Inficon Fab UL6000 Fab Page 144 Operating Instructions Manual Download

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11 | Appendix

INFICON

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UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-02-(2207)

> Setpoints

11.1.3 Information

> Assemblies > Ion source

> Assemblies > TMP

> Assemblies > TMP2

> Assemblies > Backing pump

> Assemblies > Preamplifier

> Energy > Power

> Energy > Voltage (1)

> Energy > Voltage (2)

> Energy > Current

> Device > Operating hours

> Device > Identification

> Device > MSB

> Device > Network

> Help > Errors and warnings

> HYDRO•S

> Calibration

> Measurement values > Run times

> Measurement values > Leak rate and pressure

> Measurement values > Temperature

> Sniffer line

> Accessories > Bus module

> Accessories > I/O module

Summary of Contents for Fab UL6000 Fab

Page 1: ...ion of the original operating instructions UL6000 Fab UL6000 Fab PLUS Helium Leak Detector with ULTRATEST Sensor Technology iinc75en1 02 2207 Catalog No 550 520 550 530 From software version 1 62 Operating unit ...

Page 2: ...INFICON GmbH Bonner Strasse 498 50968 Cologne Germany ...

Page 3: ...modes 18 4 2 1 Operation mode Vacuum 18 4 2 2 Operation mode Sniffing 19 4 3 Design of device 20 4 3 1 Overall device 20 4 3 2 Control unit 23 4 3 2 1 START button 24 4 3 2 2 STOP button 24 4 3 2 3 ZERO button 25 4 3 2 4 Meaning of the button LEDs 26 4 3 2 5 Meaning of the status LED 26 4 3 2 6 Design of touchscreen 27 4 3 3 Vacuum connections 29 4 3 3 1 Inlet 29 4 3 3 2 Exhaust 29 4 3 3 3 Purge g...

Page 4: ... 6 2 4 Switch off Automatic Login 54 6 2 5 Switch on Automatic Login 54 6 2 6 Presentation of the measurement screen 55 6 2 6 1 Changing the presentation of the line graph 55 6 2 6 2 Changing the presentation of the bar graph 56 6 2 6 3 Changing the presentation of the circle graph 57 6 2 6 4 Change general display settings 57 6 2 7 Change units 58 6 2 8 Change audio settings 58 6 2 9 Change the p...

Page 5: ... light 74 6 3 16 Change the sniffer line pressure monitoring 74 6 3 17 Calibrating 75 6 3 17 1 Internal calibration 75 6 3 17 2 External calibration 76 6 3 17 3 Check calibration 76 6 3 17 4 Measure internal calibration leak 76 6 4 Measure 77 6 5 Leak detection with I RISE device dependent 78 6 6 Measuring helium ambient concentration 80 6 7 Measurement data 81 6 7 1 Switch on data recording and c...

Page 6: ...ng the software of the basic unit 90 6 11 3 Update the software in expert mode 91 6 11 4 Activate additional function 91 6 12 Use external monitor 91 6 12 1 Switch back to the internal monitor 92 6 13 View vacuum diagram 92 6 14 Resetting to factory settings 93 6 15 Logging off from the device 94 6 16 Switching off the device 94 7 Warning and error messages 95 7 1 Warning and error messages UL3000...

Page 7: ...e 136 10 3 1 Creating a connection between the device and the bus module 136 10 3 2 Setting a bus module address 136 10 4 Network 137 10 4 1 Operate leak detector via web browser LAN 137 10 4 1 1 Configure the LAN connection of the leak detector 137 10 4 1 2 Setting the LAN connection in the PC or Tablet 138 10 4 1 3 Allow client access 138 10 4 2 Operate leak detector via web browser wireless LAN...

Page 8: ... technically qualified specialists with experience in the field of leak testing technology 1 2 Warnings DANGER Imminent hazard resulting in death or serious injuries WARNING Hazardous situation resulting in potential death or serious injuries CAUTION Hazardous situation resulting in minor injuries NOTICE Hazardous situation resulting in damage to property or the environment 1 3 Definition of terms...

Page 9: ...olecular pump for medium inlet pressures This is also used for the Sniffing operation mode Forming gas Forming gas is a collective term for gas mixtures of nitrogen and hydrogen GROSS GROSS donates the connection to the turbo molecular pump with the lowest sensitivity This allows high inlet pressures Internal helium background The measurement system of the leak detector also contains a residual am...

Page 10: ...ply lines and even in the leak detector itself This certain amount of tracer gas generates a measurement signal which is called the Background signal The ongoing evacuation of the test chamber continuously reduces this background signal Operation mode Sniffing Ambient air is continuously fed into the leak detector via the sniffer line The amount of helium or hydrogen occurring naturally in air cre...

Page 11: ... where conductive particles such as carbon fibers can lead to internal short circuits Test of wet or damp test objects Pumping off aggressive flammable explosive corrosive microbiological reactive or toxic substances creating a hazard Operation of the device without consideration of ergonomic aspects such as overtiredness Pumping down of condensible fluids and vapors Pumping down of gases contamin...

Page 12: ...esistant workpieces or test objects without splinter protection Pumping out gases containing halogens such as fluorine or chlorine in high concentration or over a long period of time Use with refrigerants or SF6 Operation without exhaust pipe in poorly ventilated rooms depending on the type of gases used Note This device is not intended to be used in living areas ...

Page 13: ...use Universally valid safety and accident prevention regulations International national and local standards and guidelines Additional device related provisions and regulations Only use original parts or parts approved by the manufacturer Keep this instruction manual available on site Personnel qualifications Only instructed personnel should be permitted to work with and on the device The instructe...

Page 14: ... Explosion hazard Hydrogen is a flammable and explosive gas Use only tracer gases with a concentration of hydrogen that cannot explode in combination with oxygen The allowable composition of venal gas mixtures can be read in the safety data sheets of the respective manufacturers Danger from suction effect at the inlet flange When operating the device in operation mode Vacuum there will be a negati...

Page 15: ...ate calibration leak 1 Inspection certificate leak detector 1 Sticker with leak rate of the built in helium test leak 1 In addition 2 keys to open the jim crow under the handle Check the delivery contents after receiving the product to ensure it is complete Explanations 1 To guide the power cord from the device to the ground avoiding the risk of tripping See Connect the supplied accessories 43 2 F...

Page 16: ... regulator before transport Protect the valve of the gas cylinder with a valve protection cap during transport Make sure that any connected spray hose is never under tension Observe the manufacturer s safety instructions for handling gas cylinders WARNING Risk of injury due to electric shock Only move the device when the mains cable is not plugged in Check the power cord for damage before each use...

