Installation
27
300855170_002_C4 - 06/2020 - © Leybold
Flange mounting for CF flanges
Before fitting, check to ensure that the sealing edge is undamaged. Do not
touch the copper gasket and the sealing edge with your bare hands.
The contact surfaces of pump housing, vacuum system and centering ring
must be free of grease and dry so as to ensure adequate strength in case
the rotor should seize.
Mount the turbomolecular pump according to Fig 3.4 and tighten the bolts
step-by-step.
When the pump shall be baked out, the threads of the bolts should have
been lubricated with a high temperature lubricant.
Required for the installation:
■
mounting kit (accessories)
■
coarse or fine inlet screens (accessories, optional)
During operation the pump can get so hot that there is the risk of suffer ing
burns (up to approximately 65 °C). Protect the hot parts against being
touched.
3.5 Forevacuum connection
Connect the clean forevacuum line with the small flange connectors and take
care not to constrict the forevacuum flange’s diameter.
Ensure that the pump is sufficiently isolated against vibrations generated by
the forevacuum pump.
No forces from the piping system may be allowed to affect the turbomolecu-
lar pump. Support the piping correspondingly or decouple through flexible
joints.
Do not use the pump with a backing pressure below 5 x 10
-4
mbar. Lower
backing pressures will increase the evaporation rate of the lubrication
reducing the bearing life.
The forevacuum line must be tight. Hazardous gases can escape at leaks
or the gases being pumped can react with air or humidity.
Observe Safety Information 0.4.
The forevacuum pump can be energised at the accessories connection of
the TURBOVAC i via the relay box.
NOTICE
CAUTION
NOTICE
WARNING