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Front Panel Operation

Model 6517A Getting Started Manual

Product overview

If you have any questions after reviewing this information, please contact your local
Keithley representative, or call one of our Applications Engineers at 1-800-348-3735 (U.S.
and Canada only). Worldwide phone numbers are listed in the front of this manual.

The Model 6517A is a 6

½

-digit electrometer/high resistance system with the following

measurement capabilities:

•

DC voltage measurements from 1µV to 210V

•

DC current measurements from 10aA to 21mA

•

Charge measurements from 10fC to 2.1µC

•

Resistance measurements from 10

Ω

to 210T

Ω

•

Surface resistivity measurements

•

Volume resistivity measurements

•

External temperature measurements from -25°C to 150°C using the supplied
Model 6517-TP thermocouple

•

Relative humidity measurements (0 to 100%) using the optional Model 6517-RH
probe

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Summary of Contents for 6517A

Page 1: ...Model 6517A Electrometer High Resistance Meter Getting Started Manual A G R E A T E R M E A S U R E O F C O N F I D E N C E...

Page 2: ...NDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAG...

Page 3: ...odel 6517A Electrometer High Resistance Meter Getting Started Manual 2000 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Second Printing June 2003 Document Number 6517A 903 01 Rev B...

Page 4: ...to the manual Addenda are numbered sequentially When a new Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each...

Page 5: ...cted to mains voltage or to voltage sources with high transient over voltages Measurement Category II connections require protection for high transient over voltages often as sociated with local AC ma...

Page 6: ...ages The symbol indicates a connection terminal to the equipment frame The WARNING heading in a manual explains dangers that might result in personal injury or death Always read the associated informa...

Page 7: ...rature and relative humidity measurements 1 22 Connections 1 22 Measurement control 1 23 Temperature units 1 23 Display reading options 1 24 2 Measurement Options Multiple displays 2 2 Menus 2 5 Navig...

Page 8: ...n 2 27 Close Open channels 2 28 External scanning 2 28 Trigger connections 2 28 Configure external channels 2 29 Perform the scan 2 30 3 Remote Operation Overview 3 2 Software support 3 2 TestPoint ap...

Page 9: ...en close channels and scan 3 14 Trigger model 3 15 Test sequences 3 16 Status register 3 17 Program examples 3 18 Changing function and range 3 18 One shot triggering 3 19 Continuous triggering 1 3 21...

Page 10: ...Table 2 1 Multiple displays by function 2 2 Table 2 2 Summary of main menu 2 5 Table 2 3 Configuration settings for instrument operations 2 6 Table 2 4 Configuration settings for each measurement fun...

Page 11: ...1 22 2 Measurement Options Figure 2 1 Independent V Source connections 2 8 Figure 2 2 FVMI connections 2 9 Figure 2 3 Basic trigger model simplified 2 12 Figure 2 4 Advanced trigger model simplified...

Page 12: ...1 FrontPanelOperation...

Page 13: ...manual The Model 6517A is a 6 digit electrometer high resistance system with the following measurement capabilities DC voltage measurements from 1 V to 210V DC current measurements from 10aA to 21mA...

Page 14: ...Built in test sequences Remote operation using the IEEE 488 GPIB bus or the RS 232 interface Model 617 emulation using the DDC device dependent command programming language mode Scan measure channels...

Page 15: ...y R or coulombs Q 3 RANGE KEYS Moves to higher range increments digit Moves to lower range decrements digit AUTO Enables disables autorange 4 HANDLE not shown Pull out and rotate to desired position 5...

Page 16: ...on STORE Enables data storage RECALL Displays reading data reading number time Use PREV NEXT DISPLAY for maxi mum minimum average standard deviation CONFIG Configures functions and operations MENU Sav...

Page 17: ...ation BNC CONNECTIONS HI LO Chassis 10 sec TTL HI TTL LO EXTERNAL TRIGGER INPUT Reading Complete METER COMPLETE OUTPUT 10 sec TTL HI TTL LO Input High Input Low Chassis Ground Unguarded Guard off Inpu...

Page 18: ...ures instrument for available line power voltage A 90 to 125V line voltage requires the 115V setting while a 180 to 250V line voltage requires the 230V setting 10 POWER LINE INPUT Connect to power lin...