Page 17: ...ty during transport without transport packaging If safe transport by pushing is not possible the device should be protected from damage by the original packaging Keep the original packaging for transport NOTICE Damage to the leak detector from industrial trucks On the bottom side of the device there are mounting clips for the fans Industrial trucks such as forklifts can damage these clips If you c...

Page 18: ...n mode Vacuum The inlet flange is located on the upper side of the device To be able to perform leak detection using the vacuum method the inlet flange must be connected to the desired test object If necessary use a suitable reducer to connect the specimen to the inlet flange An adapter DN63 ISO K DN40 ISO KF is included in the scope of delivery If the pressure in the specimen is less than the sur...

Page 19: ...ries and control signals 31 Via this connector both the electrical connection and the connection of the vacuum system is made As no connection is made to the inlet flange on the upper side of the device then no vacuum components that are already connected to the inlet flange need to be removed when changing to the operation mode Sniff Comparison SL200 SL3000 Detection limit 5 x 10 8 mbar l s 2 x 1...

Page 20: ...4 Description INFICON 20 152 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 4 3 Design of device 4 3 1 Overall device Fig 1 Front view ...

Page 21: ...INFICON Description 4 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 21 152 Fig 2 Front view with open flap ...

Page 22: ...4 Description INFICON 22 152 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 Fig 3 Back view The picture shows standard accessories and optional accessories ...

Page 23: ...screen and a control panel with the buttons START Stop and ZERO background suppression on the housing Also see Design of touchscreen 27 and START button 24 The LED lighting of the buttons on the control panel changes its display color according to the device state see also Meaning of the button LEDs 26 The control unit can be rotated 1 2 3 4 Fig 5 Control unit rear view ...

Page 24: ... 30 m shielded The remote control RC1000 is optionally available see also Accessories and spare parts 126 You can also operate the device using a notebooks or tablets see also Operate leak detector via web browser wireless LAN 139 4 3 2 1 START button To start the measurements Can be operated via the touchscreen of the control panel If you press the START key again during measurement the maximum l...

Page 25: ...r further details see Set and use the function ZERO 69 Function Touchscreen Control panel Background suppression ON ZERO button Background suppression OFF Press the ZERO button again and keep it pressed for approx 2 seconds The actual measured leak rate is considered to be a background signal Depending on the selected variant of operation mode the background signal is hidden until the display limi...

Page 26: ...ot acknowledged Off Red Error ZERO button LED Off No measurement operation Off ZERO blocked Blue ZERO off and HYDRO S off Green ZERO ON Yellow ZERO off and HYDRO S on 4 3 2 5 Meaning of the status LED The status LED is located on the back of the instrument inside of the connector block for the equipment and control signals see also Connections for accessories and control signals 31 Status LED Mean...

Page 27: ...nd elements Operation Next page Previous page User name Access control Settings Diagnosis Measuring mode Operation mode Gas Information Navigation button Navigation button Navigation button Navigation button Setpoints Measurement value Supervisor ULTRA Vacuum Volume Calibrate Circle chart ZERO ZERO On Off Measurement data recording Switching Line chart Bar chart HYDRO S Leak rate Measurement value...

Page 28: ...ee different colors Gray Function is disabled Light blue Function can be activated White Function is active General function symbols Cancel ongoing function Call up help for the current function Confirm entry or selection Load Save Edit Copy Delete WLAN LAN Page forward Page back Table 2 Function buttons Other symbols Authorization User Authorization Operator Authorization Supervisor View the time...

Page 29: ...dirt accumulation at the inlet of the leak detector Note that ice can form on filters due to condensation of water vapor This can lead to property damage 4 3 3 2 Exhaust WARNING Danger of poisoning due to harmful gases Depending on the connected container and the gas contained therein harmful gases can get into the ambient air via the exhaust filter of the leak detector Make sure you have protecti...

Page 30: ...es connect a gas supply line this means Nitrogen or fresh air or similar over the purge gas connection The pressure in this gas line must not exceed the atmospheric pressure by more than 100 mbar 4 3 3 4 Venting connection Normally the specimens are vented with ambient air after completion of the test If necessary the test specimens can be ventilated with another gas e g fresh air dry air nitrogen...

Page 31: ...8 m or for direct connection of the radio transmitter via an adapter The remote control is not part of the scope of delivery of the device SERVICE Connection only to be used by the Service Connection for mains cable For power supply of the device Venting connection For hoses with an outside diameter of 14 mm see also Venting connection 30 Purge gas connection For hoses with an outside diameter of ...

Page 32: ...Screen diagonal 7 inch Resolution 800 x 480 pixel Colors 16 7 M Background light LED Electrical data UL6000 Fab UL6000 Fab PLUS Operating voltage 100 240 V 10 50 60 Hz Max power consumption 1500 VA Typical power consumption when pumping in measuring mode 1000 VA 800 VA Max power consumption 100 V 13A Max power consumption 240 V 6A Short circuit current rating SCCR 300A Main fuse Circuit breaker 20...

Page 33: ...ime 2 minutes Detectable masses 4 He H2 Mass 3 e g H D 3 He or H3 Minimum detectable leak rate sniffer mode 5 x 10 8 mbar l s Gas flow through sniffer line SL200 25 sccm Gas flow through sniffer line SL3000 160 sccm Measurement range 12 decades Sound pressure level in Standby 70 dB A Ion source 2 long life iridium cathodes Yttrium oxide coated The A weighted emission sound pressure level at the op...

Page 34: ...ce Interfaces leak rate unit vacuum operation mbar l s Interfaces leak rate unit sniffer operation mbar l s Interface pressure unit mbar Mass 4 helium Protocol on the IO1000 RS232 connection ASCII Analog output IO1000 channel 1 Leak rate mantissa Analog output IO1000 channel 2 Leak rate exponent Analog output IO1000 scaling 0 5 V decade Digital output pin 1 IO1000 Calibration request inverted Digi...

Page 35: ...cation beep On Inlet area offset mass 2 1 3 10 10 A Modifiable by function Determine the background of the inlet area 74 Inlet area offset mass 3 6 7 10 14 A Modifiable by function Determine the background of the inlet area 74 Inlet area offset mass 4 3 3 10 15 A Modifiable by function Determine the background of the inlet area 74 Analog output IO1000 upper exponent 5 Pressure unit display mbar Le...

Page 36: ...messages all activated Vacuum ranges MASSIVE GROSS FINE and ULTRA all ON Bus module address 126 Calibration leak external vacuum Hydrogen 1 x10 7 mbar l s Calibration leak external vacuum mass 3 1 x10 7 mbar l s Calibration leak external vacuum Helium 1 x10 7 mbar l s Calibration leak external sniffer Hydrogen 1 x10 5 mbar l s Calibration leak external sniffer mass 3 1 x10 5 mbar l s Calibration l...

Page 37: ...n Lower diagram limit 1 10 12 Time axis 30 s Bar chart Scaling Logarithmic Decades 4 Autoscale On Lower diagram limit 1 10 12 Circle chart Decades 5 Autoscale On Lower diagram limit 1 10 12 Data recording Export format CSV en Enabled Off Export metadata On WLAN Name SSID UL3xxx Network key INFICONUL Enable On LAN Method Off I RISE device dependent Decades 3 Autoscale On Time axis 240 s Lower diagr...

Page 38: ...4 Description INFICON 38 152 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 I RISE unit Pa min I RISE permission User Leak rate setpoint I RISE 6E 2 Pa min 10 L ...

Page 39: ...f you want to move the device disconnect the power cord from the wall socket To prevent unintentional movement fix the device at the destination by locking the wheels with the parking brake Only operate the device in dry environments and only in buildings Operate the device away from sources of liquid and moisture Position the device so that you can always reach the plug for unplugging Do not oper...

Page 40: ... power switch or power plug is always easily accessible Disconnect the device from the mains immediately if smoke is emitted from the device WARNING Device may fall over due to earthquake In areas where there is a risk of earthquakes secure the device to the device handle with a short chain or a tension belt designed for 1100 N Fig 7 Handle of the device CAUTION Risk of injury due to shortening of...

Page 41: ...d Keep feet and hands away from the rollers Do not release wheel brakes with your fingers only with your foot or a tool Do not pull the device Hold the device by the provided handle only and slide it Fix the unit at the destination by locking the wheels with parking brake CAUTION Risk of stumbling over the power cord or other lines To avoid tripping over an obliquely hanging power cable untwist th...

Page 42: ...we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties Prevention of measurement errors due to leaks in the helium source in the device surroundings We recommend that you regularly check around the device to a distance of 10 m all large helium sources for gross leaks Use a sniff...

Page 43: ...unt Hook 4x screw M6 x 12 4x lock washer S6 4x Required tools supplied Wrench T30 Torx In order to be able to fix the mains cable and if necessary a sniffer line on the device mount the hooks on the device as shown If there is a bottle holder attached to the device mount the hooks on the bottle holder and secure the screws with the delivered nuts 1 3 2 1 Hook 2 Screw M6 x 12 3 Guard washer S6 ...

Page 44: ...5 Installation INFICON 44 152 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 Fig 8 Hook at the instrument or at the optional bottle holder ...

Page 45: ...er S6 1x Required tools supplied Wrench T30 Torx To avoid the risk of tripping mount the strain relief power supply at the device Thus the power supply is lead from the device to the ground If there is a bottle holder attached to the device mount the power line strain relief on the bottle holder and secure the screw with a delivered nut 1 3 2 1 Screw M6 x 12 2 Guard washer S6 3 Strain relief ...

Page 46: ...wise If you have an exhaust hose with a hose nozzle G inch male thread you can alternatively fix this hose nozzle in the exhaust port by turning it clockwise WARNING Danger of poisoning due to harmful gases Depending on the connected container and the gas contained therein harmful gases can get into the ambient air via the exhaust filter of the leak detector Make sure you have protection measure t...

Page 47: ...racket so that it points away from the operator A bracket is available for the sniffer tip The bracket can be mounted on the back of the device see also Overall device 20 Scope of delivery amount Bracket 1x M6 x 12 mm screws 2x S6 x 10 x 0 7 mm washers 2x 1 Mount the bracket as shown using the two screws and washers on the back of the device 2 When not in use align the sniffer line in the bracket ...

Page 48: ... device is not permitted without a connected protective ground conductor Only use the included 3 wire power cable Replace defective power cables In regions with a power supply of 100 to 120 V with plug type NEMA 5 15 e g North and Central America Taiwan and Japan only the supplied Hospital Grade power cord may be used If the cable is damaged it must be replaced with an original Hospital Grade spar...

Page 49: ...le blank flange is available if not already mounted on the inlet flange ü A helium calibration leak is available optional 1 Unpack the device take a look at the supply and inspect for any visual damage 2 Check if the inlet is blind flanged If this is not so flange a blank flange with an O ring gasket on the inlet on the upper side of the device 3 Connect the device to the power supply 4 Switch on ...

Page 50: ...minutes until the device has warmed up 10 To enter the calibration menu press the button 11 Select Internal 12 Press the button ð The automatic internal calibration starts and requires approx 30 seconds 13 If you want to check the measurement accuracy of the device using the optional helium calibration leak remove the blank flange from the inlet and connect an open helium calibration leak onto the...

Page 51: ...ssible to start up the device anyway by confirming this message This may damage the backing pump Do not operate the device at an ambient temperature below 10 C In order to switch on the device press the power switch ð When delivered the device shows the window Standby after run up Fig 9 Window Standby Starting the measurement Calibrate Purge Vent At startup some notifications or notices for the us...

Page 52: ...ngs 6 2 3 1 Overview of Rights Groups The rights of a user depend upon which group he belongs to User Members of the group User can perform measurements view history of the measurement results view device information view error logs Operator Members of the group Operator have all the rights of the group User Moreover they can Create modify delete user Export delete measurement data Modify measurem...

Page 53: ...l bar to load a user profile The login window opens to modify a user profile The window User profile opens to delete a user profile A confirmation screen appears 3 After selecting some tools the User profile window opens If this window opens enter a user name change it or keep it as required Mueller User Mueller PIN Name Group Language German User profile 4 If the PIN field is not filled in or you...

Page 54: ...on the device the user Supervisor automatically logs in and the measurement screen is called This default user also has the permissions of the group Supervisor Without changing this setting any user can operate all functions without restriction You can specify that the login window appears after you turn on the device instead of automatically logging on In the login window all users can login whic...

Page 55: ...Presentation of the measurement screen To switch between the different diagram presentation press on the lower left of the measurement screen see Design of touchscreen 27 You can select between the following presentations Line chart Bar chart Circle chart You can further configure the different diagram presentations See Changing the presentation of the line graph 55 Changing the presentation of th...

