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Satellite XT 4-20 mA Versions
Substance / Sensor
Part No
Sensor
Nominal
Range
Unit
Note
Dust Filter
allowed
O3
Ozone
9602-7100
0 ...
1.00
ppm
No
O3
Ozone
9602-7101
0 ...
1.00
ppm
1)
No
PH3
Phosphine (3 El.)
9602-6101
0 ...
1.00
ppm
Yes
PH3
Phosphine (2 El.)
9602-6100
0 ...
1.00
ppm
1)
Yes
SF6
Sulfur Hexafluoride
9602-9710
0 ...
0.500
% vol
3)
no data
SiH4
Silane
9602-6300
0 ...
50.0
ppm
Yes
SO2
Sulfur Dioxide
9602-5900
0 ...
25.0
ppm
Yes
TEOS
Tetraethyl Orthosilicate
9602-7500
0 ...
100
ppm
No
TMB
Trimethyl borate
9602-7510
0 ...
500
ppm
No
TMP
Trimethyl phosphite
9602-7800
0 ...
30.0
ppm
Yes
Notes: 1) Special application
2) Special range
3) Pyrolyzer Module required for detection
4) Only for use with Satellite XT C-versions
Further gases and ranges on request
8-2
Reference Information - Section 8