µPG 501
User Guide
13
NOTICE
: Manual focusing while this function is active can lead to irreversible
damage to the system. Don’t use any focusing functions before the
freezing is deactivated.
4. Check again if air pressure is OK, the lid is closed, and no alignment pins have
been left in the stage chuck.
5. Click
Start Exposure
.
During an exposure, the exposure status is shown online in the window. Make
sure that during the complete exposure time the cover lid stays closed, and no
white light is switched on in the room. In addition, to get best results, avoid
vibrations caused by people passing by or by heavy loads being moved on the
floor close to the system.
6. To interrupt an exposure, click on
Cancel
and confirm.
D Unloading
1. After exposure is finished, if no further designs should be exposed on the same
plate, click on
Unload
.
2. Wait until all movement has stopped.
3. Open the lid, switch off the vacuum with the vacuum switch (5) and carefully lift
the substrate off the chuck. Store it in a light-proof transport box.
4. Process the substrate as soon as possible according to the substrate type and
manufacturers recommendation.
5. For further exposures of the same design on the same substrate, adjust
parameters if required and restart. For a different exposure on the same
substrate, use the
Back
button to get back to the
Exposure Setup
panel.
Summary of Contents for mPG 501
Page 1: ...User Guide PG 501...
Page 4: ......
Page 40: ...PG 501 36 User Guide Notes...
Page 41: ...PG 501 User Guide 37 Notes...
Page 42: ...PG 501 38 User Guide Notes...