Page 19: ...ormation Power up WARNING Before turning on the Model 6517A make sure it is connected to a grounded power receptacle using the supplied power cord or the equiv alent Failure to properly ground the uni...

Page 20: ...Select the RESET option and press ENTER to view the reset menu RESET ORIGINAL DFLTS BENCH GPIB 4 Select the BENCH option and press ENTER The following message is displayed RESETTING INSTRUMENT Enter t...

Page 21: ...age is displayed However if guard is already enabled Grd displayed then ZCor will not be displayed 4 Select a measurement range or use autoranging a To automatically select the most sensitive range en...

Page 22: ...ND WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL O 237 ALG 2 Cable INPUT 250V PEAK COMMON TRIGGER LINK IN OUT LINE R 90 13 180 25 50 60 55VA W A Unguarded GUARD off Red...

Page 23: ...n menu 2 Use the and keys to place the cursor blinking menu item on GUARD and press ENTER 3 Place the cursor on the desired selection OFF to disable or ON to enable and press ENTER 4 Use the EXIT key...

Page 24: ...Figure 1 4 Current measurements Red HI Black LO 6517A Shield Recommended below 1 A Is Measured Current Input low connected to shield CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE W...

Page 25: ...matically select the most sensitive range enable autorange The AUTO key enables and disables autorange When enabled the AUTO annunciator is on b For manual ranging use the RANGE and keys to select a m...

Page 26: ...ic connections Model 6517A Note Set fixture mode switch to picoammeter operation 7078 TRX 3 T riax Cable 8607 Banana Plug Cables 8002 ILC 3 Interlock Cable Warning Connect of fixture to safety earth g...

Page 27: ...s procedure assumes that steps 1 through 4 of the Resistance Measurement procedure have been performed 1 With the V Source in standby remove the DUT from the test fixture 2 Select the amps I function...

Page 28: ...ment See Voltage Source for details on using the V Source WARNING Selecting Auto V Source ohms may set the V Source to 400V 3 Select a measurement range or use autoranging a To automatically select th...

Page 29: ...for volume 2 Place the cursor on THICKNESS and press ENTER The present thick ness parameter for the sample will be displayed 3 Use the cursor keys and and the RANGE and keys to specify the thickness...

Page 30: ...NEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY Warning Connect of fixture to safety earth ground using safety ground wire 7078 TRX 3 T riax Cable 8607 Banan...

Page 31: ...ded press REL to zero the display 4 Connect the instrument to the charge to be measured as shown in Figure 1 7 CAUTION Do not apply more than 250V peak DC to 60Hz or instrument dam age may occur 5 Tak...

Page 32: ...scharge 1 Press the CONFIG and then Q to display the coulombs configuration menu 2 Use the and keys to place the cursor blinking menu item on AUTO DISCHARGE and press ENTER 3 Perform step a to enable...

Page 33: ...igure 1 8 NOTE It is recommended that the thermocouple junction of the Model 6517 TP be electrically insulated from ground and voltage potentials Erroneous reading will result if the thermocouple come...

Page 34: ...NGE and keys to toggle the control state With the desired states for temperature and humidity displayed ON or OFF press ENTER 6 Use the EXIT key to back out of the menu NOTE The TEMPERATURE option als...

Page 35: ...Using multiple displays temperature and humidity readings can accompany each normal A D measurement and they can be included as data storage elements for each reading stored in the buffer See Section...

Page 36: ...2 MeasurementOptions...

Page 37: ...he reading Multiple displays are summarized in this section All the multiple displays are shown in Table 2 1 The NEXT and PREV previous DISPLAY keys scroll through the multiple displays for the select...

Page 38: ...s with zero in the center Each full segment represents 10 of the limit 6517 ELECTROMETER HIGH RESISTANCE METER FILT 4W ARM Maximum and Minimum This display shows the maximum and minimum readings that...

Page 39: ...manual 6517 ELECTROMETER HIGH RESISTANCE METER FILT 4W ARM 6517 ELECTROMETER HIGH RESISTANCE METER FILT 4W ARM Change from cal temp With temperature readings enabled this display indicates the differ...

