HEIDELBERG mPG 501, User Manual

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µPG 501
User Guide
17
9. The next message box offers to set the current position as coordinate origin.
Click
OK
.
10. In the
Exposure Mode
frame, click on the checkbox for
Alignment
.
11. Click
Next
to proceed to the next panel.
C Alignment Procedure
In the
Alignment
panel, a text box on the
right leads through all steps of alignment
setup. The steps are nevertheless also
described here.
1. In the
Alignment Mode
frame, select if
Manual
or one of the automatic modes
(
Template, Cross, Mask Edge
) of
alignment should be used by checking
the related check button. If
Mask Edge
is selected, proceed directly to part D.
2. Click on
Start <alignment method>
.
Note :
Anytime during alignment,
clicking
Cancel Alignment
resets the procedure.
3. Select the number of
Alignment Points
that should be used (1-4). Click
Continue
.
4. The
Control Panel
opens below the
Alignment
panel and shows the
XY Stage
register card.
5. Use the controls on the
XY Stage
register to move the (first) alignment mark into
the field of view.
Note :
To interrupt a movement or procedure, click on the
Stop
button.
•
Choose between 'jog' mode
(continuous movement at a certain
speed) and 'step' mode (position
change by defined increments)
•
Adjust the 'jog' speed with the slider,
the 'step' increment in the text boxes
•
Move into a certain direction by
clicking on the direction arrows
arranged as a cross
•
If position (in the current coordinate
system!) or distance are known
exactly, use the absolute or relative
movement. Enter position
coordinates / distances into the fields and click on the arrow beside these to
execute the movement.
Figure 11: Alignment setup panel
Figure 12: XY stage control panel