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LEYBOLD 840071V1000 Operating Instructions Manual Download Page 16

Description

  16

300855170_002_C4 - 06/2020 - © Leybold

1.4  Ordering data

TURBOVAC

850 i

950 i

RS 485, USB+, 15-pin digital I/O interface
High-vacuum flange

160 ISO-K

200 ISO-K

Part No. 

Pump with optional interface

840071V1000 

840071V2000

840091V1000 

840091V2000

High-vacuum flange

160 CF

200 CF

Part No. 

Pump with optional interface

840081V1000 

840081V2000

840111V1000 

840111V2000

Optional interface (RS 232, Profibus, Ethernet/IP, Profinet, EtherCAT), USB+,  

15-pin digital I/O interface:  on request

1.5  Accessories

Part No.

Power supply

on request

Cable TURBOVAC supply 48 V DC (HARTING - bare wire ends)
1 m
3 m
5 m

800096V0101
800096V0301
800096V0501

Accessory cable TURBOVAC i, M8-M8, 2 m
Y cable TURBOVAC i, M8
Start stop switch for TMP
USB cable 2.0 Type A/B, 1.8 m 

800110V0016
800110V0020
800110V0021
800110V0108

Relay box for forevacuum pump, 1-phase, 10A 

incl. 2 m M8-M8 cable

800110V0030

LEYASSIST software for TMPs 

(included in the standard equipment for TURBOVAC iX)

230439V01

Air cooling TURBOVAC 850/950 i radial

800136V0011

Water cooling 

800135V0007

Venting valve, 24 V DC, G 1/8“
Power failure venting valve 24 V DC, G 1/8“
Purge gas valve, 24 V DC, G 1/8“, 24 sccm

800120V0012
800120V0022
800120V0013

Purge gas throttle 24 sccm

800120V0014

Air filter for TMP, G 1/8“

800110V0022

Air drier TURBOVAC

on request

Summary of Contents for 840071V1000

Page 1: ...Nos 840071V1000 V2000 840081V1000 V2000 840091V1000 V2000 840111V1000 V2000 TURBOVAC i TURBOVAC 850 i 950 i Turbomolecular Pumps with Integrated Frequency Converter Operating Instructions 300855170_00...

Page 2: ...drive electronics 11 1 3 2 Pumping speed curves 12 1 3 3 Operation diagrams 13 1 4 Ordering data 16 1 5 Accessories 16 2 Transport and storing 19 3 Installation 20 3 1 Conforming utilization 20 3 1 1...

Page 3: ...therCAT Interface offers information on the EtherCAT Interface These Operating Instructions are a translation of the German original instruc tions 300855170_001_C4 4 Operation 39 4 1 Media compatibili...

Page 4: ...t local state and national agencies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to our nearest office Trained personnel for the op...

Page 5: ...afety symbols on the products shows the areas where care and atten tion is necessary The safety symbols that follow are used on the product or in the product documentation General warning sign Warning...

Page 6: ...ach into the pump When installing the vacuum pump first mechanically connect the inlets and outlets and then make the electrical connections Disconnect the vacuum pump from the power supply before ser...

Page 7: ...hazards CAUTION BURNS Touching hot surfaces may lead to burns Handle the pump only when ventilated and cooled down Wear suitable protective equipment 0 4 Danger through materials and substances WARNIN...

Page 8: ...to pressure levels in the high vacuum and ultra high vacuum range They are suitable for pumping air and clean gases A forevacuum pump and a power supply are required for their operation Fig 1 1 TURBO...

Page 9: ...oling or an air cooling fan is available as optional equipment The intake flange should be fitted with a wire mesh inlet screen to protect the pump against mechanical damage caused by foreign objects...

Page 10: ...00 max Power consumption at ultimate pressure W 40 Type of protection IP 40 Ambient temperature during operation storage C 5 to 401 15 to 70 Cooling standard Convection1 Cooling optional Air or water1...

Page 11: ...tion G 1 8 Venting connection G 1 8 1 3 1 Technical data for the integrated drive electronics Supply voltage 48 V DC 5 10 Max current consumption 11 A default 13 A max at 48 V DC Max power consumption...

Page 12: ...n Argon TURBOVAC 850 i 10 5 10 4 10 3 10 2 10 1 1 l s mbar Fig 1 2 Pumping speed curves for the TURBOVAC 850 i 1 3 2 Pumping speed curves 0 100 200 300 400 500 600 700 800 900 1 000 Helium Nitrogen Ar...

