Description
10
300855170_002_C4 - 06/2020 - © Leybold
1.3 Technical data
TURBOVAC
850 i
950 i
High-vacuum connection
DN
160 ISO-K
160 CF
200 ISO-K
200 CF
Forevacuum connection
DN
25 KF
Pumping speed*
N
2
Ar
He
H
2
I · s
-1
720
655
850
755
900
840
925
770
Gas throughput*
N
2
Ar
He
H
2
mbar · I · s
-1
14
3.5
21
> 15
Compression ratio*
N
2
Ar
He
H
2
> 1·10
11
> 1·10
11
1.3·10
8
4.4·10
6
Ultimate pressure with 2-stage oil-sealed rotary
vane pump ISO-K / CF
mbar
3·10
-8
/ 3·10
-10
Max. permissible
forevacuum pressure for N
2
mbar
15
Operating speed
min
-1
49 200
Minimum speed
min
-1
30 000
Run-up time, approx.
min
2.5
Max. power consumption
W
500 (default), 600 (max.)
Power consumption at ultimate pressure
W
40
Type of protection
IP
40
Ambient temperature
during operation
storage
°C
+5 to +40
1)
-15 to +70
Cooling standard
Convection
1)
Cooling optional
Air or water
1)
Cooling water connection
plug connection for 6x1 hose /
alternatively G 1/8-in. screw-in thread
Cooling water consumption
l/h
60
Permissible cooling water pressure
(
bar(g): bar (gauge) is overpressure,
i.e. atmospheric pressure = 0 bar(g))
bar(g)
6
Permissible cooling water temperature
°C
15 to 35
Weight ISO-K / CF
kg
14.6 / 19.6
15.4 / 21.7
Recommended forevacuum pumps
ECODRY 65 plus, TRIVAC D 65 B,
SCROLLVAC 7 plus, DIVAC 3.8 HV3
* Please contact us when using Argon or other “heavy” gases as process gas.
1) * Depending on the ambient temperature, the gas throughput and the type of gas, forced air cooling or water cooling may be necessary.
