µPG 501
User Guide
11
X
Y
loading side
5. Make sure the resist coated side of the substrate is
turned up, and position it against the alignment pins.
If the substrate bears alignment marks that should
be used for exposure,
note that the coordinate
system of the stage is oriented such that the x
axis
corresponds
to
a
backward-forward
movement, while the y-axis corresponds to a left-
right movement when standing in front of the
machine
(see Figure 6).
The four center vacuum suction holes are always
active when the vacuum is switched on, holding
down small substrates. For substrate sizes of 2" or
larger, additional vacuum region extensions can be
added using the vacuum field selection screws
(4) (see right part of Figure 5, and Figure 7).
Switch on the vacuum with the vacuum switch
(5). Check whether the plate is really held tight
by trying to move it slightly sideways. If plate is
not held, switch off the vacuum and clean plate
backside and chuck before trying again. If
problems persist, use a different substrate.
6. Remove all alignment pins. Close the cover lid
(1) and make sure the interlock lamp (10) is
off.
NOTICE:
If the alignment pins are left on the stage during exposure of a thin
substrate, the system can take
serious damage
!
7. Click
OK
in the message box. The stage moves to the center position, and the
write head moves down until the focal point is on the substrate surface.
8. A message box opens, offering to start the Find Plate Center procedure. Click
OK
if the origin should be set in the center of the plate, or if it is for other reasons
of interest to have the write head exactly above the substrate center (e.g.,
because it is a good starting point to find alignment sites).
9. The next message box offers to set the current position as coordinate origin.
Click
OK
. For exposures without alignment, this is the only point where the
coordinate system origin can be set.
10. In the
Exposure Mode
frame, select
Standard Exposure
for a simple exposure
without alignment. For an exposure procedure with alignment, refer to the next
section.
11. Click
Next
to proceed to the next panel.
Figure 7: Vacuum region selection
Figure 6: Stage coordinate
system
selected: deselected:
4"&5" 3" 2"
Summary of Contents for mPG 501
Page 1: ...User Guide PG 501...
Page 4: ......
Page 40: ...PG 501 36 User Guide Notes...
Page 41: ...PG 501 User Guide 37 Notes...
Page 42: ...PG 501 38 User Guide Notes...