Page 40: ...2 Summary of main menu Option Description SAVESETUP Save and restore setups stored in memory set power on defaults and return unit to default conditions COMMUNICATION Select and configure interface GP...

Page 41: ...Resistance or resistivity Auto or manual Table 2 4 Configuration settings for instrument operations Option Description CONFIG REL CONFIG FILTER CONFIG MATH CONFIG TRIG CONFIG SEQ CONFIG STORE CONFIG...

Page 42: ...nly executed when the ENTER key is pressed Entering an invalid parameter generates an error and the entry is ignored Changes are also ignored if an EXIT is performed 8 The INFO key can be used anywher...

Page 43: ...ource is in operate VOLTAGE SOURCE OPERATE indicator on The OPER key toggles the V Source between standby and operate If used as an independent source voltage is available at the V SOURCE HI and LO te...

Page 44: ...d are used to adjust the voltage level Pressing any one of these four keys will enable the V Source edit mode The flashing digit on the V Source display indicates the cursor posi tion Use the cursor k...

Page 45: ...of the menu structure Relative Rel subtracts a reference value from actual readings When rel is enabled the instrument uses the present reading as a relative value Subsequent readings will be the diff...

Page 46: ...k together to cancel zero correct any internal offsets that might upset accuracy for voltage and current measurements Perform the following steps to zero correct the volts or amps function 1 Select th...

Page 47: ...pressing CONFIG and then TRIG There are two trigger modes for the Model 6517A basic and advanced These two trigger modes are summarized by the simplified trigger models shown in Figure 2 3 and Figure...

Page 48: ...ger model When the Model 6517A is taken out of idle by pressing TRIG or sending INIT or INIT CONT ON over the bus the ARM indicator turns on and operation proceeds in the trigger model Arm Layer Scan...

Page 49: ...t detection is not satisfied by any of the above control source events and operation is held up Not available for basic triggering If continuous basic triggering is being used then operation bypasses...

Page 50: ...ime 10 PLC provides the best common mode and normal mode rejection In between settings are a compromise between speed and noise Configuring speed Each measurement function can have a unique integratio...

Page 51: ...olution by placing the cursor using and keys on the menu option pressing ENTER See Menus if you need more information to navigate through the menu structure Filter Filtering stabilizes noisy measureme...

Page 52: ...an filter Median filtering uses the middle most reading from a group of sample readings arranged in ascending order For example assume the following readings 20V 1V 3V They are then arranged in ascend...

Page 53: ...prompts you to enter the number of readings to average stack size ADVANCED Selects the advanced filter and prompts you to enter the number of readings to average stack size After entering the stack si...

Page 54: ...store readings uses a typical data store configuration a user defined number of readings will be stored in the buffer fill and stop All aspects of data store configuration and operation are detailed...

Page 55: ...ath operations on single readings and display the result The six math calculations that are configured from the CONFIGURE MATH menu structure are Polynomial where X is the normal display reading a2 a1...

Page 56: ...on when the MATH key is pressed POLYNOMIAL Select the polynomial calculation and enter the constants a2 a1 and a0 PERCENT Select the percent calculation and enter the target value reference DEV Select...

Page 57: ...Display reading Math Enabled Display DEV reading Math Enabled Display DEV reading Math Enabled Display RATIO reading Math Enabled Display LOG10 reading Math is disabled by pressing MATH a second time...

Page 58: ...eter value use the cursor and RANGE keys and press ENTER DEV CHAR Use to select a device characterization test DIODE Diode leakage current test Specify start voltage stop voltage step voltage and dela...

Page 59: ...rt when lid of Model 8009 test fixture is closed GPIB Test will start when a bus trigger TRG or GET is received by the Model 6517A EXTERNAL Test will start when a trigger pulse via EXT TRIG IN connect...

Page 60: ...est is armed the TRIG key can be used to start the test regardless of which control source is selected 3 When the test is finished the SEQ display message is removed and the V Source goes into standby...

Page 61: ...scanner To select a menu item place the cursor using the and keys on it and press ENTER Parameter values are changed using the cursor keys and the RANGE keys If you need more information to navigate t...

Page 62: ...o provide a time interval between scans a Yes To use the timer select YES The present interval in seconds will be displayed If desired change the interval Press ENTER to continue b No If you do not wi...

