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4. Operating
Procedures
Connect and start up the equipment in accordance with the following procedures.
4.1 Piping and electric wiring
1) Connect the pipes setting the flow direction in the direction of the arrow on the main
body so that the Liquid flow meter(LF or XF) is on the upstream side of the liquid supply
line of MV. The MV liquid supply port is a 1/8inch VCR Male type.
Fit the MFC for carrier gas on the upstream side of the MV carrier gas inlet.
If stainless steel pipes are used, set the Liquid flow meter(LF or XF) at a distance of 10
cm or more from MV to prevent transmission of heat of MV to the Liquid flow meter.
Set MV and the MFC at a distance of 10 cm or more from each other so that the MFC is
not affected by heat.
* Length of the valve cable for connecting the Liquid flow meter(LF or XF) and MV is 1m.
Install the Liquid flow meter(LF or XF) within the reach of the valve cable from MV.
* To prevent increase in the secondary pressure during vaporization, determine the
piping diameter in consideration of piping pressure loss.
* When the liquid material contains particles, fit a filter (0.01
m or so) in the middle of
the line.
Please select the filter in consideration of pressure loss.
* MV is a normal open type. It is recommended to provide a normal closed type
pneumatic valve between Liquid flow meter(LF or XF) and MV to prevent damage in
case of urgent stop owing to power interruption.
* For introduction of purging liquid or purging gas, it is recommended to use an angle
integrated valve.
* Clean the installed piping line with ethanol or IPA before connecting MV.
2) Perform leak test of the joints with a helium leak detector or the like.
3) Fit a jacket heater and a temperature measuring sensor, such as a thermocouple, onto
the piping on the secondary side of MV, and wind a tape heater and an insulating
material over them to heat the piping. (See Section 10 “Example of preparation of
secondary heating piping.”)
4) Please connect "MV side" of the valve cable of attachment in a valve connector, and the
connector of a side with a statement to MV, and already connect the connector of an
end to the round connector in a liquid flow meter (LF or XF).
