Inficon XL3000flex Translation Of The Original Operating Instructions Download Page 75

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INFICON

Operation | 6

XL3000flex-Operating-instructions-jina83en1-07-(2105)

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• Calibration, calibration history

• TMP error, TMP history

• Warnings, active warnings

• Maintenance, maintenance history

Control unit

• Version control unit: Information on the software version

• Memory: Information on available memory

• Settings: Control unit settings.

• Serial port wired: Information on the communication connection

• Data exchange: Information on the data exchange between mass spectrometer

module and the control unit

Mass spectrometer

module

• MSB (1): Information on the software version

• MSB (2): Information on operating parameters

• TMP controller (1): Information on the turbo molecular pump

• TMP controller (2): Information on the turbo molecular pump, continued

• Ion source: Information on the ion source used

• Preamplifier: Information on the preamplifier

• Preamplifier test: Information on the preamplifier test.

Interfaces

• I/O module (1): Information on the software version, inputs and outputs

• I/O module (2): Visualized information to the digital inputs

Summary of Contents for XL3000flex

Page 1: ...Translation of the original operating instructions XL3000flex XL3000flexRC Leak Detector jina83en1 07 2105 Catalog No 520 200 520 201 From software version V2 85 Operating unit ...

Page 2: ...INFICON GmbH Bonner Strasse 498 50968 Cologne Germany ...

Page 3: ...ice setup 14 4 4 Sniffer line SL3000XL 18 4 4 1 Device overview 18 4 4 2 Operating elements on the handle 19 4 5 Touchscreen elements 20 4 6 Elements of the error and warning display 23 4 7 Technical data 23 4 8 Factory settings 25 5 Installation 28 5 1 Setup 28 5 2 Connecting the sniffer line 30 5 3 Mounting the I O module or bus module optional 30 5 4 Fasten holder for sniffer line optional 31 5...

Page 4: ...g the display brightness 44 6 2 17 Show setpoint 44 6 2 18 Assigning favorite buttons 44 6 2 19 Selecting the type of expansion module 45 6 2 20 General interface settings I O module 45 6 2 21 Assigning analog outputs of the I O module 46 6 2 22 Assigning the digital inputs of the I O module 49 6 2 23 Assigning the digital outputs of the I O module 51 6 2 24 Settings for bus module BM1000 53 6 2 2...

Page 5: ... deleting measurement data 72 6 8 Updating the software 72 6 8 1 Updating the software of the control unit 72 6 8 2 Updating the software of the I O module 73 6 9 Calling up information 74 6 10 Display save load parameters 77 6 11 Resetting the settings 78 7 Warning and error messages 79 8 Cleaning and maintenance 87 8 1 Cleaning the housing 87 8 2 Maintenance of the XL3000flex 87 8 2 1 Change the...

Page 6: ...0 jiqc10 1 2 Warnings DANGER Imminent hazard resulting in death or serious injuries WARNING Hazardous situation resulting in potential death or serious injuries CAUTION Hazardous situation resulting in minor injuries NOTICE Hazardous situation resulting in damage to property or the environment 1 3 Target groups These operating instructions are intended for the owner and for technically qualified p...

Page 7: ...cessories or spare parts which are not included in this instruction manual Test of wet or damp test objects Sniffing of explosive aggressive corrosive flammable toxic or reactive substances Sniffing of condensable fluids and vapors Sniffing of gases contaminated with particles Using the sniffer line handle over a long period of time leading to fatigue Sniffing of gases above the lower explosion li...

Page 8: ...the information in this manual and in the work instructions provided by the owner This concerns in particular the safety and warning instructions Always observe the complete operating instructions for all work If you have any questions about operation or maintenance that are not answered in this manual contact customer service ...

Page 9: ...ettings on the device The handling of the sniffer line can also be done by laymen according to instructions 2 4 Dangers The measuring instrument was built according to the state of the art and the recognized safety regulations Nevertheless improper use may result in risk to life and limb on the part of the user or third parties or damage to the unit or other property may occur Hazards due to liqui...

Page 10: ...ions jina83en1 07 2105 The device contains electric components that can be damaged from high electric voltage Before connecting the device to the power supply make sure that the supply voltage specified on the device is the same as the local power supply ...

Page 11: ...ndard scope of delivery without data cable and CU1000 control unit Both are required for the described function See also Accessories 101 Check the delivery contents after receiving the product to ensure it is complete Necessary accessories for operation For operating the XL3000flex you need a sniffer line SL3000XL It is available in various lengths SL3000XL XL length 3 m order number 521 011 SL300...

Page 12: ...ce is designed for leak detection with the SL3000XL sniffer line which is available in different lengths With this sniffer line you can detect leaks at a greater distance high Flow from the suspected leak if the detection limit has deteriorated and switch to low flow for more accurate localization Digital data can be exchanged via the optionally available I O module IO1000 or bus module BM1000 ...

Page 13: ...the connection provided on the front of the device see Device setup 14 Sniffer line SL3000XL SL3000XL Detection limit 2 x 10 7 mbar l s Gas flow low flow high flow 300 sccm 3000 sccm Available lengths 3 5 10 15 m Cable sleeve Plastic Good Bad DIsplay YES ZERO via button YES Connection on the device via a separate sleeve on the front of the device Display with measurement view YES Acknowledge fault...

