HEIDELBERG mPG 501, User Manual

Page: 12 / 42

µPG 501
8
User Guide
coating and processing procedures (e.g. spinning speed, pre-bake and post-bake
parameters, recommended developer and developing time etc.).
General Advice:
•
Take care to protect the substrates from light (even safe light, as far as possible) and
humidity at all times until developing is finished.
•
Always wear lint-free gloves (e.g. Latex) when handling the substrates.
•
Protect the substrate from scratches whenever transporting it. Use only designated
transport boxes.
•
Never use out-of-date batches.
•
Carefully clean the back side of the substrate before use to make sure it gets good
vacuum suction on the µPG 501 stage chuck.
•
Don’t expose substrates to water, humidity, solvents, or solvent fumes.
EXPOSURE PROCEDURE
For easy use, the µPG 501 provides an
Exposure Wizard
that guides the operator
through the steps of an exposure. There are three different types of exposure: the
standard exposure, an exposure with alignment to existing structures, and the optional
target mode exposure that allows to directly expose structures defined in the camera
image.
STEPS OF A STANDARD EXPOSURE
A Exposure Setup
1. Prepare the design in the required format, as described in the Conversion
Software Manual. Make sure the design complies with all design rules given
there, the general as well as the specific.
2. If the design is not accessible via network from the Menu PC, transfer it to the
µPG 501 PC e.g., using a memory stick or CD. Copy it to the directory
C:\HIMT\designs
or a sub-directory.
Note :
If any other directory is used, the design cannot be found.
If the Exposure Wizard is already running, proceed with step 4.
3. Start the
µPG 501 Exposure Wizard
using the shortcut on the desktop.
The
Welcome Screen
opens, showing
the progress of the connection and
initialization sequence. This includes a
check of all hardware components. At
the same time, the
HIVison
window
opens.
Note
: Never close the
HIVision
window while the exposure
wizard is running. Doing so will
cause the wizard to crash.
Figure 3: Startup panel