Page 13: ...anent gas flows are not solely a TMP characteristic but are dependent from the installed backing pump too Gasdurchsatz in mbarl s Druck in mbar Saugleistung TURBOVAC 850i K hlwasser 15 C 100 l h K hlw...

Page 14: ...n 24 C ECODRY 65 plus TRIVAC D 65 B SCROLLVAC 7 plus DIVAC 3 8 HV3 10 6 10 4 102 10 2 1 10 10 10 8 10 6 10 4 10 10 2 1 10 8 Fig 1 5 Operation diagram for TURBOVAC 850 i Operation diagram for argon for...

Page 15: ...k hlung 40 C Konvektion 24 C ECODRY 65 plus TRIVAC D 65 B SCROLLVAC 7 plus DIVAC 3 8 HV3 10 6 10 4 102 10 2 1 10 10 10 8 10 6 10 4 10 10 2 1 10 8 Fig 1 6 Operation diagrams for TURBOVAC 950 i Operatio...

Page 16: ...C supply 48 V DC HARTING bare wire ends 1 m 3 m 5 m 800096V0101 800096V0301 800096V0501 Accessory cable TURBOVAC i M8 M8 2 m Y cable TURBOVAC i M8 Start stop switch for TMP USB cable 2 0 Type A B 1 8...

Page 17: ...SO K 0 8 mm Centering ring with coarse inlet screen DN 200 ISO K 3 2 mm Centering ring with splinter guardDN 200 ISO K 0 8 mm 800133V0031 800133V0032 800133V0041 800133V0042 Coarse inlet screen DN 160...

Page 18: ...7 54 108 150 109 4 5 4 5 136 26 X VENT G 1 8 PURGE G 1 8 SW 36 4x M8 14 M6 8 DN 25 KF 4x M5 8 X 116 54 DN a h 160 ISO K 180 255 160 CF 202 5 266 200 ISO K 240 250 5 200 CF 254 250 5 124 a 213 4 5 4 5...

Page 19: ...ossible conditions The pump is equipped with four M8 boreholes for eye bolts for transport Remove the pump from the packaging using the two eye bolts provided guiding it with one hand Transport the pu...

Page 20: ...suitably controlling the tempera ture of the pump Upon compression within the pump these vapours may condense or form deposits Pumping of dusts and solids without the use of suitable screens and filte...

Page 21: ...ce work by personnel not authorised by Leybold Any non conforming utilisation of pump frequency converter and accesso ries can result in severe injury or death and cause damage to components 3 2 Opera...

Page 22: ...d for example by solid objects from the process chamber entering the pump through the high vacuum flange the following torques need to be absorbed by the system TURBOVAC 850 950 i max 10 kNm NOTICE WA...

Page 23: ...the pump is bolted must have at operating tem perature a minimum strength specification of 150 N mm2 If several turbomolecular pumps are installed to the vacuum chamber of the same system there is th...

Page 24: ...s apply to lubricated threads Flange DN 160 ISO K DN 200 ISO K Number of bolts 8 x M10 12 x M10 Minimum bolt strength yield strength 600 N mm2 Minimum screw in depth L2 for steel for aluminium L3 13 m...

Page 25: ...e levels apply to lubricated threads Flange mounting for ISO K flanges When flanging on the high vacuum connecting flange place the O ring on the centering ring The O ring must remain in place smooth...

Page 26: ...x M8 Minimum bolt strength yield strength 450 N mm2 Recommended bolts ISO 4014 L1 M8x55 44 M8x60 49 Bolt quality stainless steel bolts 8 8 or A2 A4 70 Fastening torque 20 Nm 3 0 35 Nm 5 0 15 Nm 2 0 5...

Page 27: ...k of suffer ing burns up to approximately 65 C Protect the hot parts against being touched 3 5 Forevacuum connection Connect the clean forevacuum line with the small flange connectors and take care no...

Page 28: ...cooled pumps within a system ensure that sufficient quan tities of fresh air are freely available The air cooling facility is powered via the pump Use the 4 bolts which are included in the delivery to...

Page 29: ...the cooling water hoses The hose connections may be unscrewed and removed to make use of the integrated G 1 8 threads Adjust the cooling water temperature so that the formation of condensate is avoide...

Page 30: ...vity 700 S cm pH value 7 0 to 9 0 Total hardness total alkaline earths 8 dH Aggressive carbon dioxide None not detectable Chloride 100 mg l Sulphates 150 mg l Nitrate 50 mg l Iron 0 2 mg l Manganese 0...