Page 14: ... line SL3000XL 5 Status LED of the operating unit Shines Control unit operates normally Flashes Display in power saving mode 2 Touchscreen 6 Connection for USB stick 3 Area for fixing a holder for the sniffer line 7 Reset button can be triggered by key PIN 4 Speaker 8 Status LED A permanently lit status LED shows that the sniffer line is supplied with voltage ...

Page 15: ...onnection for sniffer line SL3000XL 4 Status LED A permanently lit status LED shows that the sniffer line is supplied with voltage 2 Interface for a data cable for connection to an external control unit CU1000 See also XL3000flexRC only Assemble data cable and CU1000 32 3 Area for fixing a holder for the sniffer line ...

Page 16: ...er cable connection 2 Filter ventilator inlet 6 Mounting screws for a profile rail for mounting the I O module IO1000 or the bus module optional 3 Device power ON OFF switch 7 Connection TL for connection cable to calibration adapter for calibration leaks 4 Electrical fuse 8 Connection LD for the data cable of the I O module or bus module ...

Page 17: ...cription 4 XL3000flex Operating instructions jina83en1 07 2105 17 108 View from below 1 2 1 filter fan outputs 2 Rubber feet 4 pieces Side handles for transportation 1 1 1 Transport handles Do not open the device ...

Page 18: ...iffer line on the front 2 The status LED indicates the operating status A permanently lit status LED shows that the sniffer line is supplied with voltage Necessary accessories for operation For operating the XL300flex you need the sniffer line SL3000XL It is available in different lengths see Scope of delivery and additional equipment See also 2 Connecting the sniffer line 30 ...

Page 19: ...3000flex is operated in the high flow operation mode then the gas type display has a dark background Warning or error messages are shown on the display The message is confirmed with the right button The right button can otherwise be used to switch between low flow and high flow The left button can be used for a ZERO adjustment The background display is set toZERO by pressing the key The sniffer pr...

Page 20: ...acer gas 7 Operation mode 8 Leak rate with peak hold function 9 Graphic representation of the leak rate and the peak hold function 10 Time axis 11 Button Favorite 2 12 Button Favorite 1 13 Menu 14 Value axis 15 Value axis 1 Keyboard lock The control unit is locked or unlocked by pressing and holding the icon for the keyboard lock 2 Icon for the communication status Icon connected The device commun...

Page 21: ...pe Operator Sup Supervisor Int Integrator Ser Service 4 ZERO Background suppression is active 5 Caution icon Active warnings are stored in the unit The active warnings can be displayed via the menu Info History Warnings 6 Tracer gas Set tracer gas and tracer gas concentration percentage Display Meaning He Helium 4 He H2 Hydrogen M3 E g H D 3 He or H3 7 Operation mode Configured operation mode Disp...

Page 22: ...n assign preferred parameters to this key 12 Button Favorite 1 You can assign preferred parameters to this key 13 Icon for the menu All functions and parameters of the control unit can be accessed using the Menu key A full representation of the menu is included on the supplied USB stick 14 Value axis Value axis of the leak rate Q t 15 Device of measurement Device of measurement of the value axis ...

Page 23: ...rs or warnings if present WARNING Number 500 Pressure sensor not connected Value 4 23E 2 Further errors or warnings To confirm all messages Information to cause or remedy to the message shown above 501 502 4 7 Technical data Mechanical data XL3000flex Dimensions L W H 544 x 404 x 358 mm Weight 37 5 kg XL3000flexRC Dimensions L W H 544 x 404 x 358 mm Weight 36 5 kg Electrical data XL3000flex XL3000...

Page 24: ...0 sccm 300 sccm Minimum detectable leak rate MDLR Helium High flow Low flow Forming gas 95 5 High flow Low flow 2 x 10 6 mbar l s 2 x 10 7 mbar l s 2 x 10 6 mbar l s 2 x 10 7 mbar l s Response time High flow Low flow 1 s 1 s The A weighted emission sound pressure level at the operator s location is less than 70 dB A for all foreseeable uses of the device The noise emission measurement declaration ...

Page 25: ...mit exp 1 x 10 5 Equivalent factor mass 2 H2 1 0 Equivalent factor mass 3 1 0 Equivalent factor mass 4 He 1 0 Molar mass of the equivalence gas test gas mass 2 H2 2 0 Molar mass of the equivalence gas test gas mass 3 3 0 Molar mass of the equivalence gas test gas mass 4 He 4 0 Operation mode XL Sniffer Adapter Bus module address 126 Pressure capillary blocked Low Flow 0 2 mbar Pressure capillary b...

Page 26: ...of digital outputs Pin 1 Trigger 1 inverted Pin 2 Trigger 2 inverted Pin 3 Trigger 3 inverted Pin 4 Trigger 4 inverted Pin 5 Ready Pin 6 Error inverted Pin 7 CAL request inverted Pin 8 Open inverted Configuration of digital Inputs Pin 1 Select dyn normal CAL Pin 2 Sniff Pin 3 Start Stop inverted Pin 4 ZERO Pin 5 External CAL Pin 6 Internal CAL Pin 7 Clear Pin 8 ZERO update Pin 9 Pin 10 Leak rate u...