Page 56: ... 240 seconds 6 If the option Autoscale is not active select Lower diagram limit in the field the desired decade 7 Save 6 2 6 2 Changing the presentation of the bar graph Fig 11 Presentation as bar graph ü Operator or Supervisor rights 1 Display Bar chart 2 In the field Scaling select between Linear and Logarithmic 3 Select between the different viewable Decades 4 To dynamically adjust the upper an...

Page 57: ...is activated 5 Save 6 2 6 4 Change general display settings ü Operator or Supervisor rights 1 Display General display settings 2 If very small leak rates are of no interest to your application and you want to raise the lower leak rate limit select between 1 6 decades in the Raise lower leak rate limit Raising the lower leak rate limit can facilitate the assessment of the leak rate display 3 To set...

Page 58: ...the units of the device 3 In order to independently select the units of the interface deactivate the option Equal to display ð Further fields to set the units of the interface are shown 4 To order to set the selected units if required so that they can also be used for the interface activate the option Equal to display 5 Save 6 2 8 Change audio settings In addition to the visual display of the meas...

Page 59: ...e to a decade above Below this leak rate range the sound is constantly low above the sound is constantly high ð SETPOINT The pitch is proportional to the leak rate The signal sounds if the leak rate exceeds the set setpoint 1 See also Setting setpoints 65 ð TRIGGER If the set setpoint 1 is exceeded then a two pitch signal is issued See also Setting setpoints 65 5 If you want to suppress the alarm ...

Page 60: ...re p1 does not drop below 100 mbar within this time span a fault message is signaled This menu point is especially useful with series tests that always have the same test conditions After pressing the START button the specimen is evacuated If the corresponding pressure conditions p1 100 mbar is not reached within the time that is to be set here or falls below the pump down process is aborted and a...

Page 61: ...lt value button 2500 hours 3 Save After performing a maintenance you should reset the desired period until the next maintenance See also 2 Change the filter mat inside the tool box 114 2 Replacement of the filter mat on the bottom of the device 115 2 Replacing the SL200 sniffer line filter 116 2 Replacing the SL3000 sniffer line filter 118 6 2 11 Activate or deactivate maintenance requests Enables...

Page 62: ...ous 2 To switch on further calibration requests activate the option Calibration request To switch off deactivate this option 3 Save 6 2 13 Extending or reducing operation options You can always operate the device via touchscreen Furthermore you can change the factory setting which enables the operation via buttons on the control panel and via the remote control ü Operator or Supervisor rights 1 Se...

Page 63: ...rement activated ð Option deactivated No measurement factory setting 3 Save 6 2 15 Use Favorites To shorten the time spent searching menus for frequently used functions create freely assignable menu keys in the Favorites window Use Favorites Press the icon with your permission and then the Favorites button or choose alternatively User accounts Favorites ð The Favorites window with 9 buttons is dis...

Page 64: ...e list overview is displayed with the menu names from which you make your selection and save it by pressing 6 2 16 Turn notifications on or off ü Supervisor rights 1 Setup General Notifications 2 If necessary change the setting of the Note on the exhaust hose connection field ð Option activated Note is displayed factory setting ð Option deactivated No note 3 Save ...

Page 65: ...en does not exceed the described concentration ü Supervisor rights 1 Setup Measurement Mass 2 Make a selection from Hydrogen H2 2 amu Helium 4 He 4 amu Mass 3 3 He 3 amu 3 Save 6 3 3 Setting setpoints You can set the leak rate for the setpoint to 1 2 3 and 4 separately When the setpoints are exceeded If the setpoint 1 or 2 is exceeded the measurement line in the measurement window changes color Th...

Page 66: ...ce the speed of the backing pump ü Supervisor rights 1 Setup Measurement Vacuum Backing pump 2 If necessary change the setting of the backing pump mode field ð Automatic factory setting The speed of the backing pump is lowered if possible ð Fixed The backing pump is operated at a fixed speed 6 3 6 Switch TMP2 mode on or off ü Supervisor rights 1 Setup Measurement Vacuum TMP2 2 If necessary change ...

Page 67: ... is set to Manual see Set HYDRO S 67 ü Gas type helium mass 4 is selected see Select gas 65 ü Operation mode Vacuum is active ü Vacuum range ULTRA is reached ü Device is in the Measuring state ü The current leak rate is larger than 3x10 10 mbar l s ü ZERO is switched off After switching on HYDRO S the ZERO can be used again See Set and use the function ZERO 69 Switch HYDRO S by pressing on or off ...

Page 68: ... with the external pump switched and once without The difference between the results determines the machine factor The machine factor can also be used to correct the leak rate display with respect to the air equivalence The machine factor for this correction is 0 37 ü Operator or Supervisor rights ü The operation mode Vacuum is set 1 Setup Measurement Calibration leak ð The field Machine factor he...

Page 69: ...ge the set pressure limits This concerns MASSIVE GROSS GROSS FINE FINE ULTRA 2 To restore the factory settings for air after a change by pressing a key press the Air default button ð All factory settings for air are set ð If required you can set the pressure limits individually See also Factory settings 3 To set the values for argon by pressing a button press the Argon Standard key ð Then the foll...

Page 70: ...en How do I switch the ZERO function OFF Press the ZERO button on the control panel for more than 2 seconds or on the touchscreen Vacuum operation mode effect of ZERO setting If you use the I ZERO 2 0 setting after pressing the ZERO button the displayed background signal is faded out depending on the current drift Typically the display limit falls in several steps The size of the current display l...

Page 71: ...essing at in the window Standby See also Switching on 51 ð No ventilation 3 If necessary change the setting in the Soft ventilation field ð Option activated The inlet is ventilated only very slowly This can be useful to avoid a strong flow in the test object which could possibly entrain particles ð Option deactivated Factory setting 4 Save Purge By activating the flushing function with dry backing...

Page 72: ...the setting No ventilation under Ventilation mode see above Regeneration ð You can start the regeneration in the opened window and stop it as desired or wait for the automatic deactivation of the regeneration after 60 minutes 6 3 13 Change leak rate filter The leak rate filter I CAL is preset I CAL ensures that the averaging time is optimally adapted to the leak rate range The abbreviation I CAL s...

Page 73: ... are no longer impaired by the internal background At the time of pressing the button START In order to determine a new internal background the leak detector must be in standby mode for at least 20 seconds and the flushing or gas ballast valve must not have been open during this time If you want to make sure that a current internal ground is used in the following measuring operation do not press S...

Page 74: ...et up how you are to be additionally informed on the display of the touchscreen concerning the measurements The settings take effect with Setpoint 1 ü Operator or Supervisor rights 1 Setup Measurement Sniffing SL3000 sniffer line 2 Select Sniffer line light alarm configuration ð As choices there are Lighter Off or Flash 3 Select Sniffer line light brightness ð You have a choice of OFF 1 6 4 Switch...

Page 75: ... internal calibration leak or using an external calibration leak Normally calibration should take place on a daily basis or if there is some doubt as to the measurement ability of the device When using hydrogen or helium 3 3 He as tracer gas an internal calibration is not possible In this case use an external calibration leak The operation modes Vacuum and Sniffing must be separately calibrated wh...

Page 76: ...by or Measure mode 1 Press 2 Select Proof ð The check is started and the calibration factor is recalculated ð The newly calculated calibration factor is displayed ð If the newly calculated calibration factor deviates considerably from the stored calibration factor a prompt for new calibration is displayed 6 3 17 4 Measure internal calibration leak ü User rights ü The device is in Standby or Measur...

Page 77: ...ure that the correct basic settings and the settings for the current measurement are carried out See Basic settings and Settings for the measurements 4 When performing a calibration note the 20 minute warm up time See Calibrating 75 5 In standby mode initiate the measurement process by pressing the START button ð If you want to ensure that a current internal background is used in the following mea...

Page 78: ...the leak detector and thus outside the recipient Compared to a conventional pressure rise measurement it can be measured much faster and continuously A conventional external pressure rise measurement is replaced by I RISE The leak rate Q can also be determined by multiplying the displayed I RISE leak rate by the recipient volume for example in mbar l s Q mbar l s I RISE mbar s volume l Allow I RIS...

Page 79: ...rr min 4 Under I RISE permission select from which authorization group the leak detection with I RISE may be started ð User factory setting Operator and Supervisor are available for selection Set I RISE setpoint You can set the leak rate for the I RISE setpoint separately If the setpoint value is exceeded the color of the measuring points changes in the measuring window The setpoint also defines t...

Page 80: ...y I RISE Chart 2 Select between the different viewable Decades 3 To dynamically adjust the upper and lower limit on the leak rate activate the option Autoscale 4 In the field Time axis select the length of the time axis 60 120 240 or 480 seconds 5 If the option Autoscale is not active select Lower diagram limit in the field the desired decade 6 Save 6 6 Measuring helium ambient concentration The n...

Page 81: ... and configure export 81 You can also export the displayed measured values See also Display measurement cycles 82 For the export you can either use a USB flash drive or the network connection see also Export measurement data via network 83 6 7 1 Switch on data recording and configure export NOTICE Reduces the service life of the memory The recording of many measured values reduces the service life...

Page 82: ...isplay measurement cycles The measuring cycle is the time between pressing the START button and the STOP button You can view the associated information and optionally edit 2 free text fields 1 Measurement data Measurement cycles ð Stored measurement cycles with ID start and end time are displayed 2 To view the details of a measurement cycle select the desired entry by touching it and press ð All i...

Page 83: ...a web browser LAN 137 or Operate leak detector via web browser wireless LAN 139 ü The measurement data were recorded See also Switch on data recording and configure export 81 You have two options for exporting the desired measurement data ð You use the convenient options to first display measurement cycles and click on See also Display measurement cycles 82 After activating the from the PC or Tabl...

Page 84: ...ISO format in UTC time dte 2018 08 02T17 45 35 000Z f Format The data format of the export json csv_en csv_de Standard csv_en f json f csv_en d Scope Scope of the data With or without metadata mr Meta and measured values m Meta only r only measured values Standard mr d mr d r 6 7 4 Measurement data database Information The maximum size of the database corresponds approximately to the number of mea...

Page 85: ...es are shown Measurement values Temperature ð Different temperature values are displayed Measurement values Run times ð The current runtime information is displayed 6 8 2 Call the latest information to the current calibration value Calibration 6 8 3 Information on connected accessories Accessories I O module ð If an I O module is connected you will find details Accessories Bus module ð If a bus mo...

Page 86: ...equency converter Assemblies Preamplifier Assemblies Ion source Assemblies TMP Assemblies TMP2 Assemblies Backing pump 6 8 6 Call the energy data information Various measured supply voltages and electrical powers are displayed Energy Voltage 1 ð In this window the first part of the information to the voltage is shown Energy Voltage 2 ð In this window the second part of the information to the volta...

Page 87: ...6 9 3 Call result log For displaying test results in the Vacuum Qmax operation mode If there are more than 50 entries always the oldest entry is deleted Protocols Result log 6 9 4 Call maintenance log Logs Maintenance If there are more than 20 entries always the oldest entry is deleted 6 10 Device settings 6 10 1 Viewing and customizing individual parameters You are able to get a quick overview of...

Page 88: ... be displayed as a list If the values of a saved set of parameters match the actual settings of the device 100 a green dot will be displayed 2 To create a new set of parameters press ð In the next window you can insert a free text description The prefix parameter set and the date of saving are used for the file name Save You are able to save max 10 sets of parameters 3 To open the context menu of ...

Page 89: ...sh drive into the device press below the list ð All sets of parameters on the USB flash drive will be saved in the device if the number of 10 is not exceeded Using a PC you can delete redundant sets of parameters on the USB flash drive before transferring ð You must not modify parameters of a set of parameters on the USB flash drive before importing You cannot transfer these files to the device af...

Page 90: ...sion press on the button Update ð After completion there is an automatic restart of the operating unit 6 11 2 Updating the software of the basic unit Import software updates using a USB flash drive NOTICE Loss of data due to disconnection Do not switch off the device and do not remove the USB flash drive while the software is being updated ü Supervisor rights 1 Copy the file into the main director...

Page 91: ...al function If your leak detector offers the possibility you can purchase one or more additional functions and activate them by means of an activation code ü You have ordered an additional feature from the manufacturer specifying the serial number of your leak detector ü You have received an unlock code from the manufacturer ü Supervisor rights 1 Update Unlock feature 2 Enter your unlock code in t...

Page 92: ...display you can connect the external monitor before switching on the device ð Then the picture will be displayed on the external monitor without changing settings 6 12 1 Switch back to the internal monitor NOTICE Disconnect external monitor If the device is turned on switch to the internal monitor in the menu before disconnecting the connections of an external monitor When the instrument is switch...