Page 63: ...TER External scanning The Model 6517A can be used with a scanner card such as the Model 7158 Low Current Multiplexer Card installed in an external scanning mainframe Model 706 7001 or 7002 Switch Syst...

Page 64: ...N FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SER...

Page 65: ...2 a Place the cursor on PERFORM SCAN and press ENTER to display the scan types external or internal b Place the cursor on EXTERNAL and press ENTER 2 Switch System If not already done reset the Model 7...

Page 66: ...n count use the cursor keys and and RANGE keys and Press ENTER to continue 12 Model 6517A You will then be asked if you wish to use the scan timer The timer is used to provide a time interval between...

Page 67: ...3 RemoteOperation...

Page 68: ...o run time TestPoint applications on the supplied disk One of the applica tions utilizes an optional scanner card and the other is a complex interactive application Among the many operations the inter...

Page 69: ...S 232 standard For remote operation the Model 6517A can use the RS 232 serial port for communication between instrumentation and the controller computer All commands except DDCs can be used over this...

Page 70: ...own as the GPIB General Purpose Interface Bus Perform the following steps to select the IEEE 488 bus interface check and or change the primary address and check and or change the language mode 1 Press...

Page 71: ...keys on COMMUNICATION and press ENTER The interface options GPIB and RS 232 will then be displayed 3 Place the cursor on RS 232 and press ENTER to select the RS 232 interface NOTE If the GPIB interfac...

Page 72: ...EXIT b To change the number of stop bits place the cursor on the alternate selection and press ENTER 8 Use the EXIT key to back out of the menu structure Common commands Common commands are common to...

Page 73: ...ther commands An INITiate command is not considered finished until instrument operation returns to the idle state SCPI commands In the Model 6517A you are given access to control settings that are hid...

Page 74: ...ot show complete command names A complete command is formed by joining the compo nents For example the complete STATe command in the example is SENSe1 VOLTage DC REFerence STATe Note that square brack...

Page 75: ...of the control point The query is simply the command name with a attached Some commands are actions rather than control point settings These commands have no query form For example SENSe1 VOLTage DC R...

Page 76: ...lt dc rang 20 volt dc ref 5 volt dc ref stat on The two command strings are treated identically by the Model 6517A In the first string when the instrument encounters ref 5 it notices the following It...

Page 77: ...ystem PREset Set the 6517A to the system present defaults Some of the selected defaults include volts continuous triggers normal speed 1 0 PLC and auto range POSetup name Select power on setups RST PR...

Page 78: ...able or disable reference rel ACQuire Use input signal as reference rel DIGits n Specify measurement resolution AUTO b Enable or disable auto resolution AVERage Path to control digital filter TYPE nam...

Page 79: ...rence b Enable or disable amps reference DAMPing b Enable or disable damping VSControl name Select ohms V Source mode MANual or AUTO MSELect name Select ohms type NORMal or RESistivity RESistivity Pat...

Page 80: ...TRACe TRACe Subsystem ELEMents name Select reading elements TSTamp HUMidity CHANnel ETEMperature VSOurce NONE POINts n Specify buffer size FEED Path to control buffer CONTrol name Select control mode...

Page 81: ...ontinuous initiation ABORt Reset trigger system Instrument stays in idle if con tinuous initiation is disabled off TRIGger Path to configure the advanced trigger layer SOURce name Select control sourc...

Page 82: ...ce test path SVOLtage NRf Specify bias voltage 1000 to 1000 STIME NRf Specify bias time 0 to 99999 9 sec RVCoefficient Resistor voltage coefficient test path SVOLtage 1 NRf Specify source voltage 1 10...

Page 83: ...s events that occur Many programming decisions can be made by monitoring the Measure ment Event Register and the Operation Event Register See the User s Manual for details of the status registers STAT...

Page 84: ...the parameter to the range command In our older instruments a single number was used to denote each range The parameter of the SCPI RANGe com mand is given as the maximum value to measure The instrum...

Page 85: ...take reading CALL SEND 27 func volt dc read status reading SPACE 80 CALL ENTER reading length 27 status PRINT reading Switch to current and take reading CALL SEND 27 func curr dc read status reading S...

