Inficon Fab UL6000 Fab, Operating Instructions Manual

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INFICON Operation | 6
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The pressure limits refer to the pressure sensor "p1", the inlet pressure of the turbo
molecular pump 1. See also "View vacuum diagram [
}
92]".
Using this function the factory settings for the switching points between the vacuum
ranges MASSIVE, GROSS, FINE and ULTRA can be changed. This can be
necessary if the device is pumped down with gases other than air, such as Argon. The
reason for this is the gas type dependence of the internal Pirani pressure gauges.
By changing the preset switching point this can be compensated for. The pressure
signal of the gas type dependent inlet pressure indicator (Pirani) can deliver different
switching values after the adjustment of the sequence control of the device.
ü
Supervisor rights
1 > Setup > Measurement > Pressure limits
ð
You can change the set pressure limits. This concerns:
MASSIVE -> GROSS
GROSS -> FINE
FINE -> ULTRA
2 To restore the factory settings for air after a change by pressing a key, press
the "Air default" button.
ð
All factory settings for air are set.
ð If required, you can set the pressure limits individually. See also "Factory
settings".
3 To set the values for argon by pressing a button, press the "Argon Standard"
key.
ð
Then the following settings deviating from the factory settings for air are used:
MASSIVE -> GROSS: 4 mbar
GROSS -> FINE: 1 mbar
FINE -> ULTRA: 0.2 mbar
ð
If required, you can set the pressure limits individually.
4 Save .
6.3.11 Set and use the function ZERO
Why should I use
ZERO?
To be able to clearly measure small leakages the function ZERO should be used.
With each leak detection there is a "Background signal" (see "Definition of terms
[
}
8]") that disrupts the search or the measurement of leakages.
• To hide the background signal, activate the function ZERO.
• You can also use ZERO to hide a currently displayed leakage, which interferes
with searches for other or even smaller leaks.