Page 93: ... V15 Solenoid valves for controlling gas flows 10 Backing pump 6 14 Resetting to factory settings You can restore the device to factory settings Loss of settings and measurement data After resetting to factory settings only the manufacturer factory settings are in the memory of the device The software of the device is not reset when restoring the factory settings ü Supervisor rights 1 Setup Genera...

Page 94: ...aged The running turbo molecular pumps can be damaged by jerky movements or foreign objects Before switching off the device vent the inlet to ensure that the TMP2 booster pump is slowed down After venting the inlet avoid jerky movements or vibrations of the device during operation and until 2 minutes after switching off If you do not vent the inlet avoid jerky movements or vibrations of the device...

Page 95: ...ding Error messages Errors are events that force the interruption of the operation For details about the cause and the remedy press Once you have rectified the cause of the error continue operation by pressing the button Clear Active errors and warnings This menu item is only displayed when the template contains errors or warnings Errors and warnings Confirmed warnings If an active warning is ackn...

Page 96: ...ach time when you restart the device Contact customer service W106 Several EEPROM parameters have been initialized A software update introduced new parameters Confirm the warning message Check that the message does not appear when you restart the device Check whether the factory setting of the new parameters corresponds to your application The EEPROM on the VI Board was replaced Confirm the warnin...

Page 97: ...ssued through interfaces Over time this reduces the service life of the EEPROM Remove the excess write accesses from your control program E112 Impermissible DIP switch setting The DIP switch on the MSB has an invalid position Contact customer service MSB defective Contact customer service W113 The device ID does not match the recognized backing pump The DIP switch on the MSB has an invalid positio...

Page 98: ...lass Contact customer service W130 Sniffer line not connected The sniffer line cannot be addressed by the device Check the connection between sniffer line and the device disconnect and reconnect Contact customer service Sniffer line defective Use another sniffer line if possible Contact customer service W132 Sniffer line type XL not allowed A sniffer line type XL cannot be used with this device Re...

Page 99: ...unintentionally Deactivate the Interlock function W171 CU1000 not supported A CU1000 cannot be used with this device Disconnect the CU1000 from this device W201 Voltage U24V_MSB too low Malfunction of 24V power supply unit Contact customer service Short circuit or overload in the 24V supply Contact customer service W202 Voltage U24V_MSB too high Malfunction of 24V power supply unit Contact custome...

Page 100: ...ge out of range Short circuit or overload in the internal 5V supply Contact customer service W212 5V sniffer line supply voltage out of range Sniffer line defective Use another sniffer line if possible Contact customer service Short circuit or overload in the 5V sniffer line supply Contact customer service W221 Internal voltage 24V_RC voltage out of range The remote control is defective Use anothe...

Page 101: ...E Pirani voltage out of range Short circuit or overload in the 24V_PRESSURE Pirani supply Contact customer service W240 Voltage 15V out of range Short circuit at preamplifier Contact customer service VI Board or MSB defective Contact customer service W241 Voltage 15V out of range Short circuit at preamplifier Contact customer service VI Board or MSB defective Contact customer service E242 15V or 1...

Page 102: ...rvice W302 Suppressor voltage too low Short circuit of suppressor or preamplifier Contact customer service VI Board or MSB defective Contact customer service W303 Suppressor voltage too high MSB defective Contact customer service W304 Anode cathode voltage too low Short circuit between anode and cathode Contact customer service VI Board or MSB defective Contact customer service W305 Anode cathode ...

Page 103: ...vice W342 Cathodes not connected Both cathodes defective during self test Contact customer service Plug of ion source not connected Contact customer service W350 Suppressor not connected Suppressor cable not connected or defective Contact customer service E352 Preamplifier not connected Preamplifier defective or cable not connected Contact customer service W358 Alternate preamplifier ranges Preamp...

Page 104: ...se the Regeneration function in the Vacuum operation mode Ion source or preamplifier defective Contact customer service W390 500 GOhm amplifier resistor out of range Preamplifier defective Contact customer service MSB defective Contact customer service E400 TMP error message Unhandled error message from the TMP Contact customer service W401 TMP warning message Unhandled warning message from the TM...

Page 105: ...ure during run up too high Check that the backing pump is working during run up Check that the pressure drops during run up Contact customer service TMP bearing damage Contact customer service E423 TMP pressure rise Inrush of air into TMP Contact customer service W449 Soft start of TMP2 required The TMP2 has not been activated for a long time or has not been running for a long time Wait until the ...

Page 106: ...stomer service Backing pump has no power supply Contact customer service Backing pump converter defective Contact customer service VI Board or MSB defective Contact customer service E453 Backing pump failure Unhandled error message from the backing pump Contact customer service E454 Fault in backing pump Undervoltage The backing pump in the leak detector has insufficient mains input voltage Make s...

Page 107: ...at least an hour before you switch on the leak detector Temperature sensor of backing pump is defective Contact customer service Backing pump converter defective Contact customer service W459 Run up of backing pump takes too long Exhaust connection sealed Make sure that the exhaust hose is correctly connected Backing pump defective Contact customer service W460 No communication with the TMP2 conve...

Page 108: ...ion in backing pump Gas flow into device due to pressure at exhaust connection Remove the pressure from the exhaust connection E466 Run up error of backing pump rotation speed too low Exhaust connection sealed Make sure that the exhaust hose is correctly connected Backing pump defective Contact customer service E467 Overload protection of backing pump Exhaust connection sealed Make sure that the e...

Page 109: ...ive Contact customer service VI Board or MSB defective Contact customer service E520 Pressure too high Pressure p2 too high for at least 15s Contact customer service E521 Pressure rise anode voltage collapsed Pressure rise at pressure sensor p2 and anode voltage collapsed Contact customer service W522 Pressure rise emission collapsed Pressure rise at pressure sensor p2 and emission collapsed Conta...

Page 110: ...nection to the test object Check the tightness of the connection between the leak detector and the test object Gross leak protection limit is set too low Check and change the gross leak protection limit if necessary Audio alarm delay time set too short Check and change the audio alarm delay if necessary W580 Maximum evacuation time until 100 mbar exceeded Gross leak at test object or the connectio...

Page 111: ...ermining the I BOOST time constant Perform the procedure for determining the I BOOST time constant again W619 I BOOST leak rate dropped faster than expected 30 s message The I BOOST time constant for the connected vacuum system has not yet been determined or something has been changed on the connected vacuum system after determining the I BOOST time constant Perform the procedure for determining t...

