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4.
Tilt the electron gun to the left of the system until it touches the cushion.
NOTE
: When handling the components inside the electron gun (the cap, the Wehnelt, the
anode, and the cartridge filament), use clean gloves to keep them free of particles
and smudges.
CAUTION
: The electron gun weighs 2.5 kg. It might cause finger injury when
opening and shutting. Be careful not to pinch your fingers when opening
and shutting.
The anode has a screw-in structure. Put on gloves, and remove the anode by turning it
counterclockwise. Cover the removed anode with clean aluminum foil or place it in a
plastic bag to protect it from particles or scratches.
Figure 5.4-1 Opening and Closing the
Electron Gun
Figure 5.4-2 Removing the Anode
5.
Remove the liner pipe.
To take out the liner pipe, first pull out the liner tube.
For a description on how to pull out the liner tube, refer to 5.3 Condenser Lens Aperture
Replacement. After removing the liner tube, pull out the liner pipe. Clean a tool, such as
a hex wrench, insert the tool through the pipe head, and pull it straight up.
Figure 5.4-3 Pulling the Liner Pipe Out (1)
Cushion