background image

- 2 - 

Supplied cables 

Name Model 

Specifications 

Valve cable 

SC-MIV-1MF

Cable length: 100 +/- 2 cm 
Connector ( MV side):

 

FGJ.00.302.CYMD35 (LEMO) 

 

    (LF or XF side) :FGG.00.302.CYC.D35 (LEMO) 

MAIN T.C. Cable 

SC-MIT-2MA

Cable length: 200 +/- 10 cm 
Connector (MV side):SMP-KM (OMEGA) 

 

  (Temp. controller side):Bare wire 

VAPO T.C. Cable 

SC-MVT-2MA

MAIN Heater Cable 

SC-MIH-2MF

Cable length:    200+/- 10 cm     
Connector (MV side):

 

FGJ.1B.302.CYMD52 (LEMO) 

Connector (Temp. controller side): Bare wire [18AWG] 

VAPO Heater Cable 

SC-MVH-2MF Cable length:    200+/- 10 cm     

Connector (MV side): FGK.1B.302.CYMD52 (LEMO) 
Connector (Temp. controller side): Bare wire [18AWG] 

*1

 :  As for other materials, consult us.

 

Use a material having a high purity of 99.9999% or more. 

*2

 :  Each of the Mixing valve and the vaporizer unit uses two 100 VA heaters at the working voltage, 

and the heater capacity is 200 VA.    Do not supply heater power at a voltage higher than this 
voltage.    Doing so can damage the heaters.    When the 120 V AC (200 VA) heaters are used on 
100 VAC , the heater capacity is 140 VA.    If the amount of heat about 1.2 times the vaporization 
latent heat and radiated heat at the full-scale flow rate of generated material can be supplied at a 
capacity of 140 VA, the heaters can be used without any problem.     

*3

 : The valve travel has been adjusted according to the flow rate applicable to each model.    The 

valve travel has been adjusted at the working temperature.    Use the vaporizer within the main 
unit temperature setting recommended by us 

10

C.(Even 140 

C is a maximum in the case of 

140 

C specification.) The maximum flow rate during actual operation will be determined 

depending on the Liquid flow meter to be used in combination. 

*4

 :  As for the wetted materials, the models differ in the material of the seat of the flow rate control 

valve.  The P (PFA) type valves are standard because seat leakage owing to particles and 
product hardly occurs.    For some materials having high permeability, it is necessary to use the 
M type (SUS316L) valves. 

*5

 : The maximum operating temperatures of the mixing valve and the vaporizer are 140

C and 

200

C.    However, the temperature settings vary depending on the liquid material to be used and 

vaporization conditions.    When actually vaporizing, use the units at the temperatures specified 
by us.    The valve travel has been adjusted at the temperatures specified by us. 

*6

 :  The temperature switch is connected also with the control part and the vaporizer part at a heater 

and series. When the temperature switch operates by a rise in heat, the electric supply to a 
heater is disconnected and carries out a temperature fall. A temperature switch is a self-hold type. 
In order to make it return, it is necessary to suspend the electric supply to a temperature switch. 
(If electric supply occurs to a temperature switch, it is a mechanism in which a temperature 
switch's own temperature does not fall, by PTC with a built-in temperature switch.) Where the 
current supply source to a temperature switch is suspended, When a temperature switch 
becomes about 80 

C or less, a power supply comes to be again supplied to a heater. The 

temperature switch on each of the mixing valve and the vaporizer is connected in parallel with the 
heaters. The contact of temperature switch will be ”open”, when temperature is abnormal 
compared with the preset temperature. 

*7 

MV-2

□□□

-

V

 models have integrated pneumatic valves (NC) for shutting off the liquid.    For the 

pneumatic valves, nickel alloy, SUS316L and polyimide parts are used as wetted material. 

Conformable Directive 

This equipment conforms to the following standards; 

[the Low Voltage Directive] EN61010-1: 2010(Ed3.0) 

Summary of Contents for MV-2000

Page 1: ...Mixing Vaporizer MV 2000 Instruction Manual CODE I031170900...

Page 2: ...arranties set forth herein shall be extended Any malfunction or damage attributable to improper operation Any malfunction attributable to repair or modification by any person not authorized by HORIBA...

Page 3: ...to abide by the information in a WARNING may result in serious injury and can be life threatening WARNING CAUTION HOT SURFACE After heating up do not touch the main unit Doing so can burn your hands C...

Page 4: ...iquid supply line 12 9 2 Clogging by vaporization 13 9 3 Pressure loss of internal nozzles 14 9 4 Valve travel for set temperature 14 9 5 Purging procedures 14 9 6 Temperature control 14 9 7 Setting o...

Page 5: ...Hz 200 VA Orifice MV 2 4 0 4 mm MV 2 7 0 7 mm MV 2 0 1 0 mm Applicable flow rate 3 MV 2 1 Less than 1 ccm or g min MV 2 2 1 to less than 5 ccm or g min MV 2 3 5 to less than 10 ccm or g min MV 2 4 10...

Page 6: ...differ in the material of the seat of the flow rate control valve The P PFA type valves are standard because seat leakage owing to particles and product hardly occurs For some materials having high p...

Page 7: ...3 3 External Dimensions 3 1 without pnuematic valve Unit mm...

Page 8: ...4 3 2 with pnuematic valve Unit mm...

Page 9: ...rmine the piping diameter in consideration of piping pressure loss When the liquid material contains particles fit a filter 0 01 m or so in the middle of the line Please select the filter in considera...

Page 10: ...e CA thermocouples and 200W heaters are used Use temperature regulators and SSRs appropriate to these specifications For MV use temperature regulators having a control period proportional period of 1...

Page 11: ...ial check that the signal has been input When the liquid material is introduced the output signal of the Liqud flow meter LF or XF temporarily increases This is not an error The signal will become zer...

Page 12: ...turn off the temperature regulators of MV Disconnect them after the main unit cools off 7 Troubleshooting When any trouble occurs with MV flow control or temperature condition check the following poi...

Page 13: ...shut off after a temperature fall and a heater power supply when temperature does not rise and you check heater resistance and there is no electrical connection of a heater The heater power supply sh...

Page 14: ...ing signal to the liquid flow meter LF or XF and check for seat leakage See the remedies stated in the following item Seat leakage The valve cable has not been connected to MV or Liquid flow meter LF...

Page 15: ...e vaporizer of MV is controlled by the temperature regulator Therefore thermocouple and heater wires are necessary for each regulator Wire the regulator correctly checking the marking on the cables If...

Page 16: ...ed and turned into air bubbles in the liquid The amount of gas dissolved in the liquid material changes depending on the applied pressure kind of pressure gas kind of liquid material and temperature I...

Page 17: ...hanges It is necessary to compare the pressure under uniform conditions 2 The valve travel can be monitored by checking the supply voltage to the control valve valve voltage monitor output Since MV is...

Page 18: ...the piping the material may not be purged completely Therefore for a material having an excessively low vapor pressure it is recommended to provide a branch line for evacuation on the piping for supp...

Page 19: ...to Item 1 of 9 2 Clogging by vaporization and stop the vaporization before the secondary side is completely blocked If the passage is clogged to stop the flow the values output from the mass flow cont...

Page 20: ...ll 5 Amp specification of overcurrent protection such as circuit breaker or fuse in the heater power line 1 Temperature regulation in mixing valve MV main unit 2 Temperature regulation in Vaporizer Mi...

Page 21: ...ate of manufacture as far as the safety and usage precautions for the product are observed Name and amount of toxic hazardous substance or element used in a product Unit name Toxic hazardous substance...

Reviews: