Inficon Protec P3000, Translation Of The Original Operating Manual, Page: 47 / 128

Operation of the Protec P3000
47
3.5.3 External calibration
For external calibration it is recommended to use leak rates > 5x10
-6
mbar l/s for
Protec P3000 and leak rates of > 5x10
-5
mbar l/s when calibrating the Protec
P3000XL at
HIGH FLOW
(3000 sccm).
If the reference leak rate is < 5x10
-5
mbar l/s the Protec P3000XL automatically cali-
brates in
LOW FLOW
mode.
Notice
If significantly increased backgrounds are prevalent in your production
environment, larger leak rates for the calibration leak may be required.
The external calibration is a semi-automatic process during which the user will have
to follow some instructions. The calibration process may be started via the “
CAL
” -
button from the measuring mode at any time (except when the menu is open or the
function has been locked). A running calibration process may be cancelled by oper-
ating the “
ESC
” button.
After pressing the
CAL
button, please check whether the leak rate equals the leak rate
of the external leak you plan to use. If the leak rate is different press
EDIT LEAK RATE
and enter the correct leak rate value. Press “S
TART
” afterwards to begin with the cali-
bration process.
Please hold the sniffer tip to the outlet of the external calibrated leak. Hold the sniffer
tip steady and very close to the opening, however, do not clog the opening with the
sniffer tip. Some air also needs to enter the sniffer tip in addition to the helium from
the external calibrated leak. If the leak rate signal indicated by the bar graph is stable
press “
OK
”. Keep holding the sniffer tip steady in front of the opening while the Protec
P3000 reads the leak rate of the calibrated leak. During this time the text “Please
wait…” will be displayed.
Fig. 35 Setting-up the leak rate of the external leak