Page 27: ...nal VAC 9 9 x 10 2 calibration leak internal 9 9 x 10 2 Open calibration leak internal Off Sniffer line detection On Sniffer LED Alarm Configured Flashing Sniffer light brightness 5 Sniffer beep Trigger Sniffer button Flow On Sniffer key ZERO On Language English Muting the beep Off TMP rotation speed 1000 Trigger level 1 2 3 4 2 x 10 4 mbar l s 1 x 10 5 mbar l s Preamplifier test at CAL On Mainten...

Page 28: ...d The device must not be lifted and transported with just one handle CAUTION Risk of injury due to improper installation If the device is not placed on a flat non slip surface it may fall and cause personal injury or property damage Place the device on a level slip proof work area NOTICE Material damage from overheated device The device heats up during operation and can overheat without sufficient...

Page 29: ...ther liquid on the device Prevent the device from coming into contact with bases acids and solvents WARNING Danger from electric shock Improperly grounded or fused products may be dangerous to life in case of a fault The use of the device is not permitted without a connected protective conductor Only use the included 3 wire power cable Make sure that the power supply plug is always accessible NOTI...

Page 30: ... Connection for sniffer line 1 Align the red marking on the sniffer line plug with the red marking on the socket of the device 2 Push the sniffer line plug into the socket on the device until it locks into place The plug may no longer be easy to move 5 3 Mounting the I O module or bus module optional Both modules are interfaces for controlling the leak detector XL3000flex ...

Page 31: ... via a data cable to the LD socket on the back of the XL3000flex See also 2 Selecting the type of expansion module 45 2 Assigning analog outputs of the I O module 46 2 Settings for bus module BM1000 53 5 4 Fasten holder for sniffer line optional WARNING Danger to pacemaker wearers from magnets The function of a pacemaker can be influenced by the magnet on the back of the holder If you wear a pacem...

Page 32: ...he slots on the front of the device 2 Press the holder against the front panel of the device ð The holder is pulled to the front panel of the device with a magnet on its rear 3 When not in use fix the sniffer line in the holder so that it points away from the operator 5 5 XL3000flexRC only Assemble data cable and CU1000 ...

Page 33: ...ia a data cable Use the interface on the front of the device for this purpose Accessories required The XL3000flexRC is delivered in the standard scope of delivery without data cable and CU1000 control unit Both are required for the described function See also Accessories 101 and the operating instructions for the CU1000 control unit ...

Page 34: ...d preconfigured so that basic settings have already been made To check or change settings first take a look at the factory defaults See factory settings of the XL3000flex Factory settings 25 6 2 1 Setting the language Select the display language The factory setting is English The display on the handle of the SL3000XL sniffer line shows messages in English instead of in Russian and Chinese German E...

Page 35: ... ASCII protocol HOUR TIME 6 2 3 Selecting a unit for the leak rate Leak rate unit display Selecting the leak rate unit in the display for sniffing 0 mbar l s factory setting 1 Pa m 3 s 2 atm cc s 3 Torr l s 4 ppm 5 g a 6 oz yr 7 sccm 8 sft 3 yr Control unit Main Menu Display Units Display Leak Rate Unit SNIF LD protocol Command 396 sniffing ASCII protocol Command CONFig UNIT SNDisplay Leak rate un...

Page 36: ...n menu Display Units display Pressure unit 6 2 5 Select interface unit for pressure Pressure unit interface Selecting the pressure device of the interfaces 0 mbar factory setting 1 Pa 2 atm 3 Torr Control unit Main Menu Settings Setup Interfaces Units Interface Pressure Unit LD protocol Command 430 sniffing ASCII protocol Command CONFig UNIT Pressure 6 2 6 Settings for the XL sniffer adapter For o...

Page 37: ...eded Switched on Search Function and operation in High Flow Alarm when Trigger 2 is exceeded 0 Off 1 On Control unit Setting Trigger Search LD protocol Command 380 ASCII protocol Command CONFig SEARch In the SL3000XL the following are dependent on the trigger used the leak rate bar changing the background lighting the beeper and changing the sniffer tip lighting Sniffer LEDs Brightness Set the bri...

Page 38: ... can also set the gas percentage for other gases M3 He 0 100 Control unit Settings Set up Operation modes Sniff Gas percentage Mass2 Gas percentage H2 LD protocol Command 416 ASCII protocol Command CONFig PERcent Auto standby interval Defines the duration in minutes until standby is activated If the device operates in high flow the filters of the sniffer line will foul up more quickly Auto standby...

Page 39: ...an also be made with the right sniffer key or assigned to one of the favorite keys of the control unit Small low flow Large high flow Control unit Settings Configuration Operating Mode Flow Flow Control or Functions Flow Flow Control LD protocol Command 229 ASCII protocol Command CONFig Highflow 6 2 7 Operator types and authorizations There are four different operator types that are distinguished ...

Page 40: ... Operator Supervisor Integrator Changing parameters x x x Changing the display of error information x x x Calling up factory settings x Entering maintenance history x The menu Service is accessible only to INFICON service staff Display error information The type of error information can be set differently for each operator type The Integrator always receives the complete information Number Message...