Page 112: ...640 Auto Leak Test Too many consecutive tests failed Leak rate setpoint 1 does not match the test object Check and change the leak rate setpoint 1 if necessary Test chamber leaky Use another test chamber if possible W670 Calibration error emission collapsed During calibration the emission collapsed Check if the message occurs again when you perform a new calibration Contact customer service W700 P...

Page 113: ...e is too high Reduce the temperature in the environment where the device is located Air filter dirty Clean the air vents or replace the filter plates Fan blocked or defective Contact customer service W901 Maintenance TMP bearing lubricant Maintenance interval for TMP bearing lubricant exceeded Contact customer service W903 Maintenance Calibration leak expired Maintenance interval for calibration l...

Page 114: ...pply cannot be switched back on unintentionally Don t open the device 8 1 Cleaning the housing Wipe the housing with a soft damp cloth Use only water to moisten Avoid cleaners that contain alcohol fat or oil 8 2 Change the filter mat inside the tool box Filter mat tool box Required tools None Depending on the location the filter mat in the tool box can become dirty Check the filter mat periodicall...

Page 115: ...er mat bottom of the device Required tools Screwdriver Check the filter mat periodically and change it if the filter mat is significant dirty ü They consist of a new filter mat 1 Make sure that the device is disconnected from the power supply by pulling the power plug securely 2 To reach the filter mat loosen the knurled screw on the front of the device at the bottom 3 Remove the metal sheet with ...

Page 116: ...the filter mat on the metal sheet 5 Replace the filter mat 6 Secure the filter mat with the screws insert the metal sheet and fix it with the knurled screw 8 4 Replacing the SL200 sniffer line filter Structure of the sniffer tip Fig 14 Sniffer tip 1 Capillary filter plastic standard 4 Cross head screws 2 Felt pads 5 Sinter filter ...

Page 117: ...iffer line from the device Use tweezers to remove the dirty felt discs and replace them with new ones or Unscrew the capillary filter and replace it with a new one Do not forget the gasket for the metal version Check or replace the sinter filter 1 Switch off the leak detector or disconnect the sniffer line from the device 2 Remove the two cross head screws 3 Remove the sinter filter with gasket 4 ...

Page 118: ...elow the metal capillary filter and the water conservation tip This seal is already integrated into the plastic capillary filter Table 3 Capillary filter 1 Sniffer line end 4 Plastic capillary filter 2 cone seal 5 Water conservation tip 3 Metal capillary filter Capillary filter and water conservation tip are screwed onto the sniffer line end The filter inserts are inserted and lie in front of a sm...

Page 119: ...ffer tip or Air filter 61 Replacing the sinter filter of the sniffer handle The sinter filter is in the sniffer handle To replace the filter inserts proceed as follows 1 Switch off the leak detector 2 Unscrew the two cross head screws that hold the sniffer probe in place 3 Remove sinter filter including o ring Fig 18 Sinter filter in the sniffer handle 4 Check the filter for visible soiling 5 Inse...

Page 120: ...ou can save the current screen contents of the device to an image file You can use such a file for service communication for example 1 Create a directory named Screenshots on a USB stick FAT 32 formatted 2 To take a screenshot connect the USB stick to one of the USB ports of the leak detector see also the back of the Control unit 23 ð A screenshot is automatically taken and stored in the directory...

Page 121: ...ance 8 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 121 152 You can send in your device to INFICON so it can be maintained or repaired For further details see Returning the device for maintenance repair or disposal 124 ...

Page 122: ...ge gas line Renew filter X3 X1 X1 X1 II 200000683 200001095 Electrical Fan subassemblies Blow out fan chassis and TMP X3 X1 X1 X1 X1 II Check air filter kit and replace if necessary X3 X1 X1 X1 X1 I 200007656 Subassemblies and accessories Sniffer line SL3000 Renew filter X3 Perform sniffer operation every 1000 hours I 200001116 20003500 Calibration leak Recalibration replacement X2 Perform dependi...

Page 123: ...the maintenance interval to one year The recommendation is made to maintain the technical specifications of the pump specified by the manufacturer throughout the life of the device Lack of maintenance will not normally result in a sudden failure of the pump Due to wear pressure performance will decrease over time As long as the pressure performance is suitable for the customer application the repl...

Page 124: ...or disposal WARNING Danger due to harmful substances Contaminated devices could endanger health The contamination declaration serves to protect all persons who come into contact with the device Devices sent in without a return number and completed contamination declaration will be returned to the sender by the manufacturer Fill in the declaration of contamination completely 1 Contact the manufactu...

Page 125: ...INFICON Decommissioning 9 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 125 152 ...

Page 126: ...ion of the SL200 551 205 Sniffer line SL200 3 8 m long and cable extension for the electrical connection set of 14005 and 551 205 551 210 Sniffer line SL3000 SL3000 3 sniffer line 3 m length 525 001 SL3000 5 sniffer line 5 m length 525 002 SL3000 10 sniffer line 10 m length 525 003 SL3000 15 sniffer line 15 m length 525 004 Holder for sniffer line SL3000 551 203 Sniffer line for system integration...

Page 127: ... is 3 8 m To operate this sniffer line you also need a cable extension for the electrical connection For mounting the hooks for winding up the power line or sniffer line see Connect the supplied accessories 43 Sniffer line SL3000 The sniffer line SL3000 is connected to the rear of the leak detector so that a vacuum installation at the inlet flange on top of the leak detector does not have to be re...

Page 128: ...ic value or as a diagram on the display of the remote controls see the RC1000 Technical Manual Measurement values you create over a recording time of up to 24 hours in the internal memory of the RC1000 You transfer the data easily to a USB flash drive You can set an internal setpoint for warning when exceeding the setpoints The warning occurs visually on the display and audibly via the built in lo...

Page 129: ... you have misplaced the RC1000WL wireless remote control you can trigger from your leak detector acoustic signals of this remote control 1 Setup Accessories RC1000 2 Select the setting ON in the field Paging request ð The remote control emits acoustic signals 3 To stop signals from being emitted after finding the remote control select OFF in the Paging request field ...

Page 130: ...from Off Pressure p1 Pressure p2 Leak rate mantissa Leak rate exponent Leak rate linear Leak rate logarithmic Leak rate mantissa hyst and Via interface 3 Set up the Analog output 2 ð You can choose from Off Pressure p1 Pressure p2 Leak rate mantissa Leak rate exponent Leak rate linear Leak rate logarithmic Leak rate mantissa hyst and Via interface 4 Set up the Analog output scaling ð You can choos...

