Air cooling 40 °C
Convection 24 °C
ECODRY 65 plus
TRIVAC D 65 B
SCROLLVAC 7 plus
DIVAC 3.8 HV3
Gas thr
oughput in mbar·l/s
Pressure in mbar