Page 41: ...of the acoustic signal changes its frequency within a specific range of leak rates Range A decade below the selected trigger threshold up to one decade above The sound keeps at a constant low and a constant high frequency below and above this range respectively Trigger If the selected trigger threshold is exceeded a two pitch signal sounds Control unit Main menu Settings Set up Control unit Audio ...

Page 42: ... the values the older version of the software run by mass spectrometer module LDS3000 does not support this parameter Scaling of the Q t axis Linear or logarithmic Lin Log Control unit Main menu Display Q t axis Linear or logarithmic Number of decades with logarithmic view 1 2 3 4 Control unit Main menu Display Q t axis Decades Autoscale Off On Control unit Main menu Display Q t axis Automatic sca...

Page 43: ...ing Calibration Instructions Suppress or allow the calibration note with the following content Leak rate of the applied calibration leak No calibration should take place during the first 20 mins OFF suppressed ON allowed Control unit Main menu Settings Set up Control unit Messages Displaying Calibration Instructions 6 2 13 Show calibration request The calibration request can be allowed or suppress...

Page 44: ...never Control unit Main menu Settings Set up Control unit Energy Display off after 6 2 16 Changing the display brightness Display brightness 20 100 Control unit Main menu Display Brightness Display brightness 6 2 17 Show setpoint Selection of the trigger leak rate threshold displayed on the touchscreen 1 2 3 4 Control unit Main menu Settings Trigger Trigger sel 6 2 18 Assigning favorite buttons Th...

Page 45: ...pansion module Selecting the type of module connected to the I O connection I O module Bus module Control unit Main Menu Settings Setup Interfaces Device select Module on I O connection or Main Menu Settings Setup Accessories Device select Module on I O connection LD protocol ASCII protocol 6 2 20 General interface settings I O module Setting the interface protocol Setting the protocol for the mod...

Page 46: ...an be defined for the output voltages SNIF Min 1 x 10 9 1 x 10 1 mbar l s Max 1 x 10 8 1 x 10 1 mbar l s Control unit Main Menu Settings Set up Interfaces LR limits LD protocol Command 227 Snif ASCII protocol Command CONFig LIMITS SNIF Functions assignment of analog outputs Off The analog outputs are switched off Output voltage 0 V Pressure p1 Pressure p2 1 10 V 0 5 V decade 1 V 1 x 10 3 mbar Leak...

Page 47: ...n be set This results in the minimum displayable value The following slopes are available 0 5 1 2 2 5 3 5 10 V The higher the selected slope value the smaller the displayable area The logarithmic settings are the most useful when several decades can be displayed so a setting of 10 V decade The upper limit is the same for both analog outputs In both of the following figures the 1 V decade and 5 V d...

Page 48: ...6 Operation INFICON 48 108 XL3000flex Operating instructions jina83en1 07 2105 ...

Page 49: ...ts can be connected via three PLC inputs The key switch can be used to select the access level of the operator of the control unit Button 1 Operator Button 2 Supervisor Button 3 Integrator Example for a suitable key switch Hopt Schuler No 444 05 Functions assignment of digital inputs Function Flank state Description No function No function CAL dynam inactive active active inactive Start external d...

Page 50: ...allowing for the measuring times and pump cycle times set via the digital inputs External normal calibration with auto tune not considering the system specific measuring times and pump cycle times Start Stop inactive active active inactive Switch to Meas ZERO is possible all trigger outputs switch depending on the leak rate Switch to Standby ZERO is not possible all trigger outputs will return Fai...

Page 51: ... active Determining the machine factor or of the sniff factor External CAL check inactive active Check calibration with external calibration leak Start Stop impulse inactive active Switching between measuring operation and standby Mass 2 Mass 4 inactive active active inactive Activate mass 4 Activate mass 2 Photo interrupter inactive active active inactive Sniffer tip at calibration leak calibrati...

Page 52: ...leak rate threshold Trigger 4 Value fell below leak rate threshold Trigger 4 Ready closed open Emission switched on calibration process inactive no error Emission switched off or calibration process active or error Warning closed open Warning no warning Error closed open Error no error CAL active closed open Device is to be calibrated Device is not to be calibrated CAL request closed closed open a...

Page 53: ...r or warning No error or warning Gas ballast closed open Gas ballast is active Gas ballast is inactive Calibration leak open closed open calibration leak is active calibration leak is inactive CAL stable closed open Calibration completed with calibration leak see Time and general preferences 60 Assignment not stable or calibration is inactive Cathode 2 closed open Cathode 2 is active Cathode 1 is ...

Page 54: ...ons jina83en1 07 2105 Select operation mode 0 1 2 Not applicable for XL3000flex Not applicable for XL3000flex Operation mode XL sniffer adapter Control unit Sniffer mode Main Menu Functions Start Stop LD protocol Command 401 ASCII protocol Command CONFig MODE ...

Page 55: ...nit Main menu Settings Mass LD protocol Command 506 with value 2 3 4 ASCII protocol Command CONFig MASS 2 3 4 6 3 2 Display equivalence leak rate for other gas If you measure with the test gases helium or hydrogen but want to display another gas with its leak rate use a correction factor for the test gas used 1 2 Fig 3 Measurement screen with displayed equivalence leak rate and configured favorite...

