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The flow rate of carrier MFC, Liquid flow meter indication does not stabilize. The liquid does not
flow in full scale.
Cause Countermeasure
The primary pressure (supply pressure)
is low (high).
Set the primary pressure as specified.
The secondary pressure is high, and
the vapor is condensed.
Set the secondary pressure as specified.
MV is not at the set temperature.
Check the temperature setting and the temperatures displayed
on the temperature regulators.
Air bubbles in the liquid material
It is necessary to investigate the cause of generation of air
bubbles and take measures. See 9.1 “Entry of air bubbles into
liquid supply line.”
The flow meter is disordered.
Stop the supply of the material, and check that the flow meter
indicates the zero point and stabilizes. (Please confirm the
instruction manual of the flow meter currently used.)
Seat leakage from MV
Input the forced closing signal to the liquid flow meter(LF or XF),
and check for seat leakage. (See the remedies stated in the
following item “Seat leakage.”)
The valve cable has not been
connected to MV or Liquid flow meter
(LF or XF).
Connect the cable.
Nozzle clogging
The purge gas after vacuuming is introduced and the cycle purge
which carries out vacuuming again is carried out.
Please exchange MV, when you do not improve.
Seat leakage (When the valve is forcibly closed, the Liquid flow meter(LF or XF) output fluctuates.)
Cause Countermeasure
The primary pressure (supply pressure)
is too high.
Reduce the primary pressure to the specified pressure.
The forced closing signal is not input.
The setting signal is not a minus value.
Check the wiring and signal.
The temperature of MV is too high.
Reduce the temperature of MV to the specified temperature.
The valve cable has not been
connected to MV or LIQUID FLOW
METER(LF or XF).
Connect the cable.
Leak of piping
A leak part is pinpointed and it changes into a state without leak.
If the trouble is not removed by performing the remedies stated above, contact us.