Page 31: ...temperature at which condensation does not yet occur as a function of maximum room tempe rature and maximum relative humidity Example Max ambient temperature 25 C Min coolant inlet temperature 17 C M...

Page 32: ...t into the venting connection To protect the threads the max fastening torque is 5 Nm If applicable connect the venting gas supply at the valve s inlet G1 8 When using the pump with purge gas protect...

Page 33: ...he gasket from the purge gas connection of the TURBOVAC Screw in the purge gas valve and the gasket into the thread Connect the purge gas supply at the valve s inlet G1 8 Either connect the purge gas...

Page 34: ...ough the corresponding mains power cable to the power supply Information on baking out is also given in Section 4 6 3 10 Electrical connection Observe Safety Information 0 2 Unplug any connectors only...

Page 35: ...be 0 1 Earth ground connector M6 8 USB interface X106 RS 485 interface X104 48 V DC DC input Do not connect a power supply to this connection LEDs REMOTE interface X1 Accessory connection 24 V DC OUT...

Page 36: ...y voltage is present red LED ERROR off No error no warning flashes Warning is present pump can be operated possibly with some restrictions or run in procedure is running on Fault is present pump stopp...

Page 37: ...ffen STOP Fehlerreset Kontakt geschlossen START Frequenz wandler Frequenz wandler 1 6 12 13 Analog Ausgang Steuerung Frequenz wandler Start Stop input Pin 10 0 V no Standby operation 24 V Standby oper...

Page 38: ...ssive off off Just after start Start yes no no on passive passive flashes off Pump is accelerating Start yes yes no on active passive green off Pump is in the normal operating mode Stop no no yes off...

Page 39: ...should not exceed 10 ppm The gas must be clean In individual cases and after consultation also dry filtered oil free air or filte red ambient air may be used filter mesh 1 m Change the filters after...

Page 40: ...lems Reading of error memories P171 P174 and P176 error code speed operating hours for error Read out warning messages through P227 Slow pressure control by changing the pumping speed Dispensing with...

Page 41: ...e green LED flashes When the pump reaches normal operation the green LED lights up permanently Avoid the influences of shock and vibration when the pump is running Exposure of the pump to accelerating...

Page 42: ...matically shutting off the forevacuum line In forevacuum pumps without a vacuum retention valve close the valve in the forevacuum line When the system is not operating ensure that neither ambient air...

Page 43: ...ing the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Speed of the Pressure Rise All turbomolecular pumps may...

Page 44: ...onger storage period For pumps that have been stored for more than 12 months a ball bear ing run in procedure for smooth ball bearing running must be carried out when putting into operation again The...

Page 45: ...ss gases These gases may be toxic and hazardous to health In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids when they come into conta...

Page 46: ...lter will clog and will have to be ex changed our experience indicates that this will become necessary after 1 to 6 months When an adsorption trap is used regenerate or renew the adsorption agent regu...

Page 47: ...han 3 years the pump will indicate a bearing change is required before the pump is run Bearing on site maintenance The bearing of the TURBOVAC can be serviced on site by any service engi neer trained...

Page 48: ...face refer to Operating Instructions 300450826 Serial Interfaces for TURBOVAC i iX Bearing LED LED is not lit while pump is powered on No bearing conditioning required LED is flashing 0 25 s ON and 0...

Page 49: ...e cause Remedy Shut down Yellow power LED is not on No DC power DC power miswired Frequency converter defective Check cables and power supply Ensure correct polarity of the DC cable Have the pump repa...

Page 50: ...pressure which is too high Frequency parameters programmed wrongly Inspect the measurement sensor Clean or replace the sensors Check for leaks Clean the pump Check the ultimate pres sure of the foreva...

Page 51: ...laration WARNING China RoHS Material Content Declaration Part name Hazardous Substances Lead Pb Mercury Hg Cadmium Cd Hexavalent Chromium Cr VI Polybrominated biphenyls PBB Polybrominated diphenyl eth...

Page 52: ...1 2010 Third Edition CB Certificate No DE 2 027303 A1 CB Report No 60254147 002 UL 61010 1 2012 CSA C22 2 No 61010 1 12 cTUVus Certificate No CU72191742 01 cTUVus File No 31982384 001 The components a...

Page 53: ...53 300855170_002_C4 06 2020 Leybold EU Declaration of Conformity...

Page 54: ...LV_21647_2020 06 20 Leybold GmbH Bonner Strasse 498 50968 Cologne GERMANY T 49 0 221 347 0 info leybold com www leybold com...

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