Page 56: ...p left in the measuring window You can perform measurement ð If the desired gas equivalent is not stored it must be configured see Configure gas list 56 ð If you do not find a suitable entry in the 4 gas equivalents and also do not want to change these you can calculate the correction factor as an alternative In the window Gas equivalent selection select the entry User defined and configure the co...

Page 57: ...equivalence gas ð Corresponds to the absolute pressure of the equivalence gas in the test object in bar 5 Window Measuring mass ð This is the mass of the tracer gas helium mass 3 or hydrogen 6 Window Percentage of measuring gas ð This is the gas proportion of the tracer gas in percent e g for forming gas 95 5 it would be 5 7 Window Absolute pressure measuring gas ð Corresponds to the absolute pres...

Page 58: ...ollowing equivalence factor must be entered 6 3 2 4 Set equivalence factor and molar mass ü The equivalence factor is known See also Calculate equivalence factor 57 ü The test gas used is specified hydrogen or helium mass 2 3 or 4 ü The molar mass of the equivalence gas you want to display is known 1 Control unit Settings Set up Operation modes Equivalence rate 2 Gas factor button ð LD protocol Co...

Page 59: ...Mass 102 and Equivalence Factor 127 6 3 3 Setting setpoints You can set the leak rate for the setpoint to 1 2 3 and 4 separately When the setpoints are exceeded If the setpoint 1 or 2 is exceeded the measurement line in the measurement window changes color The setpoint relay of the digital output switches see also Assigning the digital outputs of the I O module 51 or the interface description Also...

Page 60: ...ating Calibration is also required after the following actions Sniffer line replacement Filter change of the sniffer line Prompt for calibration by the system Switching off the preamplifier test The device tests the installed preamplifier during calibration You can switch off of the amplifier test This increases the speed of the calibration but reliability drops off 0 OFF 1 ON Control unit Main Me...

Page 61: ...ocol Command 429 ASCII protocol CONFig CALWarn ON OFF 6 3 4 2 External Calibration Configuration and Start Prerequisite for the calibration with the internal calibration leak is the one time entry of the leak rate of the calibration leak In Sniffer mode sniffing with the sniffer line is always performed on the open calibration leak Leak rate of external calibration leak sniffing Define the leak ra...

Page 62: ...L Extern LD protocol 4 Parameter 1 ASCII protocol CAL EXT IO1000 see the figure below ð Request to close calibration leak 4 Sniffer mode Remove sniffer line from calibration leak ð Leak rate signal decreases 5 Confirm measured background value is stable Control unit OK LD protocol 11 Parameter 1 ASCII protocol CAL CLOSED IO1000 see the figure below ð Calibration is completed if Control unit Old an...

Page 63: ...d outputs Assigning analog outputs of the I O module 46 6 3 4 3 Check the calibration To check whether a re calibration is necessary check the already existing 6 3 4 4 Calibration using the external calibration leak test LD and ASCII protocol The status must be queried via Command 260 or STATus CAL 1 Hold the sniffer line to the test leak 2 Wait until leak rate signal is tuned and stable ...

Page 64: ... LD protocol As with the other steps the status must be queried ASCII protocol As with the other steps the status must be queried IO1000 compare figure in External Calibration Configuration and Start 6 3 4 5 External calibration with sniffer line SL3000XL Low flow and high flow must be calibrated separately For calibration we recommend our test leak with catalogue number 12322 for forming gas appl...

Page 65: ...f the calibration leak ü The calibration adapter is connected to the leak detector by cable For further details refer to the CalMate Calibration Adapter for Test Leaks operating instructions ü If there is no separate interface on the back of the XL3000flex for connecting the connection cable you have established the connection via the IO1000 module See also Device setup 14 ü Using the CalMate on t...

Page 66: ...tion opening starts the calibration It is not possible to check the calibration 2 PROOF only Inserting the sniffer tip into the calibration opening starts the calibration check It is not possible to switch to calibration 6 3 4 7 Entering the calibration factor The calibration is usually determined by the appropriate calibration routine Therefore it is usually not necessary to adjust the calibratio...

Page 67: ...d by ZERO is adjusted automatically if the background changes inside the device The background value is automatically adjusted depending on the set ZERO time except for filter setting I CAL see Measurement result display with signal filters 69 Activating and deactivating ZERO ZERO aktivate deaktivate 0 On 1 Off Control unit Main menu Function ZERO ZERO LD protocol Command 6 ASCII protocol Command ...

Page 68: ...ing the ZERO key on the sniffer Deactivation of the ZERO key ZERO alignment prevents that the measurement is influenced inadvertently 0 On 1 Off Control unit Main Menu Settings Setup Modes Sniff Sniffer Button ZERO at startup LD protocol Command 412 ASCII protocol Command CONFig BUTSniffer ...

Page 69: ... ð The tip must touch the test object ð If the detection limit has deteriorated you can detect leaks at a greater distance high flow from the suspected leak and switch to low flow using the right button of the sniffer handle for more accurate location 5 Track the measurement result either as a line or as a bar graph see Touchscreen elements 20 6 To measure small leak rates more clearly use the ZER...

Page 70: ...ter set I Filter slope suppress Same as I Filter but with additional slope suppression The edge suppression corrects the measurement changes during the warm up phase Control unit Main Menu Settings ZERO Filter Filter Filter mode LD protocol Command 402 ASCII protocol Command CONFig FILTER Setting the filter leak rate threshold Leak rate background in mbar l s for the averaging period The averaging...

Page 71: ...0 ms 200 ms 500 ms 1 s 2 s 5 s Control unit Main Menu Functions Data Recorder Settings Record interval Memory location The data stored in the control unit can be saved to a USB stick The memory in the control unit is limited to the recording of a 24 hour measurement USB flash drive Control unit Control unit Main Menu Functions Data Recorder Settings Storage location Copy data The data stored in th...

Page 72: ... USB Stick but only one update per type at most control unit MSB box I O module if these parts are also connected free of disturbances and have an update function The corresponding buttons in the update menu such as Control Unit MSB Box and I O Module are active and can be activated individually NOTICE Aborted connection Data loss due to an aborted connection Do not switch off the device and do no...

Page 73: ...e version MS module 1 02 or higher 1 Copy the file Flash_LDS3000_IO_Vxx xx xxx bin into the main directory of a USB flash drive 2 Connect the USB flash drive to the USB port on the device 3 Select Functions Data Update I O module ð The display shows information on the current and the new software as well as on the current boot loader 4 Check the version information 5 Select the Start button to sta...

Page 74: ... be called up with the info menu Measurement values Preamplifier Environment TMP Temperature Electronic TMP Energy and operating hours Energy values Information on consumption values Operation hours Display for operating hours Supply voltages Information on internal supply voltages Power supply Information on the supply voltages of the components History Error error history warning history ...

Page 75: ...ge Information on the data exchange between mass spectrometer module and the control unit Mass spectrometer module MSB 1 Information on the software version MSB 2 Information on operating parameters TMP controller 1 Information on the turbo molecular pump TMP controller 2 Information on the turbo molecular pump continued Ion source Information on the ion source used Preamplifier Information on the...

Page 76: ...ns jina83en1 07 2105 Fig 7 I O module 2 Visualized information to the digital inputs 1 Input signal condition 2 Configured function INV Function is inverted 3 Status of the function active or inactive I O module 3 Visualized information to the digital outputs ...

Page 77: ...arameters can be displayed as an alphabetical list with names and current value s Each list entry is a button which when pressed will open the parameter s set up dialog box Control unit Main Menu List Parameters list or Main Menu Functions Data Parameters List Display list of parameter change authorizations Parameters can be displayed as an alphabetical list with names and current change authoriza...

Page 78: ...ule can be reset to factory settings 0 10 11 12 Load factory settings Not applicable for XL3000flex Not applicable for XL3000flex Reset the settings for XL sniffer adapter mode Control unit Functions Data Parameters Reset MSB settings LD protocol Command 1161 ASCII protocol Command RST FACTORY Command RST SL3000 Access controls The authorization for changing parameters can be reset to factory sett...

Page 79: ...auses for the malfunction and instructions on how to eliminate these Please note that work marked with an asterisk must be carried out only by service staff that is authorized by INFICON Warning Wrn Error Err Error message LDS3000 Error number Limit values Cause LDS1000 Protocol Binary or ASCII protocol compatibilit y mode LDS1000 LDS2010 1xx system error RAM ROM EEPROM clock Wrn102 Timeout EEPROM...

Page 80: ... 2xx operating voltage error Wrn201 U24_MSB too low 24 120 21 6V 24V power supply pack Wrn202 U24_MSB too high 24 120 26 4V 24V power supply pack Wrn203 24V_PWR12 voltage out of range TL_valve GB_valve 24 120 20V 30V Short circuit at valve 1 calibrated leak or valve 2 gas ballast Wrn204 24V_PWR34 voltage out of range valve 3 4 24 120 20V 30V Short circuit at valve 3 or valve 4 Wrn205 24V_PWR56 vol...

Page 81: ... 5V too low short circuit at preamplifier IF board or MSB defective Err252 REF5V voltage shorted 24 120 15V or REF5V too low short circuit at preamplifier IF board or MSB defective 3xx detection system offset preamplifier preamplifier test emission cathode test Wrn300 Anode voltage too low 41 132 7V the setpoint Short circuit anode voltage pressure in mass spectrometer too high IF board MSB or ion...

Page 82: ...ode interrupted IF board or MSB defective Err312 Cathode defective 47 138 Cathode defective line to cathode interrupted IF board or MSB defective Err340 Emission error 44 135 90 of the target value 110 of the target value Emission was stable previously pressure probably too high message after 15s Wrn342 Cathode not connected 47 138 Both cathodes defective during self testing after switch on or plu...

Page 83: ...0 500 G outside the range 31 123 450 GΩ 550 GΩ Preamplifier defective error at the suppressor IF board or MSB defective 4xx TMP fault also temperature Err400 TMP fault number 49 15 Wrn401 TMP warning number Err402 No communication with TMP 49 15 Cable to TMP TMP defective IF board or MSB defective Err403 TMP rotation speed too low 53 142 95 of the target value Pressure too high TMP defective Err40...

