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Mixing Vaporizer
MV-2000

Instruction Manual

CODE: I031170900

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Summary of Contents for MV-2000

Page 1: ...Mixing Vaporizer MV 2000 Instruction Manual CODE I031170900...

Page 2: ...arranties set forth herein shall be extended Any malfunction or damage attributable to improper operation Any malfunction attributable to repair or modification by any person not authorized by HORIBA...

Page 3: ...to abide by the information in a WARNING may result in serious injury and can be life threatening WARNING CAUTION HOT SURFACE After heating up do not touch the main unit Doing so can burn your hands C...

Page 4: ...iquid supply line 12 9 2 Clogging by vaporization 13 9 3 Pressure loss of internal nozzles 14 9 4 Valve travel for set temperature 14 9 5 Purging procedures 14 9 6 Temperature control 14 9 7 Setting o...

Page 5: ...Hz 200 VA Orifice MV 2 4 0 4 mm MV 2 7 0 7 mm MV 2 0 1 0 mm Applicable flow rate 3 MV 2 1 Less than 1 ccm or g min MV 2 2 1 to less than 5 ccm or g min MV 2 3 5 to less than 10 ccm or g min MV 2 4 10...

Page 6: ...differ in the material of the seat of the flow rate control valve The P PFA type valves are standard because seat leakage owing to particles and product hardly occurs For some materials having high p...

Page 7: ...3 3 External Dimensions 3 1 without pnuematic valve Unit mm...

Page 8: ...4 3 2 with pnuematic valve Unit mm...

Page 9: ...rmine the piping diameter in consideration of piping pressure loss When the liquid material contains particles fit a filter 0 01 m or so in the middle of the line Please select the filter in considera...

Page 10: ...e CA thermocouples and 200W heaters are used Use temperature regulators and SSRs appropriate to these specifications For MV use temperature regulators having a control period proportional period of 1...

Page 11: ...ial check that the signal has been input When the liquid material is introduced the output signal of the Liqud flow meter LF or XF temporarily increases This is not an error The signal will become zer...

Page 12: ...turn off the temperature regulators of MV Disconnect them after the main unit cools off 7 Troubleshooting When any trouble occurs with MV flow control or temperature condition check the following poi...

Page 13: ...shut off after a temperature fall and a heater power supply when temperature does not rise and you check heater resistance and there is no electrical connection of a heater The heater power supply sh...

Page 14: ...ing signal to the liquid flow meter LF or XF and check for seat leakage See the remedies stated in the following item Seat leakage The valve cable has not been connected to MV or Liquid flow meter LF...

Page 15: ...e vaporizer of MV is controlled by the temperature regulator Therefore thermocouple and heater wires are necessary for each regulator Wire the regulator correctly checking the marking on the cables If...

Page 16: ...ed and turned into air bubbles in the liquid The amount of gas dissolved in the liquid material changes depending on the applied pressure kind of pressure gas kind of liquid material and temperature I...

Page 17: ...hanges It is necessary to compare the pressure under uniform conditions 2 The valve travel can be monitored by checking the supply voltage to the control valve valve voltage monitor output Since MV is...

Page 18: ...the piping the material may not be purged completely Therefore for a material having an excessively low vapor pressure it is recommended to provide a branch line for evacuation on the piping for supp...

Page 19: ...to Item 1 of 9 2 Clogging by vaporization and stop the vaporization before the secondary side is completely blocked If the passage is clogged to stop the flow the values output from the mass flow cont...

Page 20: ...ll 5 Amp specification of overcurrent protection such as circuit breaker or fuse in the heater power line 1 Temperature regulation in mixing valve MV main unit 2 Temperature regulation in Vaporizer Mi...

Page 21: ...ate of manufacture as far as the safety and usage precautions for the product are observed Name and amount of toxic hazardous substance or element used in a product Unit name Toxic hazardous substance...

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