6 - 4
6.3 Spare
Parts
The spare parts shown below must be obtained when the system is operated for a long time.
The number of spare parts you need to stock varies depending on your intended use. (See
Table 6.3.)
Table 6.3 Spare Parts
Part No.
Name
Remarks
Quantity
Used
J821153 Fuse
For
maintenance
(0.3
A)
2
J821154 Fuse
For
maintenance
(0.5
A)
2
J821156 Fuse
For
maintenance
(1.6
A)
2
J821157 Fuse
For
maintenance
(2
A)
2
J821158 Fuse
For
maintenance
(3.2
A)
2
J821159 Fuse
For
maintenance
(5
A)
2
J821591
Alarm Fuse
For maintenance (2 A)
2
J821594
Alarm Fuse
For maintenance (5 A)
2
J821055 Fuse
For
maintenance
(6.3
A)
2
55E-1392 Specimen
stage
70 mm
-
55E-1682 Specimen
stage
30 mm
-
L456819 O-ring
For
electron
gun
1
L456111
O-ring
For inner pipe
1
L456850
O-ring
For specimen chamber port (front)
1
L456824
O-ring
For specimen chamber port (side)
1