Page 86: ...ram to demonstrate one shot external triggering For QuickBASIC 4 5 and KPC 488 2 CEC interface card Edit the following line to where the QuickBASIC libraries are on your computer INCLUDE c qb45 ieeeqb...

Page 87: ...eeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status RST sets T...

Page 88: ...itialize 21 0 Reset controls in INIT ARM LAY1 ARM LAY2 and TRIG subsystems and put trigger model in IDLE state CALL SEND 27 rst status RST sets TRIG SOUR to IMM CALL SEND 27 arm lay2 sour ext status C...

Page 89: ...ing buffer initiates readings and waits for the Model 6517A to indicate that the buffer is full This is not a complete program Not shown are the commands to configure the trigger model and the reading...

Page 90: ...ents name Specify additional reading elements TSTamp HUMidity CHANnel ETEMperature VSOurce or NONE Select buffer control mode TRACe FEED CONTrol NEVer immediately stop storing readings TRACe FEED CONT...

Page 91: ...27 rst status Reset STATus subsystem not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SEND 27 sre 1 status enable MSB CALL SEND 27 trig coun...

Page 92: ...rd Edit the following line to where the QuickBASIC libraries are on your computer INCLUDE c qb45 ieeeqb bi Initialize the interface as address 21 CALL initialize 21 0 Reset controls in INIT ARM LAY1 A...

Page 93: ...not affected by RST CALL SEND 27 stat pres cls status CALL SEND 27 stat meas enab 512 status enable BFL CALL SEND 27 sre 1 status enable MSB RST sets TRIG SOUR to IMM CALL SEND 27 trig coun 3 status C...

Page 94: ...7 CLS status CALL spoll 27 KIspoll status Configure status model to SRQ on Buffer Full CALL send 27 stat meas enab 512 status CALL SEND 27 sre 1 status Select autoranging amps CALL send 27 SENS FUNC C...

Page 95: ...aitSRQ IF NOT srq THEN GOTO WaitSRQ CALL spoll 27 poll status If poll AND 64 0 THEN GOTO WaitSRQ Dump buffer readings to computer CRT CALL send 27 TRACE DATA status CALL enter DATA1 length 27 status A...

Page 96: ...4 SpecsandAccessories...

Page 97: ...100 fA 0 2 5 0 03 1 200 nA 1 pA 0 2 5 0 03 1 2 A 10 pA 0 1 10 0 005 2 20 A 100 pA 0 1 5 0 005 1 200 A 1 nA 0 1 5 0 005 1 2 mA 10 nA 0 1 10 0 008 2 20 mA 100 nA 0 1 5 0 008 1 Note 1When properly zeroed...

Page 98: ...for auto V source ohms when properly zeroed 5 digit 1 PLC median filter on digital filter 10 readings If user selectable voltage is required use manual mode Manual mode displays resistance up to 1018...

Page 99: ...1Humidityprobeaccuracymustbeadded Thisis 3 RH forModel6517 RH upto65 Cprobeenvironment nottoexceed85 C IEEE 488 BUS IMPLEMENTATION MULTILINE COMMANDS DCL LLO SDC GET GTL UNT UNL SPE SPD IMPLEMENTATIO...

Page 100: ...23 EEC TEST SEQUENCES Alternating Polarity Hi R Device Characterization Diode Capacitor Cable Resistor Resistivity Surface Insulation Resistance and Sweep READING STORAGE 100 readings DDC mode 15706 m...

Page 101: ...des 3 9 Defaults 3 11 Demonstration Startup programs 3 2 Device action 2 14 Display 1 8 Display reading options 1 24 E Enabling math 2 22 External scanning 2 28 External temperature and relative humid...

Page 102: ...and configuring a test sequence 2 23 Selecting and configuring math 2 21 Software support 3 2 Specs and Accessories 4 1 Speed 2 15 Status register 3 17 Storing readings 2 19 Storing readings in buffe...

Page 103: ...to zero Unstable Overload Will not read applied input Calibration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measure...

Page 104: ...60 11 77 26 GERMANY Landsberger Strasse 65 82110 Germering 089 84 93 07 40 Fax 089 84 93 07 34 GREAT BRITAIN Unit 2 Commerce Park Brunel Road Theale Berkshire RG7 4AB 0118 929 75 00 Fax 0118 929 75 1...

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