Installation
22
300855170_002_C4 - 06/2020 - © Leybold
3.4 Attach the pump to the vacuum chamber
Never touch the rotor. Touching the rotor may cause injury and damage the
rotor bearing.
If the mounting is not sturdy enough, pump blockage could cause the
pump to break loose; internal pump components could be thrown in all
directions.
Mount the pump firmly to the vacuum chamber. Never operate the pump
without proper flanging to the vacuum chamber (in bench testing, for
example).
Do not operate the vacuum pump with open flanges. Do not reach into the
pump.
Remove the transport seal from the intake flange and remove the desiccant.
Pay attention to maximum cleanliness when connecting.
In the case of a sudden rotor vane rupture or rotor-stator contact which may
occur in practice (caused, for example, by solid objects from the process
chamber entering the pump through the high vacuum flange), the following
torques need to be absorbed by the system:
TURBOVAC 850/950 i
max. 10 kNm
NOTICE
WARNING
Torque when the
rotor seizes
Hochvakuumflansch
4x Bohrung für Kranöse
Belüftungs-Anschluss
G1/8"
RS-485-Schnittstelle X104
Vorvakuum-Anschluss
48 V DC Stromanschluss
USB-Schnittstelle X106
LEDs
REMOTE-Schnittstelle X1
Zubehöranschluss DC OUT
(M8) X201
Sperrgas-Anschluss
G1/8"
USB-Schnittstelle Service
Lageranzeige (zeigt an, wenn
Lagerwechsel empfohlen wird)
Fig. 3.1 Connections
High-vacuum flange
4x Boreholes for eye-bolts
Venting connection
G1/8“
RS 485 interface X104
Forevacuum connection
48 V DC Power supply cable
USB interface X106
LEDs
REMOTE interface X1
Accessory connection
DC OUT (M8) X201
Purge gas connection
G1/8“
USB interface Service
Bearing status indication (indi-
cates when bearing service is
recommended)
Do not
connect a
power supply to this
connection!