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µPG 501
User Guide
5
System Startup and Shutdown
NOTICE:
Updates of driver software can inhibit the µPG 501 from working properly.
•
Whenever Windows offers updates, only select important updates
•
Never change the settings for automatic updates to fully automatic.
STARTUP
1. At the Lithography Unit, switch on the µPG 501 with the On/Off switch (13). The
Power On/Off Indicator Lamp (9) lights up.
2. Make sure that air pressure for the stage is applied and the lid is closed. The Safety
Interlock Lamp (10) should be off.
3. Power up the Menu PC according to the manufacturer’s instructions. Factory
settings for login are user upg501, password upg501.
4. Start the Exposure Wizard. When starting the wizard after a shutdown, startup takes
approximately a minute due to the necessary initialization processes.
5. With the wizard, the camera software HI Vision starts.
Do not close the camera
window while the wizard is running
, otherwise the wizard may crash and has to
be restarted.
6. Once the startup sequence of the wizard is finished, run a stage initialization (
Tools
Initialize Stage
)
SHUTDOWN
1. Close the wizard (
File
Exit
). It takes around 10 seconds for the software to finish
all background processes before the wizard itself stops.
2. Switch off the µPG system with the On/Off switch (13). The Power On/Off Indicator
Lamp (9) goes out.
3. Power down the Menu PC according to the manufacturer's instructions.
RESTART
1. Close the wizard (
File
Exit
).
2. Switch off the µPG system with the On/Off switch (13).
3. Wait ~20 seconds.
4. Switch on the µPG system.
5. If required (e.g., because of communication problems), reboot the User PC
according to the manufacturer's instructions. Factory settings for login are user
upg501, password upg501.
6. Start the Exposure Wizard.
7. With the wizard, the camera software HI Vision starts.
Do not close the camera
window while the wizard is running
, otherwise the wizard may crash and has to
be restarted.
8. Once the startup sequence of the wizard is finished, run a stage initialization (
Tools
Initialize Stage
)
Summary of Contents for mPG 501
Page 1: ...User Guide PG 501...
Page 4: ......
Page 40: ...PG 501 36 User Guide Notes...
Page 41: ...PG 501 User Guide 37 Notes...
Page 42: ...PG 501 38 User Guide Notes...