Inficon Fab UL6000 Fab, Operating Instructions Manual

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6.2.6.3 Changing the presentation of the circle graph
Fig. 12: Presentation of the circle chart
ü Operator or Supervisor rights
1 > Display > Circle chart
2 If you want to fix the number of displayed decades in the circle chart, under
"Decades“ select the number of displayed decades. Only effective when
automatic scaling is disabled.
3 If you want to dynamically adjust the display range to the measured leak rate,
activate automatic scaling via the option “Autoscale“.
4 In the “Lower diagram limit“ field, select the desired lower limit for the circle
chart. This limit is also effective if the “Autoscale“ option is activated.
5 Save .
6.2.6.4 Change general display settings
ü
Operator or Supervisor rights
1 > Display > General display settings
2 If very small leak rates are of no interest to your application and you want to
raise the lower leak rate limit, select between 1 - 6 decades in the “Raise lower
leak rate limit”. Raising the lower leak rate limit can facilitate the assessment of
the leak rate display.
3 To set whether to display the internal background leak rate in the “Standby”
window, enable or disable the “Display background at standby“ option.
ð
The internal background is created from the remaining gas, which has not yet
been pumped out. Very clean systems show a background in the range of 1 x
10
-11
mbar l/s. Under normal conditions there is a background of 1 x 10
-10
mbar l/s or 1x10
-9
mbar l/s. For the mathematical treatment of the internal
background, see "Change background suppression [
}
73]”.