Page 131: ...ted unit Useful only if the other analog output Leak rate mantissa or Leak rate mantissa hyst is assigned Linear leak rate 0 10 V linear in the selected unit The upper limit 10 V is set via the parameter Exponent upper limit in whole decades The lower value is always 0 leak rate which corresponds to 0 V output voltage This setting is for both analog outputs if an appropriate output function is sel...

Page 132: ...e The output voltage can be specified for tests with the LD log command 221 Leak rate mantissa hyst 0 7 10 V linear in the selected unit Useful only if the other analog output is assigned Leak rate exponent Through an overlap of the mantissa in the range 0 7 to 1 0 a constant jumping between two decades is prevented 0 7 V corresponds to a leak rate of 0 7 x 10 x 9 9 V corresponds to a leak rate of...

Page 133: ...witch on purge only in standby state Switch off purge only in standby state Start inactive active Change to the measurement mode Start Stop inactive active active inactive Change to the measurement mode Switch to Standby Stop inactive active Switch to Standby ZERO inactive active active inactive Switch ZERO on Switch ZERO off 10 2 4 Configuring digital outputs The digital outputs PLC OUT 1 The ava...

Page 134: ...closed Device is to be calibrated open Device is not to be calibrated Calibration stable closed Calibration completed with calibration leak open Assignment not stable or calibration is inactive Cathode 2 closed Cathode 2 is active open Cathode 1 is active Measuring closed Measuring ZERO is possible all setpoint outputs switch depending on the leak rate open Standby or emission disabled ZERO is not...

Page 135: ...en open Internal vent valve closed Standby or evacuate closed State standby or evacuate active open State standby of evacuate not active such as when measuring Status calibration leak valve closed Calibration leak valve is open open Calibration leak valve closed Warning closed Warning open No warning ZERO active closed ZERO switched on open ZERO switched off 10 2 5 Setting up the I O module protoc...

Page 136: ... and the bus module proceed as follows 1 Switch off the leak detector 2 Connect the INFICON bus module via a data cable to the LD socket of the device see Connections for accessories and control signals 31 3 Switch on the leak detector 4 Setup Accessories Device selection 5 Select the Bus module as device 6 Confirm with 10 3 2 Setting a bus module address You can set the setpoint for the field bus...

Page 137: ...rnet This is true for connections over WLAN as well as over Ethernet However if you want to access the web interface of the leak testing remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties 10 4 1 1 Configure the LAN connection of the leak detector ü Supervisor rights...

Page 138: ...ommend using a current version of the web browser Chrome Firefox or Safari To access the leak tester from the PC or tablet web browser enter the IP address of the leak detector as follows http IP address ð The current active user interface of the leak detector is called ð The same functionality is available on the PC or Tablet as on the touchscreen of the leak detector 10 4 1 3 Allow client access...

Page 139: ... web interface of the leak testing remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties In order to be able to access the user interface of the device via WiFi there needs to be a WiFi capable USB adapter with WiFi Access Point technology inserted in the rear of the c...

Page 140: ...steps then on most devices it is sufficient just to enter the URL ü A wireless LAN capable USB adapter with wireless LAN Access Point Technology is connected to a USB port of the leak detector see Control unit 23 ü In the configuration of the leak detector the option Enabled is activated see Configure the wireless LAN connection of the leak detector 139 ü The WLAN connection is automatically detec...

Page 141: ...ed by PC or Tablet activate the Client Access option ð If the option Client Access is not activated the leak detector cannot be operated via PC or Tablet No settings can then be changed 3 Save Display of all connected clients ü The network connection between the leak detector and one or more PCs or Tablets has been established see Setting the wireless LAN connection in the PC or Tablet 140 Setup N...

Page 142: ... 9 Protocols Calibration log 10 Protocols Maintenance log 11 Regeneration 12 Update Update operating unit 13 Update Update operating unit Operating unit expert update 14 Update Update Basic Unit 15 Update Update Basic Unit Basic unit expert update 16 Vacuum diagram 11 1 2 Settings 1 Display General display settings 2 Display Bar chart 3 Display Circle chart 4 Display Line chart 5 Display Switch mo...

Page 143: ...Setup Measurement Vacuum TMP2 28 Setup Measurement Vacuum Vacuum ranges 29 Setup Measurement Vacuum Purge 30 Setup Measurement Vacuum Vent 31 Setup Measurement ZERO and filter 32 Setup Network Client access 33 Setup Network LAN settings 34 Setup Network Connected clients 35 Setup Network WLAN settings 36 Setup Maintenance requests 37 Setup Maintenance counters 38 Setup Accessories Bus module 39 Se...

Page 144: ...semblies Preamplifier 6 Energy Power 7 Energy Voltage 1 8 Energy Voltage 2 9 Energy Current 10 Device Operating hours 11 Device Identification 12 Device MSB 13 Device Network 14 Help Errors and warnings 15 HYDRO S 16 Calibration 17 Measurement values Run times 18 Measurement values Leak rate and pressure 19 Measurement values Temperature 20 Sniffer line 21 Accessories Bus module 22 Accessories I O...

Page 145: ...INFICON Appendix 11 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 145 152 11 2 CE Declaration of Conformity ...

Page 146: ...11 Appendix INFICON 146 152 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 ...

Page 147: ...INFICON Appendix 11 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 147 152 11 3 RoHS ...

Page 148: ...ffer line SL3000 19 D Declaration of Contamination 124 Definition of terms 9 Display background leak rate 57 Display leak rate and pressure 85 Display maximum leak rate 24 Display runtimes 85 Display temperature value 85 E Evacuation time gross leak 60 Evacuation time measurements 60 Exhaust 29 46 F Factory settings 34 Function description 18 H HYDRO S Definition 18 set 67 use 67 I I O module 130 ...

Page 149: ...tion leak 68 Set of parameters Delete 88 load 88 Setting setpoints 65 Setting the language 53 Sniffer line Pressure monitoring 74 Replacing the filter 117 Sniffer line SL200 127 Sniffer line SL3000 127 Software Update basic unit 90 User interface update 89 Supervisor 52 54 Switch monitor 24 91 92 Switch off 94 Switching on 51 T Take a screenshot 120 Technical data 32 TMP2 mode 66 Touch monitor 24 ...

Page 150: ...Index INFICON 150 152 UL6000 Fab PLUS Operating instructions iinc75en1 02 2207 Factory setting 70 ...

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