Page 84: ...rr423 TMP pressure rise 49 2 Inrush of air flood valve defective or incorrectly dimensioned 5xx Pressure and flow errors Wrn500 Pressure sensor not connected 58 144 0 5V Pressure sensor PSG500 P1 not connected IF board or MSB defective Wrn502 Pressure sensor 2 not connected Pressure sensor PSG500 P2 not connected IF board or MSB defective Wrn520 Pressure too high 73 148 18 mbar Pressure p1 too hig...

Page 85: ...ed leak or machine factor set incorrectly partial flow factor too high Wrn602 KalFaktor lower than last calibration 81 153 50 of the old value Calibrated leak machine factor or partial flow factor has changed Wrn603 KalFaktor higher than last calibration 81 153 200 of the old value Calibrated leak machine factor or partial flow factor has changed Wrn604 Int Cal not possible lack of calibration lea...

Page 86: ...Bef 429 ASCII CONFig CALWarn ON OFF Wrn670 Calibration error 81 153 Since a problem has occurred during the calibration you have to recalibrate Wrn671 Peak not found 81 153 The signal was too restless during the peak search Calibration has been aborted Wrn680 Deviation to the calibration detected 0 0 The verification of calibration has shown that you should recalibrate 7xx temperature errors pream...

Page 87: ...y water to moisten Avoid cleaners that contain alcohol fat or oil 8 2 Maintenance of the XL3000flex For your safety we recommend to contact your INFICON Service for any maintenance that needs to opening the device You can change yourself the fuses the filter mats of the fan inlet and the filter in the sniffer tip without opening the device 8 2 1 Change the filter mat of the fan input Depending on ...

Page 88: ...xt to the power switch Carefully remove the cover with the fuses attached underneath out of the device 4 Remove the fuses and check them for any damage 5 If necessary replace the fuses Use only spare fuses of the same type and rating as those supplied T6 3 A 250 V 6 Two fuses of the same type must be used 7 Press the fuse holder along with the fuses back into the starting position until the cover ...

Page 89: ...tighten the cap nut manually only 4 Check for tightness If no air can be drawn in the unit signals the warning W41 If the end of the sniffer tip is closed and the warning is not reported the screw connection at the sniffer tip is leaking or the filter cartridge is not seated correctly 1 Unscrew the plastic cap on the end of the filter tip 2 Close the end of the sniffer probe with the thumb If ther...

Page 90: ...I 200003801 Change bearings and replace oil wick cartridge X2 III Inspecting and cleaning the fan function X3 II Diaphragm pump Replacing the diaphragms valves plates and O Rings X1 III 200005414 Leak Detection MSB module Performing helium leak detection on the MSB module X III Sniffer line filters Replacing the sniffer line filters X3 II 521 023 Air filter Replacing the air filter on housing X3 I...

Page 91: ...lth The contamination declaration serves to protect all persons who come into contact with the device Fill in the declaration of contamination completely 1 Please do not hesitate to contact the manufacturer and send a completed declaration of contamination before sending anything to us ð You will then receive a return number 2 Use the original packaging when returning 3 Before sending the device a...

Page 92: ...9 Decommissioning the measuring instrument INFICON 92 108 XL3000flex Operating instructions jina83en1 07 2105 ...

Page 93: ...Other designations Molecular mass amu Helium viscosity factor Hydrogen mass 3 viscosity factor R11 CFCl3 137 4 0 515 1 15 R12 CF2 Cl2 120 9 0 591 1 319 R12B1 CF2 ClBr Halon 1211 165 4 0 523 1 167 R13 CF3 Cl 104 5 0 857 1 913 R13B1 CF3 Br Halon 1301 149 0 852 1 902 R14 CF4 80 0 857 1 913 R21 CHFCl2 102 9 0 535 1 194 R22 CHF2 Cl 86 5 0 632 1 411 R23 CHF3 70 0 704 1 571 R32 CH2 F2 52 0 632 1 411 R41 ...

Page 94: ...2 F6 152 0 55 1 228 R245fa C3 H3 F5 134 0 52 1 161 R290 C3 H8 Propane 44 1 0 433 0 967 R356 C4 H5 F5 166 1 0 561 1 252 R400 Mixture of 50 R12 50 R114 141 6 0 571 1 275 R401A Mixture of 53 R22 13 R152a 34 R124 94 4 0 607 1 355 R401B Mixture of 61 R22 11 R152a 28 R124 92 8 0 612 1 366 R401C Mixture of 33 R22 15 R152a 52 R124 101 0 602 1 344 R402A Mixture of 38 R22 60 R125 2 R290 101 6 0 647 1 444 R4...

Page 95: ...A Mixture of 44 R125 52 R143a 4 R134a 97 6 0 607 1 355 R405A Mixture of 45 R22 7 R152a 5 5 142b 42 5 RC318 111 9 0 622 1 388 R406A Mixture of 55 R22 4 R600a 41 R142b 89 9 0 566 1 263 R407A Mixture of 20 R32 40 R125 40 R134a 90 1 0 637 1 422 R407B Mixture of 10 R32 70 R125 20 R134a 102 9 0 647 1 444 R407C Mixture of 10 R32 70 R125 20 R134a 86 2 0 627 1 4 R407D Mixture of 23 R32 25 R125 52 R134a 91 ...

