Description
9
300855170_002_C4 - 06/2020 - © Leybold
1.1 Design
The TURBOVAC models are wide-range TMPs equipped with an additional
Holweck stage.
With the built-in frequency converter as the electronic drive the TURBOVAC
forms one single unit. The electonic drive governs the pump’s speed and
serves as a monitor for all functions of the pump.
At the high vacuum side the bearing is of a non-wearing permanent magnetic
bearing type, at the forevacuum side a lifetime lubricated oil-free ceramic ball
bearing is used.
Water cooling or an air cooling fan is available as optional equipment.
The intake flange should be fitted with a wire mesh inlet screen to protect the
pump against mechanical damage caused by foreign objects.
The pumps are equipped with a venting and a purge gas facility. The connec-
tions are blanked off by default with G1/8” closure screws.
Venting and purge gas valves, or a venting screw, or a pressure regulator can
be connected directly to the pump.
1.2 Standard equipment
Turbomolecular pump with integrated electronic drive unit, two eye-bolts
High and fore-vacuum flanges are protective-capped.
Flange mounting elements, the DC In plug and the inlet screen are not
enclosed, but are available as accessories, see Section 1.5.