Keithley 6517A, Getting Started Manual

Page: 97 / 104

VOLTS
ACCURACY TEMPERATURE
(1 Year)
1
COEFFICIENT
5
½
DIGIT 18
°
–28
°
C 0
°
–18
°
C & 28
°
–50
°
C
RANGE RESOLUTION
±
(%rdg+counts)
±
(%rdg+counts)/
°
C
2 V 10
µ
V 0.025 + 4 0.003 + 2
20 V 100
µ
V 0.025 + 3 0.002 + 1
200 V 1 mV 0.06 + 3 0.002 + 1
Note:
1 When properly zeroed, 5
½
digit, 1 PLC (power line cycle), median
filter on, digital filter = 10 readings.
NMRR: 60dB on 2V, 20V, >55dB on 200V, at 50Hz or 60Hz
±
0.1%.
CMRR: >120dB at DC, 50Hz or 60Hz.
INPUT IMPEDANCE: >200T
Ω
in parallel with 20pF, < 2pF guarded (10M
Ω
with zero check on).
SMALL SIGNAL BANDWIDTH AT PREAMP OUTPUT: Typically 100kHz (–3dB).
AMPS
AMPS
ACCURACY TEMPERATURE
(1 Year) 1 COEFFICIENT
5
½
DIGIT 18
°
–28
°
C 0
°
–18
°
C & 28
°
–50
°
C
RANGE RESOLUTION
±
(%rdg+counts)
±
(%rdg+counts)/
°
C
20 pA 100 aA 2 1 + 30 0.1 + 5
200 pA 1 fA 2 1 + 5 0.1 + 1
2 nA 10 fA 0.2 + 30 0.1 + 2
20 nA 100 fA 0.2 + 5 0.03 + 1
200 nA 1 pA 0.2 + 5 0.03 + 1
2
µ
A 10 pA 0.1 + 10 0.005 + 2
20
µ
A 100 pA 0.1 + 5 0.005 + 1
200
µ
A 1 nA 0.1 + 5 0.005 + 1
2 mA 10 nA 0.1 + 10 0.008 + 2
20 mA 100 nA 0.1 + 5 0.008 + 1
Note:
1 When properly zeroed, 5
½
digit, 1 PLC (power line cycle), median
filter on, digital filter = 10 readings.
2
aA =10
–18
A, fA=10
–15
A.
INPUT BIAS CURRENT: <3fA at T
CAL
. Temperature coefficient = 0.5fA/
°
C.
INPUT BIAS CURRENT NOISE: <750aA p-p (capped input), 0.1Hz to 10Hz bandwidth, damping on. Digital filter = 40
readings.
INPUT VOLTAGE BURDEN at T
CAL
±
1
°
C:
<20
µ
V on 20pA, 2nA, 20nA, 2
µ
A, 20
µ
A ranges.
<100
µ
V on 200pA, 200nA, 200
µ
A ranges.
<2mV on 2mA range.
<4mV on 20mA range.
TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN: <10
µ
V/
°
C on pA, nA,
µ
A ranges.
PREAMP SETTLING TIME (to 10% of final value): 2.5s typical on pA ranges, damping off, 4s typical on pA ranges damping
on, 15ms on nA ranges, 2ms on
µ
A and mA ranges.
NMRR: >95dB on pA, 60dB on nA,
µ
A, and mA ranges at 50Hz or 60Hz
±
0.1%.
4-2 Specifications
VOLTS