Page 96: ...R125 46 R143a 47 R22 87 0 602 1 344 R409A Mixture of 60 R22 25 R124 15 R142b 97 4 0 607 1 355 R409B Mixture of 65 R22 25 R124 10 R142b 96 7 0 612 1 366 R410A Mixture of 50 R32 50 R125 72 6 0 673 1 502 R410B Mixture of 45 R32 55 R125 75 6 0 673 1 502 R411A Mixture of 1 5 R1270 87 5 R22 11 R152a 82 4 0 617 1 377 R411B Mixture of 3 R1270 94 R22 3 R152a 83 1 0 62 1 388 R411C Mixture of 3 R1270 95 5 R2...

Page 97: ... R600a 16 5 R142 96 9 0 586 1 308 R415A Mixture of 82 R22 18 R152a 81 7 0 622 1 388 R416A Mixture of 59 R134a 39 5 R124 1 5 R600 111 9 0 576 1 286 R417A Mixture of 50 R134a 46 R125 4 R600a 106 7 0 61 1 362 R422D Mixture of 65 1 R125 31 5 R134a 3 4 R600a 112 2 0 622 1 388 R438A Mixture of 45 R125 44 2 R134a 8 5 R32 1 7 R600 0 6 R601a 104 9 0 617 1 377 R441A Mixture of 54 8 R290 36 1 R600 6 R600a 3 ...

Page 98: ...449A Mixture of 25 7 R134 25 3 R1234yf 24 7 R125 24 3 R32 87 2 0 622 1 388 R450A Mixture of 58 R1234ze 42 R134a 109 0 592 1 321 R452A Mixture of 59 R125 30 R1234yf 11 R32 103 5 0 612 1 366 R452B Mixture of 67 R32 26 R1234yf 7 R125 72 9 0 639 1 426 R454C Mixture of 22 R32 78 R1234yf 90 8 0 62 1 384 R500 Mixture of 74 R12 26 R152a 99 3 0 581 1 297 R501 Mixture of 75 R22 25 R12 93 1 0 627 1 4 R502 Mi...

Page 99: ...50 R143a 98 9 0 612 1 366 R508A Mixture of 39 R23 61 R116 100 1 0 729 1 627 R508B Mixture of 46 R23 54 R116 95 4 0 729 1 627 R513A Mixture of 44 R134a 56 R1234yf 108 7 0 582 1 299 R600 C4 H10 Butane 58 1 0 377 0 842 R600a C4 H10 Iso Butane 58 1 0 377 0 842 R601 C5 H12 Pentane 72 2 0 341 0 761 R601a C5 H12 Iso Pentane 72 2 0 336 0 75 R601b C5 H12 Neopentane 72 2 0 337 0 752 R601c C5 H12 Cyclopentan...

Page 100: ...gen mass 3 viscosity factor CO2 R744 44 0 744 1 661 H2 Hydrogen 2 0 448 1 H2 O R718 18 0 459 1 025 He Helium 4 1 2 232 HT135 Galden HT135 610 1 2 232 Kr Krypton 84 1 275 2 846 N2 Nitrogen 28 0 892 1 991 Ne Neon 20 2 1 586 3 54 NH3 R717 17 0 505 1 127 O2 Oxygen 32 1 03 2 299 SF6 146 1 0 765 1 708 Xe Xenon 131 3 1 153 2 574 ZT130 Galden ZT130 497 1 2 232 Table 1 Gas library V3 24 ...

Page 101: ...320 SL3000XL 3 sniffer line 3m length 521 011 SL3000XL 5 sniffer line 5m length 521 012 SL3000XL 10 sniffer line 10m length 521 013 SL3000XL 15 sniffer line 15m length 521 014 Holder for sniffer line 525 006 Adapter customer sniffer line PROTEC P3000XL 521 015 Oil Water Protection Tip for SL3000XL 521 016 Filter for Oil Water Protection Tip 521 017 Sniffer tip ST312XL 120 mm rigid 521 018 Sniffer ...

Page 102: ...12 CE Declaration of Conformity INFICON 102 108 XL3000flex Operating instructions jina83en1 07 2105 12 CE Declaration of Conformity ...

Page 103: ...INFICON RoHS 13 XL3000flex Operating instructions jina83en1 07 2105 103 108 13 RoHS ...

Page 104: ... D Date 35 Declaration of Contamination 91 92 Degree of contamination 25 Description 12 Detection limit 12 Dimensions 23 E Equivalence factor 55 Equivalence leak rate 55 Error message 79 F Factory settings 25 fan input 17 G Gas flow 13 H Handle 19 High flow 12 I I O port 45 K Keyboard lock 20 L Language 34 Leak rate unit 35 Low flow 12 M Main fuse 24 Mains switch 34 Maintenance 87 Measure 69 Measu...

Page 105: ...et 78 Reset button 14 21 Return 91 S Scope of delivery 11 Setting setpoints 59 Sniffer line 12 Sniffer mode 53 Speaker 14 Storage temperature 25 T Time 35 Touch PIN 11 14 21 Touchscreen 14 15 42 U USB flash drive 72 V View 14 15 W Warning 44 79 Weight 23 X XL3000flexRC 15 33 41 ...

Page 106: ...Index INFICON 106 108 XL3000flex Operating instructions jina83en1 07